JP6297557B2 - 量子井戸チューナブル短共振器レーザ - Google Patents
量子井戸チューナブル短共振器レーザ Download PDFInfo
- Publication number
- JP6297557B2 JP6297557B2 JP2015524495A JP2015524495A JP6297557B2 JP 6297557 B2 JP6297557 B2 JP 6297557B2 JP 2015524495 A JP2015524495 A JP 2015524495A JP 2015524495 A JP2015524495 A JP 2015524495A JP 6297557 B2 JP6297557 B2 JP 6297557B2
- Authority
- JP
- Japan
- Prior art keywords
- tunable laser
- tuning
- quantum well
- wavelength
- tunable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 claims description 98
- 238000001228 spectrum Methods 0.000 claims description 33
- 230000003595 spectral effect Effects 0.000 claims description 32
- 230000005855 radiation Effects 0.000 claims description 28
- 239000000463 material Substances 0.000 claims description 26
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 23
- 230000004044 response Effects 0.000 claims description 23
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 12
- 238000013016 damping Methods 0.000 claims description 10
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 claims description 8
- 230000004888 barrier function Effects 0.000 claims description 2
- 238000003384 imaging method Methods 0.000 description 33
- 230000010287 polarization Effects 0.000 description 27
- 238000005086 pumping Methods 0.000 description 20
- 239000012528 membrane Substances 0.000 description 19
- 239000000758 substrate Substances 0.000 description 19
- 239000004065 semiconductor Substances 0.000 description 18
- 238000012014 optical coherence tomography Methods 0.000 description 16
- 238000000034 method Methods 0.000 description 15
- 238000013461 design Methods 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 13
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 12
- 230000007246 mechanism Effects 0.000 description 12
- 239000002070 nanowire Substances 0.000 description 12
- 238000004611 spectroscopical analysis Methods 0.000 description 12
- 229910052581 Si3N4 Inorganic materials 0.000 description 11
- 238000005259 measurement Methods 0.000 description 11
- 230000003647 oxidation Effects 0.000 description 11
- 238000007254 oxidation reaction Methods 0.000 description 11
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 11
- 235000012431 wafers Nutrition 0.000 description 11
- 230000000694 effects Effects 0.000 description 10
- 238000003199 nucleic acid amplification method Methods 0.000 description 10
- 230000000737 periodic effect Effects 0.000 description 10
- 230000008569 process Effects 0.000 description 10
- 238000002310 reflectometry Methods 0.000 description 10
- 230000003321 amplification Effects 0.000 description 9
- 230000008859 change Effects 0.000 description 9
- 238000001514 detection method Methods 0.000 description 9
- 239000007789 gas Substances 0.000 description 9
- 229910052732 germanium Inorganic materials 0.000 description 9
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 9
- 238000007493 shaping process Methods 0.000 description 9
- 239000000725 suspension Substances 0.000 description 9
- 238000010521 absorption reaction Methods 0.000 description 8
- 239000013078 crystal Substances 0.000 description 8
- 239000000835 fiber Substances 0.000 description 8
- 230000006870 function Effects 0.000 description 8
- 230000003252 repetitive effect Effects 0.000 description 8
- 230000008901 benefit Effects 0.000 description 7
- 230000009286 beneficial effect Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000003068 static effect Effects 0.000 description 5
- 230000001629 suppression Effects 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 229910016909 AlxOy Inorganic materials 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 238000012937 correction Methods 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000006117 anti-reflective coating Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 230000002269 spontaneous effect Effects 0.000 description 3
- 230000001052 transient effect Effects 0.000 description 3
