JP6388644B2 - 筐体内に密閉封止してはんだ付けすることができる窓要素を製造するための方法、および前記方法によって製造された自由形状窓要素 - Google Patents

筐体内に密閉封止してはんだ付けすることができる窓要素を製造するための方法、および前記方法によって製造された自由形状窓要素 Download PDF

Info

Publication number
JP6388644B2
JP6388644B2 JP2016513228A JP2016513228A JP6388644B2 JP 6388644 B2 JP6388644 B2 JP 6388644B2 JP 2016513228 A JP2016513228 A JP 2016513228A JP 2016513228 A JP2016513228 A JP 2016513228A JP 6388644 B2 JP6388644 B2 JP 6388644B2
Authority
JP
Japan
Prior art keywords
layer
substrate material
window element
optical coating
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016513228A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016526290A5 (enExample
JP2016526290A (ja
Inventor
エルヴィラ ギットラー
エルヴィラ ギットラー
シュテフェン ビアマン
シュテフェン ビアマン
ヴォルフガング ブローデ
ヴォルフガング ブローデ
ファルコ シュテルツナー
ファルコ シュテルツナー
Original Assignee
イエーノプティーク オプティカル システムズ ゲーエムベーハー
イエーノプティーク オプティカル システムズ ゲーエムベーハー
マイクロ・ハイブリッド エレクトロニック ゲーエムベーハー
マイクロ・ハイブリッド エレクトロニック ゲーエムベーハー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by イエーノプティーク オプティカル システムズ ゲーエムベーハー, イエーノプティーク オプティカル システムズ ゲーエムベーハー, マイクロ・ハイブリッド エレクトロニック ゲーエムベーハー, マイクロ・ハイブリッド エレクトロニック ゲーエムベーハー filed Critical イエーノプティーク オプティカル システムズ ゲーエムベーハー
Publication of JP2016526290A publication Critical patent/JP2016526290A/ja
Publication of JP2016526290A5 publication Critical patent/JP2016526290A5/ja
Application granted granted Critical
Publication of JP6388644B2 publication Critical patent/JP6388644B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/02Viewing or reading apparatus
    • G02B27/022Viewing apparatus
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0875Windows; Arrangements for fastening thereof
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/0271Housings; Attachments or accessories for photometers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/04Casings
    • G01J5/041Mountings in enclosures or in a particular environment
    • G01J5/045Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/02Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/02Viewing or reading apparatus
    • G02B27/028Viewing or reading apparatus characterised by the supporting structure
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/007Pressure-resistant sight glasses
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/40Optical elements or arrangements
    • H10F77/407Optical elements or arrangements indirectly associated with the devices
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00Etching, surface-brightening or pickling compositions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Laser Beam Processing (AREA)
  • Semiconductor Lasers (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Led Device Packages (AREA)
  • Light Receiving Elements (AREA)
  • Optical Couplings Of Light Guides (AREA)
JP2016513228A 2013-05-13 2014-05-13 筐体内に密閉封止してはんだ付けすることができる窓要素を製造するための方法、および前記方法によって製造された自由形状窓要素 Active JP6388644B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102013008478.4A DE102013008478A1 (de) 2013-05-13 2013-05-13 Verfahren zur Herstellung von in ein Gehäuse hermetisch dicht einlötbaren Fensterelementen und danach hergestellte Freiformfensterelemente
DE102013008478.4 2013-05-13
PCT/DE2014/100165 WO2014183746A1 (de) 2013-05-13 2014-05-13 Verfahren zur herstellung von in ein gehäuse hermetisch dicht einlötbaren fensterelementen und danach hergestellte freiformfensterelemente

Publications (3)

Publication Number Publication Date
JP2016526290A JP2016526290A (ja) 2016-09-01
JP2016526290A5 JP2016526290A5 (enExample) 2017-06-22
JP6388644B2 true JP6388644B2 (ja) 2018-09-12

Family

ID=51211462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016513228A Active JP6388644B2 (ja) 2013-05-13 2014-05-13 筐体内に密閉封止してはんだ付けすることができる窓要素を製造するための方法、および前記方法によって製造された自由形状窓要素

Country Status (6)

