JP6219968B2 - 磁気アライメントシステム及び磁気アライメント方法 - Google Patents

磁気アライメントシステム及び磁気アライメント方法 Download PDF

Info

Publication number
JP6219968B2
JP6219968B2 JP2015551119A JP2015551119A JP6219968B2 JP 6219968 B2 JP6219968 B2 JP 6219968B2 JP 2015551119 A JP2015551119 A JP 2015551119A JP 2015551119 A JP2015551119 A JP 2015551119A JP 6219968 B2 JP6219968 B2 JP 6219968B2
Authority
JP
Japan
Prior art keywords
magnetic alignment
angle
force
coil assemblies
magnet array
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2015551119A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016504009A (ja
Inventor
リン ジャン
リン ジャン
シャオウェン ジャン
シャオウェン ジャン
リン グオ
リン グオ
ジュン チェン
ジュン チェン
ジーガン ジャン
ジーガン ジャン
Original Assignee
シャンハイ マイクロ エレクトロニクス イクイプメント（グループ）カンパニー リミティド
シャンハイ マイクロ エレクトロニクス イクイプメント（グループ）カンパニー リミティド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by シャンハイ マイクロ エレクトロニクス イクイプメント（グループ）カンパニー リミティド, シャンハイ マイクロ エレクトロニクス イクイプメント（グループ）カンパニー リミティド filed Critical シャンハイ マイクロ エレクトロニクス イクイプメント（グループ）カンパニー リミティド
Publication of JP2016504009A publication Critical patent/JP2016504009A/ja
Application granted granted Critical
Publication of JP6219968B2 publication Critical patent/JP6219968B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22—Rotating parts of the magnetic circuit
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K15/00—Processes or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines
    • H02K15/02—Processes or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines of stator or rotor bodies
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49014—Superconductor

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Linear Motors (AREA)
  • Control Of Linear Motors (AREA)
JP2015551119A 2013-01-25 2014-01-22 磁気アライメントシステム及び磁気アライメント方法 Active JP6219968B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201310030302.9A CN103973172B (zh) 2013-01-25 2013-01-25 一种动线圈式磁浮平面电机磁对准系统及其对准方法
CN201310030302.9 2013-01-25
PCT/CN2014/071089 WO2014114231A1 (zh) 2013-01-25 2014-01-22 一种磁对准系统及其对准方法

Publications (2)

Publication Number Publication Date
JP2016504009A JP2016504009A (ja) 2016-02-08
JP6219968B2 true JP6219968B2 (ja) 2017-10-25

Family

ID=51226935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015551119A Active JP6219968B2 (ja) 2013-01-25 2014-01-22 磁気アライメントシステム及び磁気アライメント方法

Country Status (8)

Country Link
US (1) US9893596B2 (enExample)
EP (1) EP2950441B1 (enExample)
JP (1) JP6219968B2 (enExample)
KR (2) KR20150103731A (enExample)
CN (1) CN103973172B (enExample)
SG (1) SG11201505237UA (enExample)
TW (1) TW201440413A (enExample)
WO (1) WO2014114231A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106533274A (zh) * 2015-09-11 2017-03-22 德昌电机(深圳)有限公司 电动工具
DE102015222482A1 (de) * 2015-11-13 2017-05-18 Physik Instrumente (Pi) Gmbh & Co. Kg Planar-Positioniervorrichtung und Positioniertisch
CN105871257B (zh) * 2016-05-05 2017-11-17 江苏大学 一种动圈式磁悬浮永磁平面电机的转矩电流分配方法
CN106292736A (zh) * 2016-08-19 2017-01-04 联想(北京)有限公司 一种控制方法、控制器及电子设备
CN109728752B (zh) * 2017-10-31 2020-04-10 上海微电子装备（集团）股份有限公司 一种磁对准方法及一种磁浮电机
DE102018209403A1 (de) * 2018-06-13 2019-12-19 Robert Bosch Gmbh Aus Unterbaugruppen zusammengesetzte Bewegungsvorrichtung
CN111490642B (zh) * 2019-01-29 2022-05-20 苏州隐冠半导体技术有限公司 一种基于霍尔效应传感器和平面电机的位移装置
CN111835177A (zh) * 2019-04-17 2020-10-27 上海微电子装备（集团）股份有限公司 磁浮电机及其控制方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04285878A (ja) * 1991-03-14 1992-10-09 Meidensha Corp リニア誘導モータの特性算定方式
US6128174A (en) * 1997-08-29 2000-10-03 Stereotaxis, Inc. Method and apparatus for rapidly changing a magnetic field produced by electromagnets
JPH11153136A (ja) * 1997-11-18 1999-06-08 Nippon Seiko Kk 超電導磁気軸受の浮上力計算法及び装置並びに記録媒体
JP4295883B2 (ja) * 1999-12-13 2009-07-15 株式会社ワコー 力検出装置
US7134349B2 (en) * 2003-07-08 2006-11-14 Board Of Trustees Operating Michigan State University Micro-force sensing system
US7205741B2 (en) * 2004-06-24 2007-04-17 Asml Netherlands B.V. Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing method
JP2007068256A (ja) * 2005-08-29 2007-03-15 Canon Inc ステージ装置の制御方法
DE102006035676A1 (de) * 2006-07-31 2008-02-14 Siemens Ag Linearmotor mit Kraftwelligkeitsausgleich
CN101610054B (zh) * 2009-07-21 2011-02-16 清华大学 采用三维永磁阵列的平面电机
CN101750187B (zh) * 2010-01-19 2011-04-06 清华大学 一种基于磁钢阵列的运动平台二维定位方法
US9465305B2 (en) * 2010-05-18 2016-10-11 Nikon Corporation Method for determining a commutation offset and for determining a compensation map for a stage
JP2012002554A (ja) * 2010-06-15 2012-01-05 Kumamoto Univ ３次元ロードセル
JP5864878B2 (ja) 2011-03-30 2016-02-17 本田技研工業株式会社 自動二輪車
CN102607388B (zh) 2012-02-17 2014-09-24 清华大学 平面电机动子位移测量装置及方法
CN102739122B (zh) * 2012-07-09 2014-11-26 哈尔滨工业大学 双边初级结构磁悬浮平面电机
CN102801369B (zh) * 2012-07-12 2015-05-20 清华大学 一种基于双台交换系统的电流环辅助整定装置
CN102800368B (zh) * 2012-07-12 2014-08-13 清华大学 一种气浮平面电机初始零位的定位方法