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000004847 absorption spectroscopy Methods 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000010009 beating Methods 0.000 description 2
- 230000008033 biological extinction Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 230000012010 growth Effects 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 210000001525 retina Anatomy 0.000 description 2
- 238000007788 roughening Methods 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- BLIQUJLAJXRXSG-UHFFFAOYSA-N 1-benzyl-3-(trifluoromethyl)pyrrolidin-1-ium-3-carboxylate Chemical compound C1C(C(=O)O)(C(F)(F)F)CCN1CC1=CC=CC=C1 BLIQUJLAJXRXSG-UHFFFAOYSA-N 0.000 description 1
- 0 C*(CC1)CC1[Ru]=C=C Chemical compound C*(CC1)CC1[Ru]=C=C 0.000 description 1
- 229910004573 CdF 2 Inorganic materials 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 229910005542 GaSb Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 235000008694 Humulus lupulus Nutrition 0.000 description 1
- 206010028980 Neoplasm Diseases 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 210000004204 blood vessel Anatomy 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 201000011510 cancer Diseases 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229920005560 fluorosilicone rubber Polymers 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- JVPLOXQKFGYFMN-UHFFFAOYSA-N gold tin Chemical compound [Sn].[Au] JVPLOXQKFGYFMN-UHFFFAOYSA-N 0.000 description 1
- 230000036039 immunity Effects 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000035790 physiological processes and functions Effects 0.000 description 1
- -1 plasma Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000002207 retinal effect Effects 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 229910052950 sphalerite Inorganic materials 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
- 230000001550 time effect Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/068—Stabilisation of laser output parameters
- H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/10007—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating in optical amplifiers
- H01S3/10015—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating in optical amplifiers by monitoring or controlling, e.g. attenuating, the input signal
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/10061—Polarization control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/139—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
- H01S3/1396—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length by using two modes present, e.g. Zeeman splitting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
- H01S5/0071—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for beam steering, e.g. using a mirror outside the cavity to change the beam direction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/041—Optical pumping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/0607—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying physical parameters other than the potential of the electrodes, e.g. by an electric or magnetic field, mechanical deformation, pressure, light, temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1039—Details on the cavity length
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1092—Multi-wavelength lasing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18308—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
- H01S5/18316—Airgap confined
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18355—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a defined polarisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18361—Structure of the reflectors, e.g. hybrid mirrors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18361—Structure of the reflectors, e.g. hybrid mirrors
- H01S5/18363—Structure of the reflectors, e.g. hybrid mirrors comprising air layers
- H01S5/18366—Membrane DBR, i.e. a movable DBR on top of the VCSEL
