JP6280487B2 - 基板処理方法及び基板処理装置 - Google Patents
基板処理方法及び基板処理装置 Download PDFInfo
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- 238000012545 processing Methods 0.000 title claims description 313
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- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 3
- 230000036961 partial effect Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910001928 zirconium oxide Inorganic materials 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- GEIAQOFPUVMAGM-UHFFFAOYSA-N Oxozirconium Chemical compound [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- SEQDDYPDSLOBDC-UHFFFAOYSA-N Temazepam Chemical compound N=1C(O)C(=O)N(C)C2=CC=C(Cl)C=C2C=1C1=CC=CC=C1 SEQDDYPDSLOBDC-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
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- 229910001873 dinitrogen Inorganic materials 0.000 description 1
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- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
- C23C16/45548—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction
- C23C16/45551—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction for relative movement of the substrate and the gas injectors or half-reaction reactor compartments
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02172—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides
- H01L21/02175—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal
- H01L21/02189—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal the material containing zirconium, e.g. ZrO2
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
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- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
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Description
前記基板が載置された前記回転テーブルを回転させる工程と、
前記回転テーブル上に配置された前記複数の基板の間の領域に向けて前記流体を供給するタイミングに合わせて、前記回転テーブル上への前記流体の供給流量が変動する動作を行う工程と、を有する。
該処理室内に設けられた回転テーブルと、
該回転テーブルの上面に、周方向に沿って所定間隔離間して設けられた複数の基板載置領域と、
前記回転テーブルの上面上の所定領域に向けて流体を供給可能な流体供給手段と、
該流体供給手段が、前記複数の基板載置領域の間の領域に向けて前記流体を供給可能なタイミングに合わせて、該流体供給手段に前記流体の供給流量を変動させる動作を行わせる制御手段と、を有する。
図2乃至図6を用いて、本発明の第1の実施形態に係る基板処理装置について説明する。ここで、基板処理装置は、本発明の第1の実施形態では、所謂回転テーブル式(後述)の基板処理装置であって、流体を所定の供給領域に向けて供給することによって、複数の基板の表面を処理する装置のことを意味する。
図11は、本発明の第2の実施形態に係る基板処理装置の一例を示した全体構成図である。第2の実施形態に係る基板処理装置は、基板位置検出装置170を備えている点と、処理室1の天板11に孔6及び窓110が形成されている点で、第1の実施形態に係る基板処理装置と異なっている。基板位置検出装置170は、ウエハWの位置を検出するための装置である。基板位置検出装置170は、カメラ140と、筐体150と、処理部160とを有する。
