JP6267407B1 - ばね力補償を有する加速度センサ - Google Patents
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/0054—For holding or placing an element in a given position
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/0059—Constitution or structural means for controlling the movement not provided for in groups B81B3/0037 - B81B3/0056
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0235—Accelerometers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0145—Flexible holders
- B81B2203/0163—Spring holders
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/04—Electrodes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/05—Type of movement
- B81B2203/051—Translation according to an axis parallel to the substrate
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
- G01P2015/0882—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system for providing damping of vibrations
Abstract
Description
第1トリム電極340および第2トリム電極350が対称的に設計されているため、トリム電極340と第2トリム電極350との間の電極間の隙間を、確実に完全対称に設計できる。したがって、センサ材料320が偏向しない限り、センサ材料320に結果的に作用する力は生じない。センサ材料320の特定の箇所(例えば、センサ材料320の中心)にトリム電極340およびトリム電極350が集中しているため、製造公差の影響をさらに低減できる。
Claims (10)
- 加速度センサ(100)であって、
基板(110)上を移動軸(x)に沿って移動可能に、ばね要素(130)を用いて取り付けられるセンサ材料(120)と、
上記センサ材料(120)に結合される第1トリム電極(140)と、
上記基板(110)に結合されるとともに、上記第1トリム電極(140)に関連付けられる第2トリム電極(150)と、を備えており、
上記センサ材料(120)が上記移動軸(x)に沿って偏向する際、上記センサ材料(120)に作用するばね力(135)が、上記ばね要素(130)によって発生し、
上記センサ材料(120)が偏向する際、上記ばね力(135)に対抗する、上記センサ材料(120)に作用する静電気力(145)が、上記第1トリム電極(140)と上記第2トリム電極(150)との間におけるトリム電圧の印加によって発生し、
上記第1トリム電極(240)の一部は、くし型電極として形成されており、上記第2トリム電極(250)は、電極板として形成されており、
上記くし型電極の電極指を支持するくし型電極として形成されている、上記第1トリム電極(240)の各領域は、関連付けられている上記第2トリム電極(250)とともに、上記静電気力(145)を発生させるのに適した平板コンデンサを形成することを特徴とする、加速度センサ(100)。 - 上記センサ材料(120)に結合されるセンサ電極(160)と、
上記基板(110)に結合されるとともに、上記センサ電極(160)に関連付けられる検出電極(170)と、を備えており、
上記移動軸(x)に沿った上記センサ材料(120)の偏向は、上記センサ電極(160)と、関連付けられた上記検出電極(170)との間の検出電圧の変化を通して、または上記センサ電極(160)および関連付けられた上記検出電極(170)における電荷の変化を通して決定され得ることを特徴とする、請求項1に記載の加速度センサ(100)。 - 上記センサ電極(260)の一部は、第1トリム電極(240)として形成されており、
第1トリム電極(240)として形成されている上記センサ電極(260)と上記第2トリム電極(250)との間の上記トリム電圧は、上記センサ材料(220)の偏向を減衰させることを特徴とする、請求項2に記載の加速度センサ(200)。 - 上記第1トリム電極(240、340)は、上記移動軸(x)に垂直な対称面に対して対称的に、上記センサ材料(220、320)上に配置されており、
上記第2トリム電極(250、350)は、上記移動軸(x)に垂直な対称軸に対して対称的に、上記基板(210)上に配置されていることを特徴とする、上記請求項1から3のいずれか1項に記載の加速度センサ(200、300)。 - 上記第1トリム電極(140)および上記第2トリム電極(150)によって発生する上記静電気力(145)は、上記ばね要素(130)によって発生する上記ばね力(135)と等しいことを特徴とする、上記請求項1から4のいずれか1項に記載の加速度センサ(100)。
- 上記第1トリム電極(340)の一部は、電極板として形成されており、
電極板として形成されている上記第1トリム電極(340)、および関連付けられている上記第2トリム電極(350)は、平板コンデンサを形成することを特徴とする、上記請求項1から5のいずれか1項に記載の加速度センサ(300)。 - 上記センサ材料(120)は、上記検出電圧を設定する間、さらなる偏向のために必要な加速度が上記トリム電圧から独立している中立位置に、上記検出電圧の設定を通して保持されることを特徴とする、請求項2から6のいずれか1項に記載の加速度センサ(100)。
- 演算部は、ばね力が上記センサ材料(120)に作用しない、上記センサ材料(120)の第1の位置の、上記センサ電極および上記検出電極によって発生する力が上記センサ材料(120)に作用しない、上記センサ材料(120)の第2の位置からの偏差を、上記中立位置に基づいて決定することを特徴とする、請求項7に記載の加速度センサ(100)。
- 演算部は、上記中立位置の変化とばね力の打ち消しに必要な上記トリム電圧の変化とに基づいて、上記加速度センサ(100)のエラーを確認することを特徴とする、請求項7または8に記載の加速度センサ(100)。
- 上記加速度センサ(100)は、微小電気機械システムであることを特徴とする、上記請求項1から9のいずれか1項に記載の加速度センサ(100)。
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DE102015001128.6A DE102015001128B4 (de) | 2015-01-29 | 2015-01-29 | Beschleunigungssensor mit Federkraftkompensation |