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34306—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength longer than 1000nm, e.g. InP based 1300 and 1500nm lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34313—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer having only As as V-compound, e.g. AlGaAs, InGaAs
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
- G01N2021/396—Type of laser source
- G01N2021/399—Diode laser
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4795—Scattering, i.e. diffuse reflection spatially resolved investigating of object in scattering medium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2301/00—Functional characteristics
- H01S2301/02—ASE (amplified spontaneous emission), noise; Reduction thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
- H01S5/0078—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for frequency filtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/068—Stabilisation of laser output parameters
- H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
- H01S5/0687—Stabilising the frequency of the laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18308—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement
- H01S5/18311—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL] having a special structure for lateral current or light confinement using selective oxidation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18361—Structure of the reflectors, e.g. hybrid mirrors
- H01S5/18369—Structure of the reflectors, e.g. hybrid mirrors based on dielectric materials
- H01S5/18372—Structure of the reflectors, e.g. hybrid mirrors based on dielectric materials by native oxidation
Description
Claims (15)
- 中心波長を有する放出波長帯にわたって、前記波長帯にわたる出力パワースペクトルと平均放出パワーでチューナブル放射を放出するチューナブルレーザであって、
第1および第2のミラーを含む光共振器と、
前記第1および第2のミラー間に介在し、少なくとも1つの量子井戸を備える量子井戸ゲイン領域と、
同調領域と、
前記同調領域の光路長の調節手段と
を備え、
前記光共振器の自由スペクトル領域(FSR)が前記中心波長の5%を超え、
前記チューナブルレーザが前記波長帯にわたって略単一縦横モードで動作し、
前記光路長の調節手段が約1kHz超の6dB帯域幅の波長同調周波数応答を有し、
前記少なくとも1つの量子井戸のそれぞれが前記光共振器の光定常波パターンのピークとほぼ位置合わせされ、
前記光路長の調節手段は、100〜1000MPaの引張り応力を有し、4〜8つの支持アームを有する中央板を有する、MEMSアクチュエータを含み、
前記光路長の調節手段の周波数応答は,スクイーズ膜ダンピングによって実質的に増加するダンピングを有する,
チューナブルレーザ。 - 前記量子井戸ゲイン領域が圧縮歪み材料の少なくとも1つの量子井戸を備える、
請求項1に記載のチューナブルレーザ。 - 前記少なくとも1つの量子井戸がAlInGaAsから成る、
請求項2に記載のチューナブルレーザ。 - 前記量子井戸ゲイン領域が圧縮歪みAlInGaAsのまさに3つの量子井戸を備える、
請求項1に記載のチューナブルレーザ。 - 前記量子井戸ゲイン領域がGaInNAsの少なくとも1つの量子井戸を備える、
請求項1に記載のチューナブルレーザ。 - 前記チューナブルレーザが光ポンピングされ、前記少なくとも1つの量子井戸のそれぞれが別個の共振器内光定常波ピークに配置される、
請求項1に記載のチューナブルレーザ。 - 前記チューナブルレーザが光ポンピングされ、3つの前記量子井戸すべてが単独の光定常波ピークにほぼ位置合わせされる、
請求項4に記載のチューナブルレーザ。 - 前記チューナブルレーザが140〜170nmの範囲のFSRを有する、
請求項7に記載のチューナブルレーザ。 - 前記量子井戸が2つの量子閉込状態を有する、
請求項7に記載のチューナブルレーザ。 - 前記中心波長の範囲が700〜1100nmである、
請求項1に記載のチューナブルレーザ。 - 前記少なくとも1つの量子井戸が圧縮歪みInGaAsから成る、
請求項10に記載のチューナブルレーザ。 - 前記少なくとも1つの量子井戸が、InGaAs、GaAs、AlGaAs、InGaP、AlInGaAs、およびInGaAsPから成る化合物群から選択される少なくとも1つである、
請求項10に記載のチューナブルレーザ。 - 前記量子井戸ゲイン領域が丁度3つの量子井戸を備える、
請求項11に記載のチューナブルレーザ。 - 前記丁度3つの量子井戸が少なくとも2つの閉込量子状態を備える、
請求項13に記載のチューナブルレーザ。 - 前記InGaAs量子井戸が、引張り歪みGaAsPの少なくとも1つの障壁を有する、
請求項11に記載のチューナブルレーザ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261676712P | 2012-07-27 | 2012-07-27 | |
US61/676,712 | 2012-07-27 | ||
PCT/US2013/052418 WO2014018945A1 (en) | 2012-07-27 | 2013-07-26 | Quantum well tunable short cavity laser |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2015527738A JP2015527738A (ja) | 2015-09-17 |
JP2015527738A5 JP2015527738A5 (ja) | 2016-09-08 |
JP6297557B2 true JP6297557B2 (ja) | 2018-03-20 |
Family
ID=49997881
Family Applications (5)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015524490A Pending JP2015524619A (ja) | 2012-07-27 | 2013-07-26 | 増幅広域チューナブル短共振器レーザ |
JP2015524491A Pending JP2015523736A (ja) | 2012-07-27 | 2013-07-26 | 偏波安定広域チューナブル短共振器レーザ |
JP2015524495A Expired - Fee Related JP6297557B2 (ja) | 2012-07-27 | 2013-07-26 | 量子井戸チューナブル短共振器レーザ |
JP2015524494A Expired - Fee Related JP6328112B2 (ja) | 2012-07-27 | 2013-07-26 | Memsチューナブル短共振器レーザ |
JP2015524493A Expired - Fee Related JP6419696B2 (ja) | 2012-07-27 | 2013-07-26 | チューナブル短共振器レーザ感知器 |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015524490A Pending JP2015524619A (ja) | 2012-07-27 | 2013-07-26 | 増幅広域チューナブル短共振器レーザ |
