JP6346167B2 - 工作機械におけるアナログ測定走査方法および対応する工作機械装置 - Google Patents
工作機械におけるアナログ測定走査方法および対応する工作機械装置 Download PDFInfo
- Publication number
- JP6346167B2 JP6346167B2 JP2015506298A JP2015506298A JP6346167B2 JP 6346167 B2 JP6346167 B2 JP 6346167B2 JP 2015506298 A JP2015506298 A JP 2015506298A JP 2015506298 A JP2015506298 A JP 2015506298A JP 6346167 B2 JP6346167 B2 JP 6346167B2
- Authority
- JP
- Japan
- Prior art keywords
- traverse
- probe
- analog
- measurement
- machine tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
- G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Human Computer Interaction (AREA)
- Manufacturing & Machinery (AREA)
- Automation & Control Theory (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP12250093 | 2012-04-18 | ||
| EP12250093.7 | 2012-04-18 | ||
| US201261720323P | 2012-10-30 | 2012-10-30 | |
| US61/720,323 | 2012-10-30 | ||
| PCT/GB2013/050964 WO2013156765A1 (en) | 2012-04-18 | 2013-04-16 | A method of analogue measurement scanning on a machine tool and corresponding machine tool apparatus |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015531852A JP2015531852A (ja) | 2015-11-05 |
| JP2015531852A5 JP2015531852A5 (enExample) | 2016-06-23 |
| JP6346167B2 true JP6346167B2 (ja) | 2018-06-20 |
Family
ID=49382986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015506298A Active JP6346167B2 (ja) | 2012-04-18 | 2013-04-16 | 工作機械におけるアナログ測定走査方法および対応する工作機械装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9726481B2 (enExample) |
| EP (1) | EP2839240B1 (enExample) |
| JP (1) | JP6346167B2 (enExample) |
| CN (1) | CN104969028B (enExample) |
| TW (1) | TWI503523B (enExample) |
| WO (1) | WO2013156765A1 (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103842766B (zh) * | 2011-10-06 | 2017-05-24 | 瑞尼斯豪公司 | 测量方法 |
| WO2013156767A1 (en) * | 2012-04-18 | 2013-10-24 | Renishaw Plc | A method of finding a feature using a machine tool |
| CN104487801B (zh) * | 2012-04-18 | 2018-12-07 | 瑞尼斯豪公司 | 在机床上测量的方法以及相应的机床设备 |
| JP6007873B2 (ja) * | 2013-08-30 | 2016-10-12 | トヨタ自動車株式会社 | ロボット及びその制御方法 |
| JP6159647B2 (ja) * | 2013-11-12 | 2017-07-05 | 三菱重工工作機械株式会社 | 工作機械の加工検査ワークを用いた機上計測方法 |
| US10215560B2 (en) * | 2015-03-24 | 2019-02-26 | Kla Tencor Corporation | Method for shape classification of an object |
| GB201505999D0 (en) | 2015-04-09 | 2015-05-27 | Renishaw Plc | Measurement method and apparatus |
| US10545019B2 (en) * | 2015-04-14 | 2020-01-28 | Hexagon Metrology, Inc. | CMM probe path controller and method |
| US9952580B2 (en) * | 2016-01-29 | 2018-04-24 | The Boeing Company | Method and an apparatus for machining a part for an assembly |
| GB201615307D0 (en) * | 2016-09-09 | 2016-10-26 | Renishaw Plc | Measurement method and apparatus |
| GB201806828D0 (en) * | 2018-04-26 | 2018-06-13 | Renishaw Plc | Surface finish stylus |
| GB201806830D0 (en) * | 2018-04-26 | 2018-06-13 | Renishaw Plc | Surface finish stylus |
| EP3611465A1 (en) * | 2018-08-14 | 2020-02-19 | Renishaw PLC | Method, computer program and apparatus for measurement cycle generation in a touch trigger coordinate machine |
| EP3623883B1 (de) | 2018-09-17 | 2024-07-24 | Adelbert Haas GmbH | Verfahren und werkzeugmaschine zur bearbeitung von werkstücken unbekannter werkstückgeometrie |
| US10814492B2 (en) | 2019-02-15 | 2020-10-27 | R-Go Robotics Ltd | Apparatus and method for surface traversing with capacitive sensing of surface |
| JP7530272B2 (ja) * | 2020-11-06 | 2024-08-07 | 株式会社ミツトヨ | 形状測定装置および異常検出方法 |
| CN112925263A (zh) * | 2021-01-25 | 2021-06-08 | 深圳市玄羽科技有限公司 | 一种cnc数控机台探头及其控制方法 |
Family Cites Families (62)
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|---|---|---|---|---|
| US4153998A (en) | 1972-09-21 | 1979-05-15 | Rolls-Royce (1971) Limited | Probes |
