JP6261122B2 - 3次元的な表面電界緩和が増強された半導体デバイス - Google Patents
3次元的な表面電界緩和が増強された半導体デバイス Download PDFInfo
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
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- H01L29/1025—Channel region of field-effect devices
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- H01L29/1045—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with a non-uniform doping structure in the channel region surface the doping structure being parallel to the channel length, e.g. DMOS like
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- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66674—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
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- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7833—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's
- H01L29/7835—Field effect transistors with field effect produced by an insulated gate with lightly doped drain or source extension, e.g. LDD MOSFET's; DDD MOSFET's with asymmetrical source and drain regions, e.g. lateral high-voltage MISFETs with drain offset region, extended drain MISFETs
Description
[項目1]
デバイスであって、
半導体基板と、
前記半導体基板におけるソース領域およびドレイン領域であって、第1の横方向に沿って互いから離間されているソース領域およびドレイン領域と、
前記半導体基板におけるドリフト領域であって、動作時に前記ソース領域と前記ドレイン領域との間にバイアス電圧が印加されるとドリフト領域を通じて電荷担体がドリフトするドリフト領域と、を備え、
前記ドリフト領域は、該ドリフト領域と前記ドレイン領域との間の接合部に沿った第2の横方向において切り欠きドーパントプロファイルを有する、デバイス。
[項目2]
前記ドリフト領域は前記ドレイン領域の下の開口を備え、
前記開口は櫛形状境界を有する、項目1に記載のデバイス。
[項目3]
前記ドリフト領域は、前記ドリフト領域と前記ドレイン領域との間の接合部において、前記ドレイン領域の垂直厚さ方向に狭まっている、項目1に記載のデバイス。
[項目4]
前記ドリフト領域は前記ドレイン領域を通じて横方向に延在していない、項目1に記載のデバイス。
[項目5]
前記ドリフト領域は外側部分および内側部分を備え、該内側部分は該外側部分によって包囲され、前記ドレイン領域の下に配置されており、
前記内側部分は、動作時に前記ドリフト領域の完全な空乏化が達成されるように、前記外側部分に対して縮小されている、項目1に記載のデバイス。
[項目6]
前記切り欠きドーパントプロファイルは方形波状の切り欠きパターンを有する、項目1に記載のデバイス。
[項目7]
前記切り欠きドーパントプロファイルは周期的な切り欠きパターンを有する、項目1に記載のデバイス。
[項目8]
前記半導体基板はエピタキシャル層を備え、前記ソース、ドレイン、およびドリフト領域は該エピタキシャル層に形成されており、
前記ドリフト領域は前記エピタキシャル層に対する切り欠きの境界に沿って前記ドレイン領域の下で切り詰められている、項目1に記載のデバイス。
[項目9]
前記半導体基板において前記ソース領域と前記ドレイン領域との間にトレンチ分離領域をさらに備え、