DE102015001128.6 | 2015-01-29 | ||
PCT/EP2016/051693 WO2016120319A1 (de) | 2015-01-29 | 2016-01-27 | Beschleunigungssensor mit federkraftkompensation |
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JP6267407B1 true JP6267407B1 (ja) | 2018-01-24 |
JP2018505410A JP2018505410A (ja) | 2018-02-22 |
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US (1) | US10168351B2 (ja) |
EP (1) | EP3250931B9 (ja) |
JP (1) | JP6267407B1 (ja) |
CN (1) | CN107209204B (ja) |
DE (1) | DE102015001128B4 (ja) |
IL (1) | IL253385B (ja) |
WO (1) | WO2016120319A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102015001128B4 (de) | 2015-01-29 | 2021-09-30 | Northrop Grumman Litef Gmbh | Beschleunigungssensor mit Federkraftkompensation |
US11099207B2 (en) * | 2018-10-25 | 2021-08-24 | Analog Devices, Inc. | Low-noise multi-axis accelerometers and related methods |
CN110062083A (zh) * | 2019-05-27 | 2019-07-26 | 维沃移动通信有限公司 | 一种噪音消除方法和移动终端 |
DE102019114996A1 (de) * | 2019-06-04 | 2020-12-10 | Northrop Grumman Litef Gmbh | Beschleunigungsmessvorrichtung mit verbesserter Biasstabilität |
CN111721970B (zh) * | 2020-06-16 | 2022-03-18 | 维沃移动通信有限公司 | 电容式加速度传感器及其控制方法、控制装置和电子设备 |
DE102020210121A1 (de) | 2020-08-11 | 2022-02-17 | Robert Bosch Gesellschaft mit beschränkter Haftung | Mikromechanisches System, Verfahren zum Betreiben eines mikromechanischen Systems |
DE102020211454A1 (de) | 2020-09-11 | 2022-03-17 | Robert Bosch Gesellschaft mit beschränkter Haftung | Mikromechanische Struktur und mikromechanischer Sensor |
CN116577525B (zh) * | 2023-07-14 | 2023-09-12 | 苏州敏芯微电子技术股份有限公司 | 惯性传感器 |
Family Cites Families (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2580389B2 (fr) * | 1985-04-16 | 1989-03-03 | Sfena | Accelerometre micro-usine a rappel electrostatique |
EP0543901B1 (en) * | 1990-08-17 | 1995-10-04 | Analog Devices, Inc. | Monolithic accelerometer |
US5610335A (en) * | 1993-05-26 | 1997-03-11 | Cornell Research Foundation | Microelectromechanical lateral accelerometer |
JP3329084B2 (ja) * | 1994-08-23 | 2002-09-30 | 株式会社デンソー | 静電サーボ式の加速度センサ |
US5511420A (en) * | 1994-12-01 | 1996-04-30 | Analog Devices, Inc. | Electric field attraction minimization circuit |
US5565625A (en) * | 1994-12-01 | 1996-10-15 | Analog Devices, Inc. | Sensor with separate actuator and sense fingers |
KR100363246B1 (ko) * | 1995-10-27 | 2003-02-14 | 삼성전자 주식회사 | 진동구조물및진동구조물의고유진동수제어방법 |
JP3430771B2 (ja) * | 1996-02-05 | 2003-07-28 | 株式会社デンソー | 半導体力学量センサの製造方法 |
US6745627B1 (en) * | 1996-05-21 | 2004-06-08 | Honeywell International Inc. | Electrostatic drive for accelerometer |
US5914553A (en) * | 1997-06-16 | 1999-06-22 | Cornell Research Foundation, Inc. | Multistable tunable micromechanical resonators |
JP2000206142A (ja) * | 1998-11-13 | 2000-07-28 | Denso Corp | 半導体力学量センサおよびその製造方法 |
JP2001174264A (ja) * | 1999-12-21 | 2001-06-29 | Murata Mfg Co Ltd | 共振素子およびその振動調整方法 |
JP2001330623A (ja) * | 2000-03-16 | 2001-11-30 | Denso Corp | 半導体力学量センサ |
DE10024698A1 (de) * | 2000-05-18 | 2001-11-22 | Bosch Gmbh Robert | Mikromechanisches Bauelement |
DE10148858A1 (de) * | 2001-10-04 | 2003-04-10 | Bosch Gmbh Robert | Mikromechanischer Sensor mit Selbsttestfunktion und Optimierungsverfahren |
