JP6253915B2 - アクチュエータ装置及びミラー駆動装置 - Google Patents

アクチュエータ装置及びミラー駆動装置 Download PDF

Info

Publication number
JP6253915B2
JP6253915B2 JP2013160425A JP2013160425A JP6253915B2 JP 6253915 B2 JP6253915 B2 JP 6253915B2 JP 2013160425 A JP2013160425 A JP 2013160425A JP 2013160425 A JP2013160425 A JP 2013160425A JP 6253915 B2 JP6253915 B2 JP 6253915B2
Authority
JP
Japan
Prior art keywords
wiring
torsion bar
disposed
movable
straight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2013160425A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015031786A5 (enExample
JP2015031786A (ja
Inventor
訓秀 足立
訓秀 足立
正国 木元
正国 木元
貞治 滝本
貞治 滝本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to JP2013160425A priority Critical patent/JP6253915B2/ja
Priority to EP13890693.8A priority patent/EP3029818B1/en
Priority to PCT/JP2013/083362 priority patent/WO2015015666A1/ja
Priority to US14/908,173 priority patent/US9729038B2/en
Publication of JP2015031786A publication Critical patent/JP2015031786A/ja
Publication of JP2015031786A5 publication Critical patent/JP2015031786A5/ja
Priority to US15/634,296 priority patent/US10394017B2/en
Application granted granted Critical
Publication of JP6253915B2 publication Critical patent/JP6253915B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • B81B3/0045—Improve properties related to angular swinging, e.g. control resonance frequency
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0145—Flexible holders
    • B81B2203/0154—Torsion bars
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
JP2013160425A 2013-08-01 2013-08-01 アクチュエータ装置及びミラー駆動装置 Active JP6253915B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2013160425A JP6253915B2 (ja) 2013-08-01 2013-08-01 アクチュエータ装置及びミラー駆動装置
EP13890693.8A EP3029818B1 (en) 2013-08-01 2013-12-12 Actuator device and mirror drive device
PCT/JP2013/083362 WO2015015666A1 (ja) 2013-08-01 2013-12-12 アクチュエータ装置及びミラー駆動装置
US14/908,173 US9729038B2 (en) 2013-08-01 2013-12-12 Actuator device and mirror drive device
US15/634,296 US10394017B2 (en) 2013-08-01 2017-06-27 Actuator device and mirror drive device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013160425A JP6253915B2 (ja) 2013-08-01 2013-08-01 アクチュエータ装置及びミラー駆動装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2017229050A Division JP6426818B2 (ja) 2017-11-29 2017-11-29 アクチュエータ装置

Publications (3)

Publication Number Publication Date
JP2015031786A JP2015031786A (ja) 2015-02-16
JP2015031786A5 JP2015031786A5 (enExample) 2016-09-08
JP6253915B2 true JP6253915B2 (ja) 2017-12-27

Family

ID=52431233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013160425A Active JP6253915B2 (ja) 2013-08-01 2013-08-01 アクチュエータ装置及びミラー駆動装置

Country Status (4)