前記ドリフト領域は、前記トレンチ分離領域の下の第1の領域と、前記ドレイン領域の下の第2の領域とを備え、
前記ドリフト領域の前記第2の領域におけるドーパント濃度は、前記第1の領域に対して低減されている、項目1に記載のデバイス。
[項目10]
電子装置であって、
半導体基板と、
前記半導体基板におけるリサーフトランジスタと、を備え、該リサーフトランジスタは、
第1の導電型を有し、動作時にチャネルが形成される第1の半導体領域と、
第2の導電型を有し、第1の横方向に沿って互いから離間されている第2の半導体領域および第3の半導体領域と、
前記第2の導電型を有する第4の半導体領域であって、前記第2の半導体領域と第3の半導体領域との間にバイアス電圧が印加されると、電荷担体が動作時に前記第1の半導体領域に形成される前記チャネルからを第4の半導体領域通じてドリフトする第4の半導体領域と、を備え、
前記第4の半導体領域は、前記第3の半導体領域と第4の半導体領域との間の接合部に沿って第2の横方向に切り欠きドーパントプロファイルを有する、電子装置。
[項目11]
前記第4の半導体領域は前記第3の半導体領域の下の開口を備え、
前記開口は櫛形状境界を有する、項目10に記載の電子装置。
[項目12]
前記第4の半導体領域は前記第3の半導体領域を通じて横方向に延在していない、項目10に記載の電子装置。
[項目13]
前記第4の半導体領域は外側領域および内側領域を備え、該内側領域は該外側領域によって包囲され、前記第3の半導体領域の下に配置されており、
前記内側領域は、動作時に前記第4の半導体領域の完全な空乏化が達成されるように、前記外側領域に対して縮小されている、項目10に記載の電子装置。
[項目14]
前記半導体基板はエピタキシャル層を備え、前記第1の半導体領域、第2の半導体領域、第3の半導体領域、および第4の半導体領域は該エピタキシャル層に形成されており、
前記第4の半導体領域は前記エピタキシャル層に対する切り欠きの境界に沿って前記第3の半導体領域の下で切り詰められている、項目10に記載の電子装置。
[項目15]
前記リサーフトランジスタは、前記第2の半導体領域と前記第3の半導体領域との間にトレンチ分離領域をさらに備え、
前記第4の半導体領域は、前記トレンチ分離領域の下の第1の領域と前記第3の半導体領域の下の第2の領域とを備え、
前記第4の半導体領域の前記第2の領域におけるドーパント濃度は、前記第1の領域に対して低減されている、項目10に記載の電子装置。
[項目16]
トランジスタを作製する方法であって、
ドリフト領域を形成するための基板の第1の領域にドーパントを注入するステップと、
前記基板の第2の領域および第3の領域にソース領域およびドレイン領域をそれぞれ形成するステップであって、該第2の領域および該第3の領域は第1の横方向において互いから離間されている、前記ステップと、を備え、
前記第1の領域は前記第3の領域を通じて横方向に延在しておらず、第2の横方向に切り欠きのドレイン側境界を有する、方法。
[項目17]
前記第1の領域は前記第3の領域の下の開口を備え、該開口は切り欠きのドレイン側境界を有する、項目16に記載の方法。
[項目18]
前記ドリフト領域が前記ドレイン領域に電気的に結合されるように、前記基板をアニーリングするステップをさらに備える、項目16に記載の方法。
[項目19]
前記第1の領域および前記第3の領域は横方向において重ならない、項目16に記載の方法。
[項目20]
前記基板のエピタキシャル層を形成するステップをさらに備え、前記第1の領域、第2の領域、および第3の領域は前記エピタキシャル層に配置される、項目16に記載の方法。
Claims (19)
- デバイスであって、
半導体基板と、
前記半導体基板におけるソース領域およびドレイン領域であって、第1の横方向に沿って互いから離間されているソース領域およびドレイン領域と、
前記半導体基板におけるドリフト領域であって、動作時に前記ソース領域と前記ドレイン領域との間にバイアス電圧が印加されるとドリフト領域を通じて電荷担体がドリフトするドリフト領域と、を備え、
前記ドリフト領域および前記ドレイン領域は、接合部において互いに接続されており、
前記ドリフト領域は、該ドリフト領域と前記ドレイン領域との間の前記接合部に沿った第2の横方向において平面視における切り欠きの境界を有するとともに、前記ドリフト領域と前記ドレイン領域との間の接合部において、前記ドレイン領域の垂直厚さ方向に狭まっている、デバイス。 - 前記ドリフト領域は前記ドレイン領域の下の開口を備え、
前記開口は櫛形状境界を有する、請求項1に記載のデバイス。 - 前記ドリフト領域は前記ドレイン領域を通じて横方向に延在していない、請求項1に記載のデバイス。
