JP6361048B2 - 金属炭窒化膜又は半金属炭窒化膜の製造方法及び金属炭窒化膜又は半金属炭窒化膜の製造装置 - Google Patents
金属炭窒化膜又は半金属炭窒化膜の製造方法及び金属炭窒化膜又は半金属炭窒化膜の製造装置 Download PDFInfo
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- JP6361048B2 JP6361048B2 JP2016562355A JP2016562355A JP6361048B2 JP 6361048 B2 JP6361048 B2 JP 6361048B2 JP 2016562355 A JP2016562355 A JP 2016562355A JP 2016562355 A JP2016562355 A JP 2016562355A JP 6361048 B2 JP6361048 B2 JP 6361048B2
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- carbonitride film
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/28—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases more than one element being applied in one step
- C23C8/30—Carbo-nitriding
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/36—Carbonitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45553—Atomic layer deposition [ALD] characterized by the use of precursors specially adapted for ALD
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
Description
一般式(1)
(式中、複数のRは、同一又は異なっていても良く、それぞれ、水素原子、炭素原子数1〜5の直鎖状、分枝状又は環状のアルキル基、若しくは炭素原子数1〜9のトリアルキルシリル基を示す。なお、複数のRは、互いに結合して環を形成していても良い。)
で示されるグアニジン化合物を含む窒素源と、金属源又は半金属源とを成膜対象物上に供給して金属炭窒化膜又は半金属炭窒化膜を成膜する。
一般式(1)
(式中、複数のRは、同一又は異なっていても良く、それぞれ、水素原子、炭素原子数1〜5の直鎖状、分枝状又は環状のアルキル基、若しくは炭素原子数1〜9のトリアルキルシリル基を示す。なお、複数のRは、互いに結合して環を形成していても良い。)
で示されるグアニジン化合物を含む窒素源と、金属源又は半金属源とを成膜対象物上に供給して金属炭窒化膜又は半金属炭窒化膜を成膜する。 具体的には、図1に示すように、金属炭窒化膜又は半金属炭窒化膜の製造装置20の反応室21内に設けられた配置部22に配置された成膜対象物23に対して、反応室21内に設けられた金属源又は半金属源供給部24から金属源又は半金属源24aを供給すると共に、反応室21内に設けられた窒素源供給部25から窒素源25aを供給することにより膜26を成膜する。 金属炭窒化膜又は半金属炭窒化膜の製造方法は、特に限定されない。金属炭窒化膜又は半金属炭窒化膜は、例えば、CVD法(Chemical Vapor Deposition法;以下、CVD法と称する)もしくはALD(Atomic Layer Deposition;以下、ALD法と称する)法等の蒸着法で製造することができる。
尚、本発明において成膜温度は、成膜時における成膜対象物の温度のことである。
グアニジン化合物は、前記の一般式(1)で示される。その一般式(1)において、複数のRは、同一又は異なっていても良く、それぞれ、水素原子、炭素原子数1〜5の直鎖状、分枝状又は環状のアルキル基、若しくは炭素原子数1〜9のトリアルキルシリル基である。
表1に示すグアニジン化合物を用いて、表1に示す条件で、CVD法により、20mm×20mmサイズの基板上に膜を成膜した。また、成膜した膜をXPS(X−ray Photoelectron Spectroscopy)分析することにより膜を特定した。
21 反応室
22 配置部
23 成膜対象物
24 金属源又は半金属源供給部
24a 金属源又は半金属源
25 窒素源供給部
25a 窒素源
26 膜
Claims (8)
- 一般式(1)
(式中、複数のRは、同一又は異なっていても良く、それぞれ、水素原子、炭素原子数1〜5の直鎖状、分枝状又は環状のアルキル基、若しくは炭素原子数1〜9のトリアルキルシリル基を示す。なお、複数のRは、互いに結合して環を形成していても良い。)
で示されるグアニジン化合物を含む窒素源と、金属源又は半金属源とを成膜対象物上に供給して金属炭窒化膜又は半金属炭窒化膜を成膜する、金属炭窒化膜又は半金属炭窒化膜の製造方法。 - 前記半金属炭窒化膜としてシリコン炭窒化膜を成膜する請求項1に記載の金属炭窒化膜又は半金属炭窒化膜の製造方法。
- 脂肪族炭化水素類、芳香族炭化水素類及びエーテル類からなる群より選ばれる少なくとも1種の溶媒を含むグアニジン化合物溶液を前記窒素源として用いる請求項1又は2に記載の金属炭窒化膜又は半金属炭窒化膜の製造方法。
- 前記金属源又は半金属源として、金属ハロゲン化物又は半金属ハロゲン化物を用いる請求項1〜3のいずれか一項に記載の金属炭窒化膜又は半金属炭窒化膜の製造方法。