Country Link
US (2) US9729038B2 (enExample)
EP (1) EP3029818B1 (enExample)
JP (1) JP6253915B2 (enExample)
WO (1) WO2015015666A1 (enExample)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6460406B2 (ja) * 2015-06-09 2019-01-30 第一精工株式会社 可動反射素子及び二次元走査装置
US10196259B2 (en) * 2015-12-30 2019-02-05 Mems Drive, Inc. MEMS actuator structures resistant to shock
JP6691784B2 (ja) * 2016-01-21 2020-05-13 浜松ホトニクス株式会社 アクチュエータ装置
JP6696777B2 (ja) 2016-01-21 2020-05-20 浜松ホトニクス株式会社 アクチュエータ装置
ITUA20162170A1 (it) * 2016-03-31 2017-10-01 St Microelectronics Srl Dispositivo mems oscillante intorno a due assi e dotato di un sistema di rilevamento di posizione, in particolare di tipo piezoresistivo
IT201600079604A1 (it) * 2016-07-28 2018-01-28 St Microelectronics Srl Struttura oscillante con attuazione piezoelettrica, sistema e metodo di fabbricazione
WO2018159077A1 (ja) * 2017-02-28 2018-09-07 浜松ホトニクス株式会社 光モジュール及び測距装置
WO2018168349A1 (ja) 2017-03-13 2018-09-20 パイオニア株式会社 駆動装置および距離測定装置
JP6924090B2 (ja) * 2017-07-21 2021-08-25 浜松ホトニクス株式会社 アクチュエータ装置
JP7229160B2 (ja) 2017-08-10 2023-02-27 浜松ホトニクス株式会社 ミラー装置
CN115051526A (zh) * 2017-12-01 2022-09-13 浜松光子学株式会社 致动器装置
JP6585147B2 (ja) 2017-12-01 2019-10-02 浜松ホトニクス株式会社 アクチュエータ装置
JP1680386S (enExample) * 2018-05-01 2021-03-01
USD907085S1 (en) * 2018-05-01 2021-01-05 Hamamatsu Photonics K.K. Laser beam reflector
USD903614S1 (en) 2018-05-01 2020-12-01 Hamamatsu Photonics K.K. Laser beam reflector
JP1680385S (enExample) * 2018-05-01 2021-03-01
JP1680387S (enExample) * 2018-05-01 2021-03-01
JP1680507S (enExample) * 2018-05-01 2021-03-08
JP1625135S (enExample) * 2018-05-01 2019-03-18
JP1625495S (enExample) 2018-05-01 2019-03-18
JP1639597S (enExample) * 2018-05-01 2019-08-19
JP1680755S (enExample) 2018-05-01 2021-03-08
JP1680388S (enExample) * 2018-05-01 2021-03-01
EP3861367A2 (en) * 2018-10-04 2021-08-11 Innoviz Technologies Ltd. Electrooptical systems having heating elements
EP3666727B1 (en) * 2018-12-14 2024-10-02 STMicroelectronics S.r.l. Microelectromechanical device with a structure tiltable by piezoelectric actuation having improved mechanical and electrical characteristics
US10730744B2 (en) * 2018-12-28 2020-08-04 Industrial Technology Research Institute MEMS device with movable stage
CH715874A1 (fr) * 2019-02-26 2020-08-31 Sercalo Microtechnology Ltd Dispositif micromécanique à bobine.
JP7065146B2 (ja) * 2020-04-23 2022-05-11 浜松ホトニクス株式会社 アクチュエータ装置
JP7292469B2 (ja) * 2020-04-23 2023-06-16 浜松ホトニクス株式会社 アクチュエータ装置
US11733510B2 (en) * 2020-06-10 2023-08-22 Nokia Technologies Oy Electromagnetic microactuator apparatus and method
US11747611B2 (en) 2020-12-16 2023-09-05 Stmicroelectronics (Research & Development) Limited Compact line scan mems time of flight system with actuated lens
US12164103B2 (en) 2020-12-16 2024-12-10 STMicroelectronics (Research &Develoment) Limited Compact line scan MEMS time of flight system with actuated lens
JP7499889B2 (ja) * 2021-01-28 2024-06-14 三菱電機株式会社 Ｍｅｍｓミラー装置及び測距装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001051224A (ja) 1999-08-06 2001-02-23 Olympus Optical Co Ltd アクチュエータ
JP2003100753A (ja) * 2001-09-27 2003-04-04 Dainippon Screen Mfg Co Ltd 薄膜整形装置および薄膜整形方法
US6935759B1 (en) 2002-02-19 2005-08-30 Glimmerglass Networks, Inc. Folded longitudinal torsional hinge for gimbaled MEMS mirror
JP2005245135A (ja) 2004-02-26 2005-09-08 Miyota Kk プレーナ型電磁アクチュエータ及びその製造方法
JP5634670B2 (ja) * 2008-10-20 2014-12-03 日本信号株式会社 プレーナ型アクチュエータ
JP5191939B2 (ja) * 2009-03-31 2013-05-08 スタンレー電気株式会社 光偏向器用アクチュエータ装置
JP2012088487A (ja) * 2010-10-19 2012-05-10 Jvc Kenwood Corp 光偏向器
JP5842467B2 (ja) * 2010-11-16 2016-01-13 株式会社リコー アクチュエータ装置、このアクチュエータ装置用の保護カバー、このアクチュエータの製造方法、このアクチュエータ装置を用いた光偏向装置、二次元光走査装置及びこれを用いた画像投影装置
JP5775765B2 (ja) 2011-01-21 2015-09-09 オリンパス株式会社 光偏向器
WO2012130612A1 (en) 2011-03-25 2012-10-04 Lemoptix Sa A reflective device
JP2013200337A (ja) * 2012-03-23 2013-10-03 Stanley Electric Co Ltd 光偏向器
WO2013185812A1 (en) * 2012-06-13 2013-12-19 Lemoptix Sa A mems device

Also Published As

Publication number Publication date
US20160172951A1 (en) 2016-06-16
US10394017B2 (en) 2019-08-27
WO2015015666A1 (ja) 2015-02-05
EP3029818A1 (en) 2016-06-08
EP3029818B1 (en) 2019-06-26
EP3029818A4 (en) 2017-05-24
US20170293136A1 (en) 2017-10-12
US9729038B2 (en) 2017-08-08
JP2015031786A (ja) 2015-02-16

Similar Documents

Publication Publication Date Title
JP6253915B2 (ja) アクチュエータ装置及びミラー駆動装置
WO2017126289A1 (ja) アクチュエータ装置
WO2017126290A1 (ja) アクチュエータ装置
JP6250323B2 (ja) ミラー駆動装置
CN105934698A (zh) 镜驱动装置
JP7171850B2 (ja) アクチュエータ装置
JP3896548B2 (ja) 電磁継電器
JP2005189825A (ja) 光偏向器
JP6175305B2 (ja) ミラー駆動装置
JP5038067B2 (ja) 磁気トランジスタ
JP6426818B2 (ja) アクチュエータ装置
JP2011152632A (ja) プレーナ型アクチュエータ
JP6463447B2 (ja) ミラー駆動装置
JP7065146B2 (ja) アクチュエータ装置
WO2013076844A1 (ja) アクチュエータ
JP7566076B2 (ja) アクチュエータ装置
WO2014002183A1 (ja) アクチュエータ

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160722

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20160722

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170425

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20171031

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20171129

R150 Certificate of patent or registration of utility model

Ref document number: 6253915

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250