- 前記ドリフト領域は外側部分および内側部分を備え、該内側部分は該外側部分によって包囲され、前記ドレイン領域の下に配置されており、
前記内側部分は、動作時に前記ドリフト領域の完全な空乏化が達成されるように、前記外側部分に対して縮小されている、請求項1に記載のデバイス。 - 前記切り欠きの境界は方形波状の切り欠きパターンを有する、請求項1に記載のデバイス。
- 前記切り欠きの境界は周期的な切り欠きパターンを有する、請求項1に記載のデバイス。
- 前記半導体基板はエピタキシャル層を備え、前記ソース領域、前記ドレイン領域、および前記ドリフト領域は該エピタキシャル層に形成されており、
前記ドリフト領域は前記エピタキシャル層に対する切り欠きの境界に沿って前記ドレイン領域の下で切り詰められている、請求項1に記載のデバイス。 - 前記半導体基板において前記ソース領域と前記ドレイン領域との間にトレンチ分離領域をさらに備え、
前記ドリフト領域は、前記トレンチ分離領域の下の第1の領域と、前記ドレイン領域の下の第2の領域とを備え、
前記ドリフト領域の前記第2の領域におけるドーパント濃度は、前記第1の領域に対して低減されている、請求項1に記載のデバイス。 - 前記切り欠きの境界は、櫛形状境界を含む、請求項1に記載のデバイス。
- 前記ドリフト領域は、前記ドレイン領域と横方向において重なっており、
前記ドリフト領域は、前記ドレイン領域の横方向の範囲全体を通じては延在していない、請求項1に記載のデバイス。 - 前記切り欠きの境界は、前記ドリフト領域の歯部を含み、
前記歯部は前記ドリフト領域および前記ドレイン領域を結合している、請求項1に記載のデバイス。 - 前記ドリフト領域は、前記切り欠きの境界に沿った歯部を含み、
前記歯部は、前記ドレイン領域と横方向において重なっており、
前記歯部は、前記ドレイン領域の横方向の範囲全体を通じては延在していない、請求項1に記載のデバイス。 - 前記ドレイン領域下における前記ドリフト領域の厚さは、前記ドレイン領域下にない前記ドリフト領域の部分より狭い、請求項1に記載のデバイス。
- 電子装置であって、
半導体基板と、
前記半導体基板におけるリサーフトランジスタと、を備え、該リサーフトランジスタは、
第1の導電型を有し、動作時にチャネルが形成される第1の半導体領域と、
第2の導電型を有し、第1の横方向に沿って互いから離間されている第2の半導体領域および第3の半導体領域と、
前記第2の導電型を有する第4の半導体領域であって、前記第2の半導体領域と第3の半導体領域との間にバイアス電圧が印加されると、電荷担体が動作時に前記第1の半導体領域に形成される前記チャネルからを第4の半導体領域通じてドリフトする第4の半導体領域と、を備え、
前記第3の半導体領域および前記第4の半導体領域は、接合部において互いに接続されており、
前記第4の半導体領域は、前記第3の半導体領域と第4の半導体領域との間の前記接合部に沿った第2の横方向において平面視における切り欠きの境界を有するとともに、前記第4の半導体領域と前記第3の半導体領域との間の接合部において、前記第3の半導体領域の垂直厚さ方向に狭まっている、電子装置。 - 前記第4の半導体領域は前記第3の半導体領域の下の開口を備え、
前記開口は櫛形状境界を有する、請求項14に記載の電子装置。 - 前記第4の半導体領域は前記第3の半導体領域を通じて横方向に延在していない、請求項14に記載の電子装置。
- 前記第4の半導体領域は外側領域および内側領域を備え、該内側領域は該外側領域によって包囲され、前記第3の半導体領域の下に配置されており、
前記内側領域は、動作時に前記第4の半導体領域の完全な空乏化が達成されるように、前記外側領域に対して縮小されている、請求項14に記載の電子装置。 - 前記半導体基板はエピタキシャル層を備え、前記第1の半導体領域、第2の半導体領域、第3の半導体領域、および第4の半導体領域は該エピタキシャル層に形成されており、
前記第4の半導体領域は前記エピタキシャル層に対する切り欠きの境界に沿って前記第3の半導体領域の下で切り詰められている、請求項14に記載の電子装置。 - 前記リサーフトランジスタは、前記第2の半導体領域と前記第3の半導体領域との間にトレンチ分離領域をさらに備え、
前記第4の半導体領域は、前記トレンチ分離領域の下の第1の領域と前記第3の半導体領域の下の第2の領域とを備え、
前記第4の半導体領域の前記第2の領域におけるドーパント濃度は、前記第1の領域に対して低減されている、請求項14に記載の電子装置。
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Free format text: JAPANESE INTERMEDIATE CODE: R250 |