2 回転テーブル
24 凹部(基板載置領域)
34、35、36 配管
31、32 処理ガスノズル
41、42 分離ガスノズル
100 制御部
103 時間計測部
140 カメラ
170 基板位置検出装置
P1、P2 処理領域
W ウエハ
Claims (17)
- 処理室内に設けられた回転テーブル上に周方向に沿って所定間隔離間して複数の基板を配置し、該回転テーブルを回転させながら前記回転テーブル上の所定領域に向けて流体を供給することにより前記基板の処理を行う基板処理方法であって、
前記基板が載置された前記回転テーブルを回転させる工程と、
前記回転テーブル上に配置された前記複数の基板の間の領域に向けて前記流体を供給するタイミングに合わせて、前記回転テーブル上への前記流体の供給流量が変動する動作を行う工程と、を有する基板処理方法。 - 前記流体の供給流量が変動する動作は、前記流体の供給を開始する動作及び/又は前記流体の供給を停止する動作を含む請求項1に記載の基板処理方法。
- 前記流体の供給流量が変動する動作は、前記流体を供給中に、前記供給流量を変更する動作を含む請求項1又は2に記載の基板処理方法。
- 前記流体は、ガスである請求項1乃至3のいずれか一項に記載の基板処理方法。
- 前記流体の供給流量が変動する動作を行うタイミングは、前記回転テーブルの回転開始タイミング、回転速度及び経過時間に基づいて定められる請求項4に記載の基板処理方法。
- 前記流体の供給流量が変動する動作を行うタイミングは、前記回転テーブルの回転中の位置をモニタリングすることにより定められる請求項4に記載の基板処理方法。
- 前記流体の供給は、前記回転テーブルの半径方向に延在して設けられ、該半径方向に沿って前記回転テーブルに対向して配列された複数の吐出孔を有するノズルを介して行われる請求項4乃至6のいずれか一項に記載の基板処理方法。
- 前記処理室内には、前記回転テーブルの前記周方向に沿って離間して設けられた複数の処理ガス供給領域が設けられ、該複数の処理ガス供給領域の各々において、前記回転テーブル上に配置された前記複数の基板の間の領域に向けて前記流体を供給するタイミングに合わせて、前記回転テーブル上への前記流体の供給流量が変動する動作を行う工程が行われる請求項4乃至7のいずれか一項に記載の基板処理方法。
- 前記複数の処理ガス供給領域の間には、パージガスを供給して前記複数の処理ガス供給領域を分離する分離領域が設けられ、前記回転テーブルの回転により前記複数の処理ガス領域を通過した前記基板上で複数の処理ガスを反応させ、反応生成物の分子層を堆積させる請求項8に記載の基板処理方法。
- 処理室と、
該処理室内に設けられた回転テーブルと、
該回転テーブルの上面に、周方向に沿って所定間隔離間して設けられた複数の基板載置領域と、
前記回転テーブルの上面上の所定領域に向けて流体を供給可能な流体供給手段と、
該流体供給手段が、前記複数の基板載置領域の間の領域に向けて前記流体を供給可能なタイミングに合わせて、該流体供給手段に前記流体の供給流量を変動させる動作を行わせる制御手段と、を有する基板処理装置。 - 前記流体の供給流量が変動する動作は、前記流体の供給を開始する動作及び/又は前記流体の供給を停止する動作を含む請求項10に記載の基板処理装置。
- 前記流体の供給流量が変動する動作は、前記流体を供給中に、前記供給流量を変更する動作を含む請求項10又は11に記載の基板処理装置。
- 前記流体の供給流量が変動する動作を行うタイミングは、前記回転テーブルの回転開始タイミング、回転速度及び経過時間に基づいて定められる請求項10乃至12のいずれか一項に記載の基板処理装置。
- 前記回転テーブルの位置を撮像する撮像手段を更に有し、
前記流体の供給流量が変動する動作を行うタイミングは、前記回転テーブルの回転中の位置を前記撮像手段によりモニタリングすることにより定められる請求項10乃至12のいずれか一項に記載の基板処理装置。 - 前記流体はガスであり、
前記流体供給手段は、前記回転テーブルの半径方向に延在して設けられ、該半径方向に沿って前記回転テーブルに対向して配列された複数の吐出孔を有するノズルと、
前記ガスの供給流量を定める流量調整手段と、を含む請求項10乃至14のいずれか一項に記載の基板処理装置。 - 前記処理室内には、前記回転テーブルの前記周方向に沿って離間して設けられた複数の処理ガス供給領域が設けられ、
前記制御手段は、該複数の処理ガス供給領域の各々において、前記回転テーブル上に配置された前記複数の基板の間の領域に向けて前記流体を供給するタイミングに合わせて、前記流体供給手段に前記回転テーブル上への前記流体の供給流量を変動する動作を行わせる請求項15に記載の基板処理装置。 - 前記複数の処理ガス供給領域の間には、パージガスを供給して前記複数の処理ガス供給領域を分離する分離領域が設けられ、前記回転テーブルの回転により前記複数の処理ガス領域を通過した前記基板上で複数の処理ガスを反応させることにより、反応生成物の分子層を堆積させることが可能である請求項16に記載の基板処理装置。
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