- 金属炭窒化膜又は半金属炭窒化膜の成膜温度を600℃未満とする請求項1〜4のいずれか一項に記載の金属炭窒化膜又は半金属炭窒化膜の製造方法。
- 金属炭窒化膜又は半金属炭窒化膜の成膜温度を550℃未満とする請求項5に記載の金属炭窒化膜又は半金属炭窒化膜の製造方法。
- 金属炭窒化膜又は半金属炭窒化膜の成膜温度を500℃以下とする請求項6に記載の金属炭窒化膜又は半金属炭窒化膜の製造方法。
- 請求項1〜7のいずれか一項に記載の金属炭窒化膜又は半金属炭窒化膜の製造方法に用いられる金属炭窒化膜又は半金属炭窒化膜の製造装置であって、
前記成膜対象物が配置される配置部を有する反応室と、
前記反応室内に前記金属源又は半金属源を供給する金属源又は半金属源供給部と、
前記反応室内に前記窒素源を供給する窒素源供給部と、
を備える金属炭窒化膜又は半金属炭窒化膜の製造装置。
Applications Claiming Priority (3)
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JP2014243722 | 2014-12-02 | ||
JP2014243722 | 2014-12-02 | ||
PCT/JP2015/081014 WO2016088500A1 (ja) | 2014-12-02 | 2015-11-04 | 金属炭窒化膜又は半金属炭窒化膜の製造方法、金属炭窒化膜又は半金属炭窒化膜及び金属炭窒化膜又は半金属炭窒化膜の製造装置 |
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JPWO2016088500A1 JPWO2016088500A1 (ja) | 2017-05-25 |
JP6361048B2 true JP6361048B2 (ja) | 2018-07-25 |
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JP2016562355A Expired - Fee Related JP6361048B2 (ja) | 2014-12-02 | 2015-11-04 | 金属炭窒化膜又は半金属炭窒化膜の製造方法及び金属炭窒化膜又は半金属炭窒化膜の製造装置 |
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US (1) | US20170247786A1 (ja) |
JP (1) | JP6361048B2 (ja) |
KR (1) | KR20170091090A (ja) |
CN (1) | CN107109642A (ja) |
TW (1) | TW201634732A (ja) |
WO (1) | WO2016088500A1 (ja) |
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JP4434149B2 (ja) * | 2006-01-16 | 2010-03-17 | 東京エレクトロン株式会社 | 成膜方法、成膜装置及び記憶媒体 |
US8142847B2 (en) * | 2007-07-13 | 2012-03-27 | Rohm And Haas Electronic Materials Llc | Precursor compositions and methods |
JP5064296B2 (ja) * | 2008-05-21 | 2012-10-31 | 東京エレクトロン株式会社 | シリコン炭窒化膜の形成方法および形成装置 |
JP6371223B2 (ja) * | 2012-12-21 | 2018-08-08 | 国立研究開発法人理化学研究所 | g−C3N4フィルムの製造方法およびその利用 |
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2015
- 2015-11-04 US US15/519,885 patent/US20170247786A1/en not_active Abandoned
- 2015-11-04 JP JP2016562355A patent/JP6361048B2/ja not_active Expired - Fee Related
- 2015-11-04 CN CN201580058152.XA patent/CN107109642A/zh active Pending
- 2015-11-04 KR KR1020177013000A patent/KR20170091090A/ko unknown
- 2015-11-04 WO PCT/JP2015/081014 patent/WO2016088500A1/ja active Application Filing
- 2015-12-01 TW TW104140207A patent/TW201634732A/zh unknown
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US20170247786A1 (en) | 2017-08-31 |
TW201634732A (zh) | 2016-10-01 |
WO2016088500A1 (ja) | 2016-06-09 |
KR20170091090A (ko) | 2017-08-08 |
JPWO2016088500A1 (ja) | 2017-05-25 |
CN107109642A (zh) | 2017-08-29 |
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