JP6326442B2 - 磁気検出ユニット及びこれを備えるストローク検出装置 - Google Patents
磁気検出ユニット及びこれを備えるストローク検出装置 Download PDFInfo
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- JP6326442B2 JP6326442B2 JP2016068269A JP2016068269A JP6326442B2 JP 6326442 B2 JP6326442 B2 JP 6326442B2 JP 2016068269 A JP2016068269 A JP 2016068269A JP 2016068269 A JP2016068269 A JP 2016068269A JP 6326442 B2 JP6326442 B2 JP 6326442B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/07—Hall effect devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/07—Hall effect devices
- G01R33/072—Constructional adaptation of the sensor to specific applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/147—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the movement of a third element, the position of Hall device and the source of magnetic field being fixed in respect to each other
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0005—Geometrical arrangement of magnetic sensor elements; Apparatus combining different magnetic sensor types
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0011—Arrangements or instruments for measuring magnetic variables comprising means, e.g. flux concentrators, flux guides, for guiding or concentrating the magnetic flux, e.g. to the magnetic sensor
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measuring Magnetic Variables (AREA)
Description
また、第1の発明では、磁気検出素子の磁束検出面は、第1磁界発生部及び第2磁界発生部の軸方向一端面と同一平面上に位置する。このため、第1磁界発生部及び第2磁界発生部を検出対象に対して近い位置に配置することが可能となる。第1磁界発生部及び第2磁界発生部と検出対象との間隔が小さいほど合成磁界の磁束の方向は、検出対象に追従して大きく変化する。このため、磁気検出ユニットは、検出対象が磁気検出ユニットの近くを通過することを確実に検出することができる。
S1={atan2(V2,V1)+π}/2π ・・・(1)
atan2(x,y):原点を始点とし、座標(x,y)を終点とするベクトルとx軸との成す角度(−π〜π)を算出する関数(アークタンジェント関数)
V1:第1磁気検出ユニット51の出力値
V2:第2磁気検出ユニット52の出力値
Claims (3)
- 第1磁界を発生させる第1磁界発生部と、
前記第1磁界発生部と並列に配置され、前記第1磁界の向きと反対の向きの第2磁界を発生させる第2磁界発生部と、
磁束検出面を有し、前記磁束検出面を通過する磁束密度に応じた信号を出力する磁気検出素子と、を備え、
前記磁気検出素子は、前記磁束検出面が、前記第1磁界と前記第2磁界とによる合成磁界における磁束の方向と平行であるとともに前記第1磁界発生部及び前記第2磁界発生部の軸方向一端面と同一平面上に位置するように、前記第1磁界発生部及び前記第2磁界発生部に対して配置されることを特徴とする磁気検出ユニット。 - 前記磁気検出素子が配置される側の端部とは反対側の端部において前記第1磁界発生部と前記第2磁界発生部とを連結するヨークと、
一端側が前記ヨークに結合され、前記第1磁界発生部及び前記第2磁界発生部と並行に設けられる位置決め部材と、をさらに備え、
前記磁気検出素子は、前記位置決め部材の他端側に取り付けられることを特徴とする請求項1に記載の磁気検出ユニット。 - 請求項1または2に記載の磁気検出ユニットを備えるストローク検出装置であって、
第1部材に対して進退自在に設けられる第2部材の表面に、前記第2部材の進退方向に沿って設けられるスケールと、
前記スケールに対向するように前記第1部材に設けられ、前記スケールによって変化する磁界に応じた信号を出力する前記磁気検出ユニットと、を備えることを特徴とするストローク検出装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016068269A JP6326442B2 (ja) | 2016-03-30 | 2016-03-30 | 磁気検出ユニット及びこれを備えるストローク検出装置 |
CN201780019413.6A CN108885243A (zh) | 2016-03-30 | 2017-02-10 | 磁检测单元及具备该磁检测单元的行程检测装置 |
EP17773720.2A EP3407077A1 (en) | 2016-03-30 | 2017-02-10 | Magnetic detecting unit and stroke detecting device provided with same |
US16/088,444 US20190086483A1 (en) | 2016-03-30 | 2017-02-10 | Magnetic detection unit and stroke detector including same |
PCT/JP2017/004929 WO2017169172A1 (ja) | 2016-03-30 | 2017-02-10 | 磁気検出ユニット及びこれを備えるストローク検出装置 |
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JP2016068269A JP6326442B2 (ja) | 2016-03-30 | 2016-03-30 | 磁気検出ユニット及びこれを備えるストローク検出装置 |
Publications (3)
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JP2017181280A JP2017181280A (ja) | 2017-10-05 |
JP2017181280A5 JP2017181280A5 (ja) | 2018-03-08 |
JP6326442B2 true JP6326442B2 (ja) | 2018-05-16 |
