NL2012618B1 - Scanning Particle Microscope having an Energy Selective Detector System. - Google Patents

Scanning Particle Microscope having an Energy Selective Detector System. Download PDF

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Publication number
NL2012618B1
NL2012618B1 NL2012618A NL2012618A NL2012618B1 NL 2012618 B1 NL2012618 B1 NL 2012618B1 NL 2012618 A NL2012618 A NL 2012618A NL 2012618 A NL2012618 A NL 2012618A NL 2012618 B1 NL2012618 B1 NL 2012618B1
Authority
NL
Netherlands
Prior art keywords
field
particle
emitted particles
particle optical
emitted
Prior art date
Application number
NL2012618A
Other languages
English (en)
Dutch (nl)
Other versions
NL2012618A (en
Inventor
Schubert Stefan
Original Assignee
Zeiss Carl Microscopy Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Carl Microscopy Gmbh filed Critical Zeiss Carl Microscopy Gmbh
Publication of NL2012618A publication Critical patent/NL2012618A/en
Application granted granted Critical
Publication of NL2012618B1 publication Critical patent/NL2012618B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24485—Energy spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24578—Spatial variables, e.g. position, distance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24585—Other variables, e.g. energy, mass, velocity, time, temperature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
NL2012618A 2013-04-15 2014-04-14 Scanning Particle Microscope having an Energy Selective Detector System. NL2012618B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013006535 2013-04-15
DE102013006535.6A DE102013006535B4 (de) 2013-04-15 2013-04-15 Raster-Partikelstrahlmikroskop mit energiefilterndem Detektorsystem

Publications (2)

Publication Number Publication Date
NL2012618A NL2012618A (en) 2014-10-16
NL2012618B1 true NL2012618B1 (en) 2016-05-09

Family

ID=50896418

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2012618A NL2012618B1 (en) 2013-04-15 2014-04-14 Scanning Particle Microscope having an Energy Selective Detector System.

Country Status (5)

Country Link
US (1) US9653255B2 (enExample)
JP (1) JP6286268B2 (enExample)
CZ (1) CZ309577B6 (enExample)
DE (1) DE102013006535B4 (enExample)
NL (1) NL2012618B1 (enExample)

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DE102015210893B4 (de) 2015-06-15 2019-05-09 Carl Zeiss Microscopy Gmbh Analyseeinrichtung zur Analyse der Energie geladener Teilchen und Teilchenstrahlgerät mit einer Analyseeinrichtung
US20190385810A1 (en) * 2017-02-22 2019-12-19 Hitachi High-Technologies Corporation Charged Particle Beam Device
DE112017008344B4 (de) 2017-03-24 2024-05-29 Hitachi High-Tech Corporation Ladungsteilchenstrahl-vorrichtung
WO2018173242A1 (ja) 2017-03-24 2018-09-27 株式会社 日立ハイテクノロジーズ 荷電粒子線装置
DE112018007343B4 (de) 2018-04-26 2023-11-23 Hitachi High-Tech Corporation Mit einem strahl geladener teilchen arbeitende vorrichtung
US20200373115A1 (en) * 2019-05-23 2020-11-26 Fei Company Multi-beam scanning electron microscope
JP7294981B2 (ja) * 2019-10-18 2023-06-20 株式会社荏原製作所 電子線装置及び電極
JP7250661B2 (ja) 2019-10-31 2023-04-03 株式会社日立ハイテク 荷電粒子線装置
CN110927194B (zh) * 2019-12-11 2020-08-18 中国科学院地质与地球物理研究所 确定泥页岩有机孔含量和孔径分布的方法
US11508591B2 (en) * 2021-02-08 2022-11-22 Kla Corporation High resolution electron beam apparatus with dual-aperture schemes

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Also Published As

Publication number Publication date
JP6286268B2 (ja) 2018-02-28
US20140306110A1 (en) 2014-10-16
CZ2014256A3 (cs) 2014-11-19
DE102013006535B4 (de) 2025-11-06
JP2014209482A (ja) 2014-11-06
NL2012618A (en) 2014-10-16
CZ309577B6 (cs) 2023-04-26
DE102013006535A1 (de) 2014-10-30
US9653255B2 (en) 2017-05-16

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Effective date: 20220501