JP6286268B2 - エネルギー選択的検出器系を有する走査型粒子顕微鏡 - Google Patents

エネルギー選択的検出器系を有する走査型粒子顕微鏡 Download PDF

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JP6286268B2
JP6286268B2 JP2014083065A JP2014083065A JP6286268B2 JP 6286268 B2 JP6286268 B2 JP 6286268B2 JP 2014083065 A JP2014083065 A JP 2014083065A JP 2014083065 A JP2014083065 A JP 2014083065A JP 6286268 B2 JP6286268 B2 JP 6286268B2
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field
particle
particles
particle beam
grid electrode
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Japanese (ja)
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JP2014209482A (ja
JP2014209482A5 (enExample
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シューベルト シュテファン
シューベルト シュテファン
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Carl Zeiss Microscopy GmbH
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Carl Zeiss Microscopy GmbH
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24485—Energy spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24578—Spatial variables, e.g. position, distance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24585—Other variables, e.g. energy, mass, velocity, time, temperature

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2014083065A 2013-04-15 2014-04-14 エネルギー選択的検出器系を有する走査型粒子顕微鏡 Active JP6286268B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013006535.6 2013-04-15
DE102013006535.6A DE102013006535B4 (de) 2013-04-15 2013-04-15 Raster-Partikelstrahlmikroskop mit energiefilterndem Detektorsystem

Publications (3)

Publication Number Publication Date
JP2014209482A JP2014209482A (ja) 2014-11-06
JP2014209482A5 JP2014209482A5 (enExample) 2017-06-15
JP6286268B2 true JP6286268B2 (ja) 2018-02-28

Family

ID=50896418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014083065A Active JP6286268B2 (ja) 2013-04-15 2014-04-14 エネルギー選択的検出器系を有する走査型粒子顕微鏡

Country Status (5)

Country Link
US (1) US9653255B2 (enExample)
JP (1) JP6286268B2 (enExample)
CZ (1) CZ309577B6 (enExample)
DE (1) DE102013006535B4 (enExample)
NL (1) NL2012618B1 (enExample)

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US20190385810A1 (en) * 2017-02-22 2019-12-19 Hitachi High-Technologies Corporation Charged Particle Beam Device
DE112017008344B4 (de) 2017-03-24 2024-05-29 Hitachi High-Tech Corporation Ladungsteilchenstrahl-vorrichtung
WO2018173242A1 (ja) 2017-03-24 2018-09-27 株式会社 日立ハイテクノロジーズ 荷電粒子線装置
DE112018007343B4 (de) 2018-04-26 2023-11-23 Hitachi High-Tech Corporation Mit einem strahl geladener teilchen arbeitende vorrichtung
US20200373115A1 (en) * 2019-05-23 2020-11-26 Fei Company Multi-beam scanning electron microscope
JP7294981B2 (ja) * 2019-10-18 2023-06-20 株式会社荏原製作所 電子線装置及び電極
JP7250661B2 (ja) 2019-10-31 2023-04-03 株式会社日立ハイテク 荷電粒子線装置
CN110927194B (zh) * 2019-12-11 2020-08-18 中国科学院地质与地球物理研究所 确定泥页岩有机孔含量和孔径分布的方法
US11508591B2 (en) * 2021-02-08 2022-11-22 Kla Corporation High resolution electron beam apparatus with dual-aperture schemes

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JP4302316B2 (ja) * 1998-03-09 2009-07-22 株式会社日立製作所 走査形電子顕微鏡
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Also Published As

Publication number Publication date
US20140306110A1 (en) 2014-10-16
CZ2014256A3 (cs) 2014-11-19
DE102013006535B4 (de) 2025-11-06
JP2014209482A (ja) 2014-11-06
NL2012618A (en) 2014-10-16
CZ309577B6 (cs) 2023-04-26
DE102013006535A1 (de) 2014-10-30
NL2012618B1 (en) 2016-05-09
US9653255B2 (en) 2017-05-16

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