JP6306437B2 - 縦型成膜装置 - Google Patents

縦型成膜装置 Download PDF

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Publication number
JP6306437B2
JP6306437B2 JP2014113615A JP2014113615A JP6306437B2 JP 6306437 B2 JP6306437 B2 JP 6306437B2 JP 2014113615 A JP2014113615 A JP 2014113615A JP 2014113615 A JP2014113615 A JP 2014113615A JP 6306437 B2 JP6306437 B2 JP 6306437B2
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Japan
Prior art keywords
film
vertical
unit
film forming
forming apparatus
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JP2014113615A
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Japanese (ja)
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JP2015227488A (ja
JP2015227488A5 (enExample
Inventor
俊 松本
俊 松本
司 村中
司 村中
紀夫 小野島
紀夫 小野島
茂 萩原
茂 萩原
裕 河野
裕 河野
早川　亮
亮 早川
昌子 星野
昌子 星野
哲 平木
哲 平木
禎雄 岩本
禎雄 岩本
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Yamanashi Prefecture
University of Yamanashi NUC
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Yamanashi Prefecture
University of Yamanashi NUC
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Priority to JP2014113615A priority Critical patent/JP6306437B2/ja
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  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Electric Cables (AREA)
JP2014113615A 2014-05-31 2014-05-31 縦型成膜装置 Active JP6306437B2 (ja)

Priority Applications (1)

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JP2014113615A JP6306437B2 (ja) 2014-05-31 2014-05-31 縦型成膜装置

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Application Number Priority Date Filing Date Title
JP2014113615A JP6306437B2 (ja) 2014-05-31 2014-05-31 縦型成膜装置

Publications (3)

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JP2015227488A JP2015227488A (ja) 2015-12-17
JP2015227488A5 JP2015227488A5 (enExample) 2017-03-23
JP6306437B2 true JP6306437B2 (ja) 2018-04-04

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JP2014113615A Active JP6306437B2 (ja) 2014-05-31 2014-05-31 縦型成膜装置

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017186604A (ja) * 2016-04-05 2017-10-12 北川工業株式会社 親水性スパッタ膜付き部材の製造方法
EP3760759B1 (en) * 2018-03-30 2024-12-11 JFE Steel Corporation Method of using a surface treatment facility

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4364995A (en) * 1981-02-04 1982-12-21 Minnesota Mining And Manufacturing Company Metal/metal oxide coatings
JPS62287068A (ja) * 1986-06-06 1987-12-12 Nissin Electric Co Ltd イオンビ−ム蒸着装置
JP3402637B2 (ja) * 1992-12-28 2003-05-06 キヤノン株式会社 太陽電池の製造方法、その製造装置及び長尺シート基板の製造方法
JP2002020884A (ja) * 2000-07-04 2002-01-23 Canon Inc 酸化亜鉛積層薄膜体およびその製造方法
JP2004232067A (ja) * 2003-01-31 2004-08-19 Fuji Electric Holdings Co Ltd 薄膜形成装置
JP4269261B2 (ja) * 2003-07-18 2009-05-27 住友ベークライト株式会社 透明ガスバリアフィルムの製造方法
KR20080037716A (ko) * 2005-08-18 2008-04-30 고꾸리쯔다이가꾸호오징 야마나시다이가꾸 산화아연 박막의 제조 방법 및 제조 장치
JP4844867B2 (ja) * 2005-11-15 2011-12-28 住友電気工業株式会社 真空蒸着装置の運転方法および真空蒸着装置
WO2011021622A1 (ja) * 2009-08-20 2011-02-24 コニカミノルタホールディングス株式会社 パターン薄膜形成方法
JP2011202248A (ja) * 2010-03-26 2011-10-13 Fujifilm Corp 成膜装置および成膜方法
US8865258B2 (en) * 2010-06-16 2014-10-21 Panasonic Corporation Method of manufacturing thin film which suppresses unnecessary scattering and deposition of a source material

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