JP2015524491A Pending JP2015523736A (ja) | 2012-07-27 | 2013-07-26 | 偏波安定広域チューナブル短共振器レーザ |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015524494A Expired - Fee Related JP6328112B2 (ja) | 2012-07-27 | 2013-07-26 | Memsチューナブル短共振器レーザ |
JP2015524493A Expired - Fee Related JP6419696B2 (ja) | 2012-07-27 | 2013-07-26 | チューナブル短共振器レーザ感知器 |
Country Status (6)
Country | Link |
---|---|
US (7) | US9843159B2 (ja) |
EP (5) | EP2878049B8 (ja) |
JP (5) | JP2015524619A (ja) |
CN (7) | CN104685735A (ja) |
CA (5) | CA2880034C (ja) |
WO (5) | WO2014018943A1 (ja) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9391423B2 (en) * | 2008-12-16 | 2016-07-12 | Massachusetts Institute Of Technology | Method and applications of thin-film membrane transfer |
JP2015523578A (ja) * | 2012-07-27 | 2015-08-13 | ソルラブス、インコーポレイテッド | 敏捷な画像化システム |
CN104685735A (zh) | 2012-07-27 | 2015-06-03 | 统雷有限公司 | 量子阱可调谐短腔激光器 |
US9696132B2 (en) | 2013-03-15 | 2017-07-04 | Praevium Research, Inc. | Tunable laser array system |
EP3069420B1 (en) * | 2013-11-13 | 2017-10-04 | Danmarks Tekniske Universitet | Method for generating a compressed optical pulse |
EP2947729A1 (en) * | 2014-05-21 | 2015-11-25 | Universite De Montpellier | Vertical external cavity surface emitting laser devices allowing high coherence, high power and large tunability |
FR3022684B1 (fr) * | 2014-06-23 | 2017-10-27 | Commissariat Energie Atomique | Dispositif a membrane a germanium sous contrainte |
US9312662B1 (en) * | 2014-09-30 | 2016-04-12 | Lumentum Operations Llc | Tunable laser source |
JP6685701B2 (ja) * | 2014-12-26 | 2020-04-22 | キヤノン株式会社 | 面発光レーザ、情報取得装置、撮像装置、レーザアレイ及び面発光レーザの製造方法 |
EP4035586A1 (en) | 2015-04-16 | 2022-08-03 | Gentuity LLC | Micro-optic probes for neurology |
JP6576092B2 (ja) | 2015-04-30 | 2019-09-18 | キヤノン株式会社 | 面発光レーザ、情報取得装置及び撮像装置 |
DE102015108876B3 (de) * | 2015-06-04 | 2016-03-03 | Otto-Von-Guericke-Universität Magdeburg, Ttz Patentwesen | Lichtemittierendes Gruppe-III-Nitrid basiertes Bauelement |
JP6981967B2 (ja) | 2015-08-31 | 2021-12-17 | ジェンテュイティ・リミテッド・ライアビリティ・カンパニーGentuity, LLC | 撮像プローブおよびデリバリデバイスを含む撮像システム |
JP6824605B2 (ja) * | 2015-11-12 | 2021-02-03 | キヤノン株式会社 | 増幅素子、光源装置及び撮像装置 |
JP6679340B2 (ja) * | 2016-02-22 | 2020-04-15 | キヤノン株式会社 | 光干渉断層計 |
CN109937359A (zh) * | 2016-09-15 | 2019-06-25 | 前视红外系统股份公司 | 场景上的气体的检测 |
RU2704214C1 (ru) * | 2016-12-13 | 2019-10-24 | Федеральное государственное бюджетное учреждение науки Физико-технический институт им. А.Ф. Иоффе Российской академии наук | Вертикально-излучающий лазер с внутрирезонаторными контактами и диэлектрическим зеркалом |
GB201701829D0 (en) * | 2017-02-03 | 2017-03-22 | Norwegian Univ Of Science And Tech (Ntnu) | Device |
US10641733B2 (en) * | 2017-03-20 | 2020-05-05 | National Technology & Engineering Solutions Of Sandia, Llc | Active mechanical-environmental-thermal MEMS device for nanoscale characterization |
US9985414B1 (en) | 2017-06-16 | 2018-05-29 | Banner Engineering Corp. | Open-loop laser power-regulation |
EP3890128A1 (en) * | 2017-06-28 | 2021-10-06 | Sony Group Corporation | Light emitting element and manufacturing method |
US10714893B2 (en) | 2017-07-17 | 2020-07-14 | Thorlabs, Inc. | Mid-infrared vertical cavity laser |
EP3444634B1 (en) | 2017-08-17 | 2024-05-01 | ams AG | Semiconductor device and method for time-of-flight measurements |
JP7160935B2 (ja) | 2017-11-28 | 2022-10-25 | ジェンテュイティ・リミテッド・ライアビリティ・カンパニー | 撮像システム |
US11703450B2 (en) * | 2017-12-25 | 2023-07-18 | Nec Corporation | Optical beam controller and optical interference tomographic imaging device using same |
DE102018109542B4 (de) | 2018-04-20 | 2022-08-04 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Licht emittierendes bauelement und verfahren zur herstellung eines licht emittierenden bauelements |
EP3791451A1 (en) | 2018-05-11 | 2021-03-17 | Excelitas Technologies Corp. | Tunable vcsel polarization control through dissimilar die bonding |
US10951007B2 (en) | 2018-05-11 | 2021-03-16 | Excelitas Technologies Corp. | Optically pumped tunable VCSEL employing geometric isolation |