| US4166323A (en) | 1973-09-14 | 1979-09-04 | Maag Gear-Wheel & Machine Co. Ltd. | Gear tester for profile and lead testing |
| GB1551218A (en) | 1975-05-13 | 1979-08-22 | Rolls Royce | Probe for use in displacement measuring apparatus |
| GB2174216B (en) | 1985-03-19 | 1988-10-26 | Mitutoyo Mfg Co Ltd | Method of operating a coordinate measuring instrument |
| CN85105480A (zh) | 1985-07-17 | 1987-01-14 | 通用电气公司 | 针尖接触式探测系统 |
| GB8713715D0 (en) | 1987-06-11 | 1987-07-15 | Renishaw Plc | Workpiece inspection method |
| JPH02145908A (ja) | 1988-11-28 | 1990-06-05 | Okuma Mach Works Ltd | デジタイジング装置におけるスタイラスのたわみ補正自動設定方法 |
| GB8908854D0 (en) | 1989-04-19 | 1989-06-07 | Renishaw Plc | Method of and apparatus for scanning the surface of a workpiece |
| US5189806A (en) * | 1988-12-19 | 1993-03-02 | Renishaw Plc | Method of and apparatus for scanning the surface of a workpiece |
| GB9110818D0 (en) | 1991-05-21 | 1991-07-10 | Renishaw Metrology Ltd | A method of measuring workpieces using a surface contacting measuring probe |
| DE4245012B4 (de) | 1992-04-14 | 2004-09-23 | Carl Zeiss | Verfahren zur Messung von Formelementen auf einem Koordinatenmeßgerät |
| DE69309588T2 (de) | 1992-09-12 | 1997-07-24 | Renishaw Plc, Wotton-Under-Edge, Gloucestershire | Verfahren und Gerät zum Abtasten der Oberfläche eines Werkstückes |
| US5948972A (en) | 1994-12-22 | 1999-09-07 | Kla-Tencor Corporation | Dual stage instrument for scanning a specimen |
| GB2302589B (en) * | 1995-06-21 | 1998-11-11 | Zeiss Stiftung | Probe head for coordinate measuring machines with a clamping device for clamping the deflectable part of the probe head |
| DE19730471C5 (de) | 1997-07-16 | 2009-02-19 | Hexagon Metrology Gmbh | Verfahren zum Scannen mit einem Koordinatenmeßgerät |
| US6580964B2 (en) | 1998-10-24 | 2003-06-17 | Renishaw Plc | Calibrations of an analogue probe and error mapping |
| JP4660779B2 (ja) | 2000-08-18 | 2011-03-30 | 学校法人 中央大学 | 移動装置の位置誤差評価方法およびその評価結果に基づく移動精度向上方法 |
| JP3905771B2 (ja) | 2001-03-02 | 2007-04-18 | 株式会社ミツトヨ | 測定機の校正方法及び装置 |
| GB0118492D0 (en) | 2001-07-30 | 2001-09-19 | Renishaw Plc | A machine tool control process and apparatus therfor |
| GB0126232D0 (en) * | 2001-11-01 | 2002-01-02 | Renishaw Plc | Calibration of an analogue probe |
| GB0210990D0 (en) | 2002-05-14 | 2002-06-19 | Rolls Royce Plc | Method of generating an inspection program and method of generating a visual display |
| GB0215152D0 (en) * | 2002-07-01 | 2002-08-07 | Renishaw Plc | Probe or stylus orientation |
| GB0215478D0 (en) | 2002-07-04 | 2002-08-14 | Renishaw Plc | Method of scanning a calibrating system |
| GB0220158D0 (en) | 2002-08-30 | 2002-10-09 | Renishaw Plc | Method of scanning |
| CN1297796C (zh) | 2003-07-02 | 2007-01-31 | 西安交通大学 | 线阵光电传感器层析扫描三维测量方法及其装置 |
| GB0322115D0 (en) | 2003-09-22 | 2003-10-22 | Renishaw Plc | Method of error compensation |
| GB0322362D0 (en) * | 2003-09-24 | 2003-10-22 | Renishaw Plc | Measuring methods for use on machine tools |
| GB0329098D0 (en) * | 2003-12-16 | 2004-01-21 | Renishaw Plc | Method of calibrating a scanning system |
| US7543393B2 (en) * | 2003-12-16 | 2009-06-09 | Renishaw Plc | Method of calibrating a scanning system |
| GB0400144D0 (en) | 2004-01-06 | 2004-02-11 | Renishaw Plc | Inspection system |
| CN1727871A (zh) | 2004-01-14 | 2006-02-01 | Fei公司 | 探针显微镜的操作方法 |
| EP1555676A3 (en) | 2004-01-14 | 2006-09-13 | FEI Company | Method of operating a probe microscope |
| JP2007529734A (ja) | 2004-03-18 | 2007-10-25 | レニショウ パブリック リミテッド カンパニー | 物体走査 |
| JP4782990B2 (ja) | 2004-05-31 | 2011-09-28 | 株式会社ミツトヨ | 表面倣い測定装置、表面倣い測定方法、表面倣い測定プログラムおよび記録媒体 |
| JP4510520B2 (ja) | 2004-06-01 | 2010-07-28 | キヤノン株式会社 | 形状測定方法および形状測定装置 |