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JP2016068269A Active JP6326442B2 (ja) | 2016-03-30 | 2016-03-30 | 磁気検出ユニット及びこれを備えるストローク検出装置 |
Country Status (5)
Country | Link |
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US (1) | US20190086483A1 (ja) |
EP (1) | EP3407077A1 (ja) |
JP (1) | JP6326442B2 (ja) |
CN (1) | CN108885243A (ja) |
WO (1) | WO2017169172A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2019219293A (ja) * | 2018-06-20 | 2019-12-26 | Tdk株式会社 | 磁気センサ |
JP7172178B2 (ja) * | 2018-06-27 | 2022-11-16 | Tdk株式会社 | 磁気センサ |
JP7008149B2 (ja) * | 2019-01-17 | 2022-01-25 | キヤノン電子株式会社 | 磁気識別センサ |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3029657B2 (ja) * | 1990-09-28 | 2000-04-04 | カヤバ工業株式会社 | 位置検出装置 |
US5660744A (en) * | 1992-03-26 | 1997-08-26 | Kabushiki Kaisha Toshiba | Plasma generating apparatus and surface processing apparatus |
JP3064293B2 (ja) * | 1997-02-18 | 2000-07-12 | トヨタ自動車株式会社 | 回転センサ |
US6885267B2 (en) * | 2003-03-17 | 2005-04-26 | Hitachi Metals Ltd. | Magnetic-field-generating apparatus and magnetic field orientation apparatus using it |
JP2004286662A (ja) * | 2003-03-24 | 2004-10-14 | Komatsu Ltd | 磁気センサを用いた絶対位置検出装置 |
EP2054725A2 (en) * | 2006-08-15 | 2009-05-06 | Koninklijke Philips Electronics N.V. | Magnetic sensor device |
US8368395B2 (en) * | 2008-12-17 | 2013-02-05 | Ndt Technologies, Inc. | Magnetic inspection device and method for detecting loss in metallic cross section |
JP5056890B2 (ja) * | 2010-04-08 | 2012-10-24 | 株式会社デンソー | ストローク量検出装置 |
JP5818415B2 (ja) * | 2010-08-30 | 2015-11-18 | 株式会社東芝 | 電磁流量計測システムの校正装置 |
DE112011105736B4 (de) * | 2011-10-14 | 2018-04-12 | Mitsubishi Electric Corporation | Positionsdetektoreinrichtung |
DE102013206518A1 (de) * | 2013-04-12 | 2014-10-16 | Zf Friedrichshafen Ag | Magnetfeldsensorvorrichtung, Betätigungsvorrichtung und Verfahren zur Bestimmung einer Relativposition |
CN103226865B (zh) * | 2013-04-16 | 2016-05-25 | 无锡乐尔科技有限公司 | 一种基于磁电阻技术检测磁性图形表面磁场的磁头 |
CN104157068A (zh) * | 2013-05-14 | 2014-11-19 | 北京嘉岳同乐极电子有限公司 | 一种磁传感器 |
US10408892B2 (en) * | 2013-07-19 | 2019-09-10 | Allegro Microsystems, Llc | Magnet with opposing directions of magnetization for a magnetic sensor |
CN103927811B (zh) * | 2014-03-25 | 2016-09-14 | 江苏多维科技有限公司 | 一种磁电阻磁性图像识别传感器 |
DE102014113374B4 (de) * | 2014-09-17 | 2024-01-11 | Infineon Technologies Ag | Magnetpositionssensor und Erfassungsverfahren |
JP2017116412A (ja) * | 2015-12-24 | 2017-06-29 | Kyb株式会社 | ストローク検出装置 |
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2016
- 2016-03-30 JP JP2016068269A patent/JP6326442B2/ja active Active
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2017
- 2017-02-10 WO PCT/JP2017/004929 patent/WO2017169172A1/ja active Application Filing
- 2017-02-10 EP EP17773720.2A patent/EP3407077A1/en not_active Withdrawn
- 2017-02-10 CN CN201780019413.6A patent/CN108885243A/zh active Pending
- 2017-02-10 US US16/088,444 patent/US20190086483A1/en not_active Abandoned
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Publication number | Publication date |
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US20190086483A1 (en) | 2019-03-21 |
WO2017169172A1 (ja) | 2017-10-05 |
JP2017181280A (ja) | 2017-10-05 |
EP3407077A1 (en) | 2018-11-28 |
CN108885243A (zh) | 2018-11-23 |
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