Also Published As

Publication number Publication date
EP2950441A4 (en) 2016-11-23
WO2014114231A1 (zh) 2014-07-31
KR20170103041A (ko) 2017-09-12
CN103973172A (zh) 2014-08-06
SG11201505237UA (en) 2015-08-28
JP2016504009A (ja) 2016-02-08
EP2950441B1 (en) 2018-03-14
CN103973172B (zh) 2016-09-28
US20150340931A1 (en) 2015-11-26
US9893596B2 (en) 2018-02-13
EP2950441A1 (en) 2015-12-02
TWI513173B (enExample) 2015-12-11
TW201440413A (zh) 2014-10-16
KR20150103731A (ko) 2015-09-11
KR101796535B1 (ko) 2017-11-10

Similar Documents

Publication Publication Date Title
JP6219968B2 (ja) 磁気アライメントシステム及び磁気アライメント方法
JP5894596B2 (ja) 第２の部分に対する第１の部分の空間位置を決定するセンサ組立体および方法
Zhang et al. A novel absolute angular position sensor based on electromagnetism
JP6043721B2 (ja) 改良型位置センサ
Kibble et al. Principles of a new generation of simplified and accurate watt balances
US10456923B2 (en) Sensor and robot
CN111964826B (zh) 一种用于微推力器测试系统的标定装置及方法
Foong et al. Harnessing embedded magnetic fields for angular sensing with nanodegree accuracy
JP5677065B2 (ja) 磁気式力覚センサ
CN106170796A (zh) 用于测量磁体的沿该磁体的主表面的磁场分布的方法和设备
Xu et al. Numerical calculation of the magnetic field and force in cylindrical single-axis actuator
JP4819936B2 (ja) アクチュエータ
JP2005234616A (ja) アクチュエータ
JPWO2007148664A1 (ja) アクチュエータ
Xu et al. Prototype of 6-DOF magnetically levitated stage based on single axis Lorentz force actuator
Kawato et al. Multi-degree-of-freedom precision position sensing and motion control using two-axis Hall-effect sensors
CN114910834B (zh) 一种磁场测量方法以及磁场测量系统
Jeon et al. Experiments of a novel magnetic levitation stage for wide area movements
Zhao et al. A Low-Cost Three-Degree-of-Freedom Position Measurement Method of the Y-Type Maglev Planar Motor Based on Hall Sensor
Krebs et al. Modeling and control of a 2Dof PM synchronous actuator using Hall effect sensors
Maierhofer et al. Progress in Calibrating Active Magnetic Bearings with Numerical and Experimental Approaches
CN112003501A (zh) 干扰磁场下电机正弦误差的出力补偿方法及装置
CN103633884B (zh) 一种基于压力传感器组的磁悬浮永磁平面电机起浮方法
Arpaia et al. Rotating-coil calibration in a reference quadrupole, considering roll-angle misalignment and higher-order harmonics
CN109728752A (zh) 一种磁对准方法及一种磁浮电机

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150707

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20150707

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20160622

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20160628

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20170307

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170703

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20170710

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20170919

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20170928

R150 Certificate of patent or registration of utility model

Ref document number: 6219968

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250