WO2020076787A2 (en) * | 2018-10-08 | 2020-04-16 | Thorlabs, Inc. | Electrically pumped vertical cavity laser |
JP7190865B2 (ja) * | 2018-10-18 | 2022-12-16 | スタンレー電気株式会社 | 垂直共振器型発光素子 |
CN109638644A (zh) * | 2019-01-25 | 2019-04-16 | 清华-伯克利深圳学院筹备办公室 | 一种扫频光源及其制作方法 |
KR20200095395A (ko) | 2019-01-31 | 2020-08-10 | 삼성전자주식회사 | 유기금속 화합물 및 이를 포함한 유기 발광 소자 |
EP3689888B1 (en) * | 2019-01-31 | 2021-09-22 | Samsung Electronics Co., Ltd. | Organometallic compound and organic light-emitting device including the same |
WO2020227632A1 (en) * | 2019-05-08 | 2020-11-12 | Michigan Aerospace Corporation | Tunable optical resonator for lidar applications |
FR3095893A1 (fr) * | 2019-05-09 | 2020-11-13 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | dispositif optoélectronique comportant une portion centrale contrainte en tension suivant un premier axe et polarisee électriquement suivant un deuxième axe |
CN110165550A (zh) * | 2019-05-31 | 2019-08-23 | 度亘激光技术(苏州)有限公司 | 一种分布布拉格反射镜的制备方法及垂直腔面发射激光器 |
CN110793941A (zh) * | 2019-10-10 | 2020-02-14 | 成都贝瑞光电科技股份有限公司 | 一种智能分辨激光光学层析成像方法的系统 |
CN111146688A (zh) * | 2019-12-24 | 2020-05-12 | 江西德瑞光电技术有限责任公司 | 一种电泵浦垂直外腔面发射激光器芯片及其制备方法 |
US20230163570A1 (en) | 2020-05-29 | 2023-05-25 | Soh Okumura | Optical device |
US11609116B2 (en) | 2020-08-27 | 2023-03-21 | Banner Engineering Corp | Open-loop photodiode gain regulation |
CN114499673A (zh) * | 2020-11-12 | 2022-05-13 | 莫列斯有限公司 | 光放大器模块及其增益控制方法 |
CN112903613B (zh) * | 2021-02-24 | 2022-11-08 | 南昌大学 | 一种基于Labview的瞬态吸收光谱控制系统设计方法 |
WO2023158635A1 (en) * | 2022-02-16 | 2023-08-24 | Vijaysekhar Jayaraman | Widely tunable frequency doubled light source |
WO2024044567A2 (en) * | 2022-08-22 | 2024-02-29 | The Regents Of The University Of California | Iii-nitride-based vertical cavity surface emitting laser (vcsel) with a dielectric p-side lens and an activated tunnel junction |
Family Cites Families (86)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01170084A (ja) | 1987-12-25 | 1989-07-05 | Nippon Telegr & Teleph Corp <Ntt> | 集積型光アンプ素子 |
US5331658A (en) | 1992-08-26 | 1994-07-19 | Motorola, Inc. | Vertical cavity surface emitting laser and sensor |
DE4314486C2 (de) | 1993-05-03 | 1998-08-27 | Heidenhain Gmbh Dr Johannes | Absolutinterferometrisches Meßverfahren sowie dafür geeignete Laserinterferometeranordnung |
US5805626A (en) * | 1995-09-20 | 1998-09-08 | Mitsubishi Materials Corporation | Single-crystal lithium tetraborate and method making the same, optical converting method and converter device using the single-crystal lithium tetraborate, and optical apparatus using the optical converter device |
JP2904101B2 (ja) | 1996-03-15 | 1999-06-14 | 日本電気株式会社 | 雑音除去機能付き光増幅装置 |
JP3570094B2 (ja) | 1996-07-10 | 2004-09-29 | 富士通株式会社 | 面発光半導体レーザ及びその製造方法及び波長可変方法 |
JP3765030B2 (ja) | 1997-07-02 | 2006-04-12 | 日本光電工業株式会社 | ガスセンサ用パッケージ |
WO1999012235A1 (en) * | 1997-09-05 | 1999-03-11 | Micron Optics, Inc. | Tunable fiber fabry-perot surface-emitting lasers |
JP2002500446A (ja) * | 1997-12-29 | 2002-01-08 | コアテック・インコーポレーテッド | マイクロエレクトロメカニカル的に同調可能な共焦型の垂直キャビティ表面放出レーザ及びファブリー・ペローフィルタ |
US5991326A (en) | 1998-04-14 | 1999-11-23 | Bandwidth9, Inc. | Lattice-relaxed verticle optical cavities |
US6154471A (en) | 1999-02-22 | 2000-11-28 | Lucent Technologies Inc. | Magnetically tunable and latchable broad-range semiconductor laser |
CA2329810A1 (en) * | 1999-02-26 | 2000-09-08 | The Furukawa Electric Co., Ltd. | Semiconductor light-emitting device |
WO2000075989A1 (en) | 1999-06-03 | 2000-12-14 | Koninklijke Philips Electronics N.V. | Semiconductor device comprising a high-voltage circuit element |
US6181717B1 (en) | 1999-06-04 | 2001-01-30 | Bandwidth 9 | Tunable semiconductor laser system |
US20020048301A1 (en) | 1999-07-30 | 2002-04-25 | Peidong Wang | Single mode operation of microelectromechanically tunable, half-symmetric, vertical cavity surface emitting lasers |
CA2386150A1 (en) * | 1999-08-23 | 2001-03-22 | Coretek, Inc. | Wavelength reference device |