Country Link
US (1) US10330941B2 (enExample)
EP (1) EP2997406B1 (enExample)
JP (1) JP6388644B2 (enExample)
CN (1) CN105209949B (enExample)
DE (2) DE102013008478A1 (enExample)
WO (1) WO2014183746A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9560781B2 (en) * 2013-07-19 2017-01-31 Materion Corporation Metal cap assembly for optical communications
DE102017109913A1 (de) * 2017-05-09 2018-11-15 Henke-Sass, Wolf Gmbh Linse für ein distales Ende eines Optikkanals eines Endoskopschaftes
DE112018004026A5 (de) * 2017-08-07 2020-05-28 Jenoptik Optical Systems Gmbh Lagetoleranzunempfindliches kontaktierungsmodul zur kontaktierung optoelektronischer chips
CN109788643B (zh) * 2017-11-10 2024-07-30 泰连公司 铝基可焊接的触头
DE102018107697B4 (de) * 2018-03-29 2020-12-10 Hegla Boraident Gmbh & Co. Kg Entschichtungseinrichtungen und -verfahren zum Entschichten von Glastafeln, vorzugsweise Verbundglastafeln
CN114895393B (zh) * 2022-05-23 2023-09-05 无锡泓瑞航天科技有限公司 一种晶圆级金属化光学窗片及其制备方法
CN115064599B (zh) * 2022-06-10 2024-04-02 无锡泓瑞航天科技有限公司 一种红外探测器用金属化窗片的金属膜层制备方法
CN118377099B (zh) * 2024-03-15 2025-12-19 华侨大学 一种光学窗口的封装方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51156770U (enExample) * 1975-06-07 1976-12-14
JPH07101721B2 (ja) * 1988-06-03 1995-11-01 住友特殊金属株式会社 集積回路用Agろう付きシールリング及びその製造方法
JPH06201454A (ja) * 1992-12-30 1994-07-19 Horiba Ltd 赤外線検出器
JPH0799368A (ja) * 1993-09-29 1995-04-11 Mitsubishi Electric Corp 光半導体装置
US5882988A (en) * 1995-08-16 1999-03-16 Philips Electronics North America Corporation Semiconductor chip-making without scribing
JPH11211555A (ja) * 1998-01-29 1999-08-06 Horiba Ltd 赤外線検出器
US6962834B2 (en) * 2002-03-22 2005-11-08 Stark David H Wafer-level hermetic micro-device packages
DE102004049134A1 (de) * 2004-10-07 2006-04-13 Schott Ag Metallreflektor und Verfahren zu dessen Herstellung
DE102005024512B3 (de) 2005-05-26 2007-02-08 Jenoptik Laser, Optik, Systeme Gmbh Verfahren zur Herstellung von in ein Gehäuse hermetisch dicht einlötbaren Fensterelementen
DE102007039291A1 (de) * 2007-08-20 2009-02-26 Osram Opto Semiconductors Gmbh Optoelektronisches Halbleitermodul und Verfahren zur Herstellung eines solchen
JP2009276691A (ja) * 2008-05-16 2009-11-26 Nippon Shinku Kogaku Kk 光学素子及びその製造方法
JP2010045117A (ja) * 2008-08-11 2010-02-25 Disco Abrasive Syst Ltd 光デバイスウエーハの加工方法
JP5492213B2 (ja) * 2009-08-17 2014-05-14 パナソニック株式会社 赤外線センサ
US20140093688A1 (en) * 2012-09-28 2014-04-03 Yindar Chuo Method for fabrication of nano-structures

Also Published As

Publication number Publication date
US20160062127A1 (en) 2016-03-03
EP2997406A1 (de) 2016-03-23
US10330941B2 (en) 2019-06-25
DE112014002384A5 (de) 2016-07-14
CN105209949B (zh) 2018-08-24
CN105209949A (zh) 2015-12-30
JP2016526290A (ja) 2016-09-01
EP2997406B1 (de) 2021-09-29
WO2014183746A1 (de) 2014-11-20
WO2014183746A4 (de) 2015-01-29
DE102013008478A1 (de) 2014-11-13

Similar Documents

Publication Publication Date Title
JP6388644B2 (ja) 筐体内に密閉封止してはんだ付けすることができる窓要素を製造するための方法、および前記方法によって製造された自由形状窓要素
US9761740B2 (en) Electromagnetic radiation micro device, wafer element and method for manufacturing such a micro device
US10644477B2 (en) Light source device
JP2011220939A (ja) 赤外線センサの製造方法
JP2016526290A5 (enExample)
US10439359B2 (en) Light source device
US10700487B2 (en) Light source device
US20220329039A1 (en) Micromechanical optical component and manufacturing method
JP7541041B2 (ja) パッケージのためのコンポーネントアレンジメントを製造するための方法、コンポーネントアレンジメントを有するパッケージを製造するための方法、コンポーネントアレンジメント、およびパッケージ
JP2009276691A (ja) 光学素子及びその製造方法
JP7500317B2 (ja) 半導体発光装置
WO2014024347A1 (ja) 赤外光源
JP7108179B2 (ja) キャップの製造方法と、発光装置及びその製造方法
US7468293B2 (en) Method for the production of window elements which can be soldered into a housing in a hermetically tight manner and of a window element sealing a housing
KR101521763B1 (ko) 캡슐화장치를 제조하는 방법
JP7388119B2 (ja) 光学用窓材、光学用窓材の製造方法、光学部材、及び光学部材の製造方法
JP2019033125A (ja) 光源装置
JP2022127834A (ja) パッケージ
JP3635651B2 (ja) 光半導体用窓ガラス及び光半導体モジュール
CN102099926A (zh) 具有气体填充的镜的光电子半导体芯片
JP2018021946A (ja) 光学レンズ
JP2006324374A (ja) 透光窓付き蓋体とその製造方法
JP6711706B2 (ja) 蓋体、撮像素子収納用パッケージおよび撮像装置
EP0895111A1 (en) Bonding of aluminum oxide components to silicon substrates
JP2018081839A (ja) レーザ駆動ランプ

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170511

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20170511

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20180129

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20180227

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180516

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20180717

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20180814

R150 Certificate of patent or registration of utility model

Ref document number: 6388644

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250