| GB0414649D0 (en) | 2004-06-30 | 2004-08-04 | Renishaw Plc | Generation of a CNC machine tool control program |
| GB0417536D0 (en) | 2004-08-06 | 2004-09-08 | Renishaw Plc | The use of surface measurement probes |
| GB0508273D0 (en) | 2005-04-25 | 2005-06-01 | Renishaw Plc | Method for scanning the surface of a workpiece |
| GB0508395D0 (en) | 2005-04-26 | 2005-06-01 | Renishaw Plc | Method for scanning the surface of a workpiece |
| US20070050089A1 (en) | 2005-09-01 | 2007-03-01 | Yunquan Sun | Method for detecting the position and orientation of holes using robotic vision system |
| GB0608235D0 (en) | 2006-04-26 | 2006-06-07 | Renishaw Plc | Differential calibration |
| GB0611109D0 (en) | 2006-06-06 | 2006-07-19 | Renishaw Plc | A method for measuring workpieces |
| GB0625260D0 (en) | 2006-12-19 | 2007-01-24 | Renishaw Plc | A method for measuring a workpiece using a machine tool |
| GB0703423D0 (en) * | 2007-02-22 | 2007-04-04 | Renishaw Plc | Calibration method and apparatus |
| EP1978328B1 (en) | 2007-04-03 | 2015-02-18 | Hexagon Metrology AB | Oscillating scanning probe with constant contact force |
| GB0707921D0 (en) * | 2007-04-24 | 2007-05-30 | Renishaw Plc | Apparatus and method for surface measurement |
| US8919005B2 (en) | 2007-04-30 | 2014-12-30 | Renishaw Plc | Analogue probe and method of operation |
| EP1988357B1 (en) | 2007-05-04 | 2018-10-17 | Hexagon Technology Center GmbH | Coordinate measuring method and device |
| GB0713639D0 (en) | 2007-07-13 | 2007-08-22 | Renishaw Plc | Error correction |
| GB0716218D0 (en) | 2007-08-20 | 2007-09-26 | Renishaw Plc | Measurement path generation |
| JP5091702B2 (ja) | 2008-02-04 | 2012-12-05 | 株式会社ミツトヨ | プローブの真直度測定方法 |
| US7752000B2 (en) | 2008-05-02 | 2010-07-06 | Qcept Technologies, Inc. | Calibration of non-vibrating contact potential difference measurements to detect surface variations that are perpendicular to the direction of sensor motion |
| JP4611403B2 (ja) | 2008-06-03 | 2011-01-12 | パナソニック株式会社 | 形状測定装置及び形状測定方法 |
| WO2010049693A2 (en) | 2008-10-29 | 2010-05-06 | Renishaw Plc | Measurement method |
| GB0900878D0 (en) | 2009-01-20 | 2009-03-04 | Renishaw Plc | Method for optimising a measurement cycle |
| JP5281992B2 (ja) | 2009-08-28 | 2013-09-04 | 株式会社日立製作所 | 走査型プローブ顕微鏡及びそれを用いた計測方法 |
| EP2290486A1 (en) | 2009-08-28 | 2011-03-02 | Renishaw plc | Machine tool calibration method |
| JP5439157B2 (ja) | 2009-12-22 | 2014-03-12 | 三菱重工業株式会社 | 歯車測定方法 |
| JP5690941B2 (ja) | 2010-09-13 | 2015-03-25 | ヘキサゴン・テクノロジー・センター・ゲーエムベーハーHexagon Technology Center Gmbh | 表面走査座標測定装置の制御方法及び制御装置 |
| CN103562672B (zh) | 2011-01-19 | 2016-09-28 | 瑞尼斯豪公司 | 用于机床设备的模拟测量探头 |
| CN103842766B (zh) * | 2011-10-06 | 2017-05-24 | 瑞尼斯豪公司 | 测量方法 |
| WO2013156767A1 (en) * | 2012-04-18 | 2013-10-24 | Renishaw Plc | A method of finding a feature using a machine tool |
-
2013
- 2013-04-16 WO PCT/GB2013/050964 patent/WO2013156765A1/en not_active Ceased
- 2013-04-16 EP EP13719595.4A patent/EP2839240B1/en active Active
- 2013-04-16 CN CN201380031456.8A patent/CN104969028B/zh active Active
- 2013-04-16 JP JP2015506298A patent/JP6346167B2/ja active Active
- 2013-04-16 US US14/391,837 patent/US9726481B2/en active Active
- 2013-04-18 TW TW102113862A patent/TWI503523B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| CN104969028B (zh) | 2018-06-01 |
| TW201350791A (zh) | 2013-12-16 |
| CN104969028A (zh) | 2015-10-07 |
| JP2015531852A (ja) | 2015-11-05 |
| WO2013156765A1 (en) | 2013-10-24 |
| US20150121710A1 (en) | 2015-05-07 |
| EP2839240A1 (en) | 2015-02-25 |
| TWI503523B (zh) | 2015-10-11 |
| EP2839240B1 (en) | 2017-09-06 |
| US9726481B2 (en) | 2017-08-08 |
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