US6735234B1 (en) * | 2000-02-11 | 2004-05-11 | Giga Tera Ag | Passively mode-locked optically pumped semiconductor external-cavity surface-emitting laser |
US6373632B1 (en) | 2000-03-03 | 2002-04-16 | Axsun Technologies, Inc. | Tunable Fabry-Perot filter |
US6744805B2 (en) * | 2000-04-05 | 2004-06-01 | Nortel Networks Limited | Single mode operation of microelectromechanically tunable, half-symmetric, vertical cavity surface emitting lasers |
CA2414951C (en) | 2000-07-10 | 2010-09-21 | Mpb Technologies Inc. | Cascaded pumping system and method for producing distributed raman amplification in optical fiber telecommunication systems |
GB2369929A (en) | 2000-12-08 | 2002-06-12 | Univ Southampton | Semiconductor laser device |
JP2002204026A (ja) | 2000-12-28 | 2002-07-19 | Daido Steel Co Ltd | 面発光デバイス |
EP1348266B1 (en) | 2001-01-05 | 2008-03-05 | Fujitsu Limited | Control scheme for long wavelength channels in wideband wdm optical fiber transmission system |
EP1225669B1 (en) * | 2001-01-17 | 2004-07-28 | Avalon Photonics Ltd. | A polarization-stable vertical cavity surface emitting laser device and a method of stabilizing the polarization of such a laser device |
US6782021B2 (en) * | 2001-03-02 | 2004-08-24 | Xiaodong Huang | Quantum dot vertical cavity surface emitting laser |
DE10112038B4 (de) * | 2001-03-14 | 2008-06-12 | Testo Gmbh & Co Kg | Verfahren zur asynchronen,platzsparenden Datenerfassung innerhalb einer kontinuierlichen Messwertspeicherung |
EP1368623A1 (en) * | 2001-03-15 | 2003-12-10 | Ecole Polytechnique Federale De Lausanne | A micro-electromechanically tunable vertical cavity photonic device and a method of fabrication thereof |
US6542531B2 (en) * | 2001-03-15 | 2003-04-01 | Ecole Polytechnique Federale De Lausanne | Vertical cavity surface emitting laser and a method of fabrication thereof |
FR2825524B1 (fr) * | 2001-06-05 | 2007-01-26 | Get Enst Bretagne | Laser amplificateur a cavite verticale |
US6901088B2 (en) * | 2001-07-06 | 2005-05-31 | Intel Corporation | External cavity laser apparatus with orthogonal tuning of laser wavelength and cavity optical pathlength |
US7010012B2 (en) * | 2001-07-26 | 2006-03-07 | Applied Optoelectronics, Inc. | Method and apparatus for reducing specular reflections in semiconductor lasers |
JP4846136B2 (ja) | 2001-08-01 | 2011-12-28 | 株式会社フジクラ | 広帯域複合光増幅器 |
US7061622B2 (en) * | 2001-08-03 | 2006-06-13 | Case Western Reserve University | Aspects of basic OCT engine technologies for high speed optical coherence tomography and light source and other improvements in optical coherence tomography |
US6549687B1 (en) | 2001-10-26 | 2003-04-15 | Lake Shore Cryotronics, Inc. | System and method for measuring physical, chemical and biological stimuli using vertical cavity surface emitting lasers with integrated tuner |
US6768577B2 (en) | 2002-03-15 | 2004-07-27 | Fitel Usa Corp. | Tunable multimode laser diode module, tunable multimode wavelength division multiplex raman pump, and amplifier, and a system, method, and computer program product for controlling tunable multimode laser diodes, raman pumps, and raman amplifiers |
US6813297B2 (en) * | 2002-07-16 | 2004-11-02 | Agilent Technologies, Inc. | Material systems for long wavelength lasers grown on GaSb or InAs substrates |
US7013064B2 (en) * | 2002-10-09 | 2006-03-14 | Nanoopto Corporation | Freespace tunable optoelectronic device and method |
US6970488B2 (en) * | 2002-10-16 | 2005-11-29 | Eastman Kodak Company | Tunable organic VCSEL system |
JP2004212638A (ja) * | 2002-12-27 | 2004-07-29 | Fuji Photo Film Co Ltd | 光変調素子及び平面表示素子 |
US7082147B2 (en) * | 2003-03-24 | 2006-07-25 | Eastman Kodak Company | Organic fiber laser system and method |
ES2310744T3 (es) * | 2003-06-06 | 2009-01-16 | The General Hospital Corporation | Fuente de luz sintonizable en longitudes de onda. |
JP2005039102A (ja) * | 2003-07-17 | 2005-02-10 | Yokogawa Electric Corp | 面発光レーザ |
KR100539928B1 (ko) | 2003-08-29 | 2005-12-28 | 삼성전자주식회사 | 다파장 광원 및 그를 이용한 파장 분할 다중 시스템 |
CN2687909Y (zh) * | 2003-09-03 | 2005-03-23 | 福州晶阵半导体有限公司 | 短腔固体激光器 |
