JP6305380B2 - スティック検査装置及びスティック検査方法 - Google Patents
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Description
110 引っ張りユニット
111 クランプ
120 第1検査ユニット
130 光線分散ユニット
140 距離測定ユニット
150 制御ユニット
160 第2検査ユニット
161 屈曲検査器
162 ラインスキャナ
163 領域カメラ
170 プレアラインユニット
171 ステージ
172 ブロック
173 フローティング部
180 記録ユニット
190 アラインユニット
A ハンプの開始点
S スティック
Claims (10)
- 開口部が形成されたスティックを引っ張って固定させる引っ張りユニットと、
前記スティックから離隔されるように配置され、前記スティックを検査する第1検査ユニットと、
前記スティックを基準として、前記第1検査ユニットと反対方向に配置され、前記第1検査ユニットから照射された光を反射させる光線分散ユニットと、
前記光線分散ユニットを基準として、前記スティックと反対方向に配置され、前記光線分散ユニットから、前記スティックの底面から前記光線分散ユニットまでの第3距離を測定する距離測定ユニットと、
前記第1検査ユニットで検査した前記スティックのハンプの開始点から前記光線分散ユニットまでの第2距離を算出し、前記第2距離と前記第3距離との距離差を算出し、前記ハンプのハンプ高を算出し、前記ハンプ高を基に、前記スティックが不良か否かを判別する制御ユニットと、
を含むスティック検査装置。 - 前記第1検査ユニット、前記光線分散ユニット及び前記距離測定ユニットは、前記スティックの長手方向に直線移動が可能であるように構成されていることを特徴とする請求項1に記載のスティック検査装置。
- 前記光線分散ユニットと前記距離測定ユニットは、上下動が可能であるように構成されている請求項1又は2に記載のスティック検査装置。
- 前記第1検査ユニットは、共焦点顕微鏡、または干渉方式の顕微鏡であることを特徴とする請求項1から3のいずれか1項に記載のスティック検査装置。
- 前記距離測定ユニットは、レーザ段差系顕微鏡、共焦点顕微鏡、または干渉方式の顕微鏡であることを特徴とする請求項1から4のいずれか1項に記載のスティック検査装置。
- 前記スティックの屈曲検査、異物検査、エッチング程度検査、臨界寸法検査、全体ピッチ検査及び直進度検査のうちの少なくとも一つを行うことができる第2検査ユニットをさらに含むことを特徴とする請求項1から5のいずれか1項に記載のスティック検査装置。
- 前記第1検査ユニット及び前記距離測定ユニットから測定されたデータを基に、前記制御ユニットで生成された前記スティックの情報をQRコードで記録する記録ユニットをさらに含むことを特徴とする請求項1から6のいずれか1項に記載のスティック検査装置。
- 開口部を具備したスティックを引っ張って固定させる段階と、
上方からの光学的測定、または上方及び下方からの光学的測定を行い、これに基づき、前記スティックの最上面から光線分散ユニットまでの第1距離、前記スティックのハンプの開始点から前記光線分散ユニットまでの第2距離、前記スティックの底面から前記光線分散ユニットまでの第3距離を算出する段階と、
前記第2距離と前記第3距離との距離差を算出し、前記ハンプのハンプ高を算出する段階と、
前記ハンプ高を基に、前記スティックが不良か否かを判別する段階と、
を含むスティック検査方法。 - 前記スティックの屈曲検査、異物検査、エッチング程度検査、臨界寸法検査、全体ピッチ検査及び直進度検査のうちの少なくとも一つを行う段階をさらに含むことを特徴とする請求項8に記載のスティック検査方法。
- 検査した前記スティックの情報をQRコードに記録する段階をさらに含むことを特徴とする請求項8又は9に記載のスティック検査方法。
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KR1020140125298A KR101776190B1 (ko) | 2014-09-19 | 2014-09-19 | 스틱 검사 장치 및 스틱 검사 방법 |
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KR102352280B1 (ko) * | 2015-04-28 | 2022-01-18 | 삼성디스플레이 주식회사 | 마스크 프레임 조립체 제조 장치 및 이를 이용한 마스크 프레임 조립체 제조 방법 |
GB201716577D0 (en) | 2017-10-10 | 2017-11-22 | Sintef Tto As | Detection of fields |
KR102215123B1 (ko) * | 2018-11-26 | 2021-02-16 | 주식회사 탑 엔지니어링 | 기판 검사 장치 및 기판 검사 방법 |
CN109827514B (zh) * | 2019-04-09 | 2021-04-20 | 大连大学 | 一种防水卷材测厚装置 |
KR102274261B1 (ko) * | 2020-03-31 | 2021-07-07 | 재단법인 한국기계전기전자시험연구원 | 극판 버, 활물질 자동 검사장치 |
CN111948061A (zh) * | 2020-08-19 | 2020-11-17 | 江苏新源太阳能科技有限公司 | 一种太阳能电池组件面板形变量检测装置 |
CN111982027A (zh) * | 2020-09-01 | 2020-11-24 | 中国科学院长春光学精密机械与物理研究所 | 基于色散共焦的自由曲面非接触式测量系统 |
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US5184021A (en) * | 1991-06-24 | 1993-02-02 | Siscan Systems, Inc. | Method and apparatus for measuring the dimensions of patterned features on a lithographic photomask |
US5162941A (en) * | 1991-07-23 | 1992-11-10 | The Board Of Governors Of Wayne State University | Confocal microscope |
JP2000258130A (ja) | 1999-03-10 | 2000-09-22 | Toshiba Corp | 光学式厚み計及び光学式距離計 |
KR20040059389A (ko) | 2002-12-28 | 2004-07-05 | 주식회사 하이닉스반도체 | 포토 마스크 검사용 안착장치 |
JP2005085833A (ja) | 2003-09-05 | 2005-03-31 | Nikon Corp | マスク検査方法、マスク検査装置、マスク描画方法及び露光方法 |
JP2007033048A (ja) * | 2005-07-22 | 2007-02-08 | Ricoh Co Ltd | はんだ接合判定方法,はんだ検査方法,はんだ検査装置およびはんだ検査用プログラムならびに記録媒体 |
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KR20100111129A (ko) | 2009-04-06 | 2010-10-14 | 주식회사 하이닉스반도체 | 스테이지부를 구비하는 포토마스크의 검사 장비 |
KR101033032B1 (ko) * | 2010-09-30 | 2011-05-09 | 한국기계연구원 | 변위 측정 장치 |
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US9612208B2 (en) | 2017-04-04 |
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KR20160034537A (ko) | 2016-03-30 |
KR101776190B1 (ko) | 2017-09-08 |
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