US7185542B2 (en) * | 2001-12-06 | 2007-03-06 | Microfabrica Inc. | Complex microdevices and apparatus and methods for fabricating such devices |
US7089792B2 (en) * | 2002-02-06 | 2006-08-15 | Analod Devices, Inc. | Micromachined apparatus utilizing box suspensions |
WO2004076340A1 (en) * | 2003-02-28 | 2004-09-10 | Bae Systems Plc | An accelerometer |
GB0304595D0 (en) | 2003-02-28 | 2003-04-02 | Bae Systems Plc | An accelerometer |
JP2004347499A (ja) * | 2003-05-23 | 2004-12-09 | Denso Corp | 半導体力学量センサ |
US7267006B2 (en) * | 2004-02-27 | 2007-09-11 | Bae Systems Plc | Accelerometer |
KR100899812B1 (ko) * | 2006-12-05 | 2009-05-27 | 한국전자통신연구원 | 정전 용량형 가속도계 |
JP5649810B2 (ja) * | 2009-10-29 | 2015-01-07 | 日立オートモティブシステムズ株式会社 | 静電容量式センサ |
DE102009046807B4 (de) * | 2009-11-18 | 2023-01-05 | Robert Bosch Gmbh | Verfahren zur Empfindlichkeitsbestimmung eines Beschleunigungs- oder Magnetfeldsensors |
FR2957414B1 (fr) * | 2010-03-15 | 2012-09-28 | Commissariat Energie Atomique | Capteur de force a bruit reduit |
CN101819215B (zh) | 2010-04-20 | 2012-06-27 | 浙江大学 | 一种弹性系数可调的微机械梳状栅电容加速度计 |
EP2439172B1 (en) * | 2010-10-06 | 2018-05-02 | Sercel | Anti-stiction method in an inertial MEMS |
GB201020722D0 (en) * | 2010-12-07 | 2011-01-19 | Atlantic Inertial Systems Ltd | Accelerometer |
US9611139B2 (en) * | 2012-06-29 | 2017-04-04 | Murata Manufacturing Co., Ltd. | Resonator |
US9702897B2 (en) * | 2012-10-08 | 2017-07-11 | Northrop Grumman Systems Corporation | Dynamic self-calibration of an accelerometer system |
US9341646B2 (en) * | 2012-12-19 | 2016-05-17 | Northrop Grumman Guidance And Electronics Company, Inc. | Bias reduction in force rebalanced accelerometers |
DE102013007593B4 (de) * | 2013-05-02 | 2022-12-29 | Northrop Grumman Litef Gmbh | Beschleunigungssensor sowie verfahren zur herstellung eines beschleunigungssensors |
DE102013208688A1 (de) * | 2013-05-13 | 2014-11-13 | Robert Bosch Gmbh | Sensiereinrichtung für eine mikromechanische Sensorvorrichtung |
US9733268B2 (en) * | 2013-10-07 | 2017-08-15 | Hanking Electronics Ltd. | Systems and methods to determine stiction failures in MEMS devices |
GB201317859D0 (en) * | 2013-10-09 | 2013-11-20 | Atlantic Inertial Systems Ltd | Accelerometer control |
GB201322918D0 (en) * | 2013-12-23 | 2014-02-12 | Atlantic Inertial Systems Ltd | Accelerometers |
WO2016054340A1 (en) * | 2014-10-02 | 2016-04-07 | Board Of Regents, The University Of Texas System | Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors |
DE102015001128B4 (de) | 2015-01-29 | 2021-09-30 | Northrop Grumman Litef Gmbh | Beschleunigungssensor mit Federkraftkompensation |
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EP3250931B9 (de) | 2019-05-22 |
JP2018505410A (ja) | 2018-02-22 |
EP3250931A1 (de) | 2017-12-06 |
DE102015001128B4 (de) | 2021-09-30 |
IL253385A0 (en) | 2017-09-28 |
WO2016120319A1 (de) | 2016-08-04 |
IL253385B (en) | 2018-03-29 |
CN107209204B (zh) | 2019-02-05 |
DE102015001128A1 (de) | 2016-08-04 |
US10168351B2 (en) | 2019-01-01 |
CN107209204A (zh) | 2017-09-26 |
EP3250931B1 (de) | 2018-11-28 |
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