EP2293031B8 (en) * | 2003-10-27 | 2024-03-20 | The General Hospital Corporation | Method and apparatus for performing optical imaging using frequency-domain interferometry |
CN2738507Y (zh) * | 2004-01-05 | 2005-11-02 | 美国通用微机电系统公司 | 微电容式麦克风系统 |
WO2005089098A2 (en) | 2004-01-14 | 2005-09-29 | The Regents Of The University Of California | Ultra broadband mirror using subwavelength grating |
JP2005222968A (ja) | 2004-02-03 | 2005-08-18 | Yokogawa Electric Corp | 面発光レーザ、この面発光レーザを用いた波長可変面発光レーザ装置および面発光レーザの発振波長制御方法 |
JP4599865B2 (ja) * | 2004-03-26 | 2010-12-15 | 住友電気工業株式会社 | 面発光半導体レーザ素子 |
US7483466B2 (en) | 2005-04-28 | 2009-01-27 | Canon Kabushiki Kaisha | Vertical cavity surface emitting laser device |
US7457033B2 (en) | 2005-05-27 | 2008-11-25 | The Regents Of The University Of California | MEMS tunable vertical-cavity semiconductor optical amplifier |
US7391520B2 (en) * | 2005-07-01 | 2008-06-24 | Carl Zeiss Meditec, Inc. | Fourier domain optical coherence tomography employing a swept multi-wavelength laser and a multi-channel receiver |
US7352788B2 (en) * | 2005-08-15 | 2008-04-01 | Avago Technologies Ecbu Ip (Singapore) Pte, Ltd. | Nitride semiconductor vertical cavity surface emitting laser |
US7733923B2 (en) * | 2005-12-08 | 2010-06-08 | Alcatel-Lucent Usa Inc. | Wide-bandwidth mode-locked laser |
WO2007081688A2 (en) | 2006-01-04 | 2007-07-19 | Li Fan | Tunable laser device |
US7468997B2 (en) * | 2006-01-20 | 2008-12-23 | Praevium Research, Inc. | System for swept source optical coherence tomography |
JP4898263B2 (ja) * | 2006-04-07 | 2012-03-14 | サンテック株式会社 | 光干渉断層画像表示システム |
US7701588B2 (en) * | 2006-04-11 | 2010-04-20 | Santec Corporation | Swept source type optical coherent tomography system |
WO2007140423A2 (en) * | 2006-05-30 | 2007-12-06 | Weatherford/Lamb, Inc. | Wavelength sweep control |
US7671997B2 (en) | 2006-10-31 | 2010-03-02 | Vijaysekhar Jayaraman | High power broadband superluminescent diode |
KR20080048318A (ko) * | 2006-11-28 | 2008-06-02 | 삼성전자주식회사 | 산란부를 구비하는 반도체 레이저 소자 및 그 제조방법 |
JP5176535B2 (ja) * | 2007-02-02 | 2013-04-03 | 富士電機株式会社 | レーザ式ガス分析計 |
JP4992503B2 (ja) | 2007-03-27 | 2012-08-08 | ソニー株式会社 | 面発光型半導体レーザおよびその製造方法 |
US8212235B2 (en) | 2007-04-25 | 2012-07-03 | Hewlett-Packard Development Company, L.P. | Nanowire-based opto-electronic device |
US7543511B2 (en) | 2007-07-27 | 2009-06-09 | Align Technology Inc. | Concurrently measuring a force exerted upon each of a plurality of teeth |
CN100479280C (zh) * | 2007-09-28 | 2009-04-15 | 北京工业大学 | 悬臂梁式波长可调谐垂直腔面发射激光器结构及制备方法 |
US8309929B2 (en) * | 2008-03-18 | 2012-11-13 | Lawrence Livermore National Security, Llc. | Tunable photonic cavities for in-situ spectroscopic trace gas detection |
US8259303B2 (en) * | 2008-05-15 | 2012-09-04 | Axsun Technologies, Inc. | OCT combining probes and integrated systems |
US8564783B2 (en) | 2008-05-15 | 2013-10-22 | Axsun Technologies, Inc. | Optical coherence tomography laser with integrated clock |
CN101299510A (zh) * | 2008-06-20 | 2008-11-05 | 福州高意通讯有限公司 | 一种半导体泵浦短腔高功率激光器 |
DE102008030818B4 (de) | 2008-06-30 | 2022-03-03 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Oberflächenemittierender Halbleiterlaser mit mehreren aktiven Zonen |
JP5001239B2 (ja) | 2008-08-19 | 2012-08-15 | 日本電信電話株式会社 | 半導体波長可変レーザ |
JP5833806B2 (ja) | 2008-09-19 | 2015-12-16 | ギガフォトン株式会社 | 極端紫外光源装置、極端紫外光源装置用レーザ光源装置及び極端紫外光源装置用レーザ光源の調整方法 |
KR101752011B1 (ko) | 2008-11-07 | 2017-06-28 | 카벤디시 키네틱스, 인크. | 더 큰 mems 디바이스를 대체하기 위해 복수의 더 작은 mems 디바이스를 이용하는 방법 |
WO2010056920A1 (en) | 2008-11-12 | 2010-05-20 | Cornell University | Giant-chirp oscillator for use in fiber pulse amplification system |
KR20100072612A (ko) | 2008-12-22 | 2010-07-01 | 한국전자통신연구원 | 측정 시작 시점 결정 장치가 구비된 측정 장치 |
CN101826696A (zh) * | 2009-03-02 | 2010-09-08 | 北京大学 | 一种高能量低重复频率的光纤激光器 |
US8964801B2 (en) | 2009-06-11 | 2015-02-24 | Esi-Pyrophotonics Lasers, Inc. | Method and system for stable and tunable high power pulsed laser system |
US8593725B2 (en) | 2009-08-04 | 2013-11-26 | Jds Uniphase Corporation | Pulsed optical source |
EP2309241B1 (en) * | 2009-10-07 | 2016-11-30 | ams international AG | MEMS pressure sensor |
JP2011151293A (ja) * | 2010-01-25 | 2011-08-04 | Fuji Xerox Co Ltd | 面発光型半導体レーザ、面発光型半導体レーザ装置、光伝送装置および情報処理装置 |
EP2529454A1 (en) * | 2010-01-29 | 2012-12-05 | Hewlett Packard Development Company, L.P. | Multimode vertical-cavity surface-emitting laser arrays |
DE102010042469A1 (de) | 2010-02-11 | 2011-08-11 | Electronics And Telecommunications Research Institute | Terahertzwellen-Vorrichtung |
US8848752B2 (en) * | 2011-01-18 | 2014-09-30 | Phase Sensitive Innovations, Inc. | High spectral-purity carrier wave generation by nonlinear optical mixing |
EP2686924A4 (en) * | 2011-03-17 | 2015-04-01 | Finisar Corp | LOW INDIUM HIGH ALUMINUM QUENTIC WELL LASERS WITH BARRIER LAYERS HAVING A HIGH ALUMINUM CONTENT AND LOW INDIUM WITH REDUCED TRAPS |
CN104685735A (zh) * | 2012-07-27 | 2015-06-03 | 统雷有限公司 | 量子阱可调谐短腔激光器 |
-
2013
- 2013-07-26 CN CN201380039767.9A patent/CN104685735A/zh active Pending
- 2013-07-26 CN CN202010730216.9A patent/CN111952832A/zh active Pending
- 2013-07-26 EP EP13823861.3A patent/EP2878049B8/en active Active
- 2013-07-26 JP JP2015524490A patent/JP2015524619A/ja active Pending
- 2013-07-26 CA CA2880034A patent/CA2880034C/en active Active
- 2013-07-26 EP EP13822317.7A patent/EP2878046B1/en active Active
- 2013-07-26 CA CA2879528A patent/CA2879528C/en active Active
- 2013-07-26 EP EP13822215.3A patent/EP2878045B1/en active Active
- 2013-07-26 JP JP2015524491A patent/JP2015523736A/ja active Pending
- 2013-07-26 CA CA2879749A patent/CA2879749C/en active Active
- 2013-07-26 CA CA2879762A patent/CA2879762C/en active Active
- 2013-07-26 WO PCT/US2013/052416 patent/WO2014018943A1/en active Application Filing
- 2013-07-26 EP EP13823016.4A patent/EP2878047B1/en active Active
- 2013-07-26 WO PCT/US2013/052412 patent/WO2014018940A1/en active Application Filing
- 2013-07-26 WO PCT/US2013/052418 patent/WO2014018945A1/en active Application Filing
- 2013-07-26 CN CN201380039785.7A patent/CN104521078B/zh active Active
- 2013-07-26 CN CN202010018852.9A patent/CN111211487A/zh active Pending
- 2013-07-26 CA CA2878975A patent/CA2878975C/en active Active
- 2013-07-26 WO PCT/US2013/052415 patent/WO2014018942A1/en active Application Filing
- 2013-07-26 JP JP2015524495A patent/JP6297557B2/ja not_active Expired - Fee Related
- 2013-07-26 US US13/952,554 patent/US9843159B2/en active Active
- 2013-07-26 CN CN201380045781.XA patent/CN104718673B/zh active Active
- 2013-07-26 EP EP13823419.0A patent/EP2878048B1/en active Active
- 2013-07-26 JP JP2015524494A patent/JP6328112B2/ja not_active Expired - Fee Related
- 2013-07-26 JP JP2015524493A patent/JP6419696B2/ja not_active Expired - Fee Related
- 2013-07-26 WO PCT/US2013/052411 patent/WO2014018939A2/en active Application Filing
- 2013-07-26 CN CN201380040021.XA patent/CN104604051A/zh active Pending
- 2013-07-26 CN CN201380046414.1A patent/CN104685736B/zh active Active
-
2015
- 2015-10-08 US US14/878,625 patent/US9413133B2/en active Active
- 2015-10-08 US US14/878,640 patent/US9391422B2/en active Active
- 2015-10-08 US US14/878,678 patent/US9397468B2/en active Active
-
2017
- 2017-05-19 US US15/600,074 patent/US9997891B2/en active Active
-
2018
- 2018-04-30 US US15/967,019 patent/US10615571B2/en active Active
-
2020
- 2020-03-30 US US16/834,889 patent/US11183812B2/en active Active
Also Published As
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6297557B2 (ja) | 量子井戸チューナブル短共振器レーザ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160720 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20160720 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20170608 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170627 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170921 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20180206 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20180221 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6297557 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |