WO2014114231A1 - 一种磁对准系统及其对准方法 - Google Patents

一种磁对准系统及其对准方法 Download PDF

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Publication number
WO2014114231A1
WO2014114231A1 PCT/CN2014/071089 CN2014071089W WO2014114231A1 WO 2014114231 A1 WO2014114231 A1 WO 2014114231A1 CN 2014071089 W CN2014071089 W CN 2014071089W WO 2014114231 A1 WO2014114231 A1 WO 2014114231A1
Authority
WO
WIPO (PCT)
Prior art keywords
magnetic
angle
magnetic alignment
coil
force sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2014/071089
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English (en)
French (fr)
Chinese (zh)
Inventor
张霖
张晓文
郭琳
陈军
张志钢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Micro Electronics Equipment Co Ltd
Original Assignee
Shanghai Micro Electronics Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Micro Electronics Equipment Co Ltd filed Critical Shanghai Micro Electronics Equipment Co Ltd
Priority to KR1020157021133A priority Critical patent/KR20150103731A/ko
Priority to US14/758,720 priority patent/US9893596B2/en
Priority to KR1020177024470A priority patent/KR101796535B1/ko
Priority to JP2015551119A priority patent/JP6219968B2/ja
Priority to SG11201505237UA priority patent/SG11201505237UA/en
Priority to EP14743517.6A priority patent/EP2950441B1/en
Publication of WO2014114231A1 publication Critical patent/WO2014114231A1/zh
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K11/00Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K41/00Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02Linear motors; Sectional motors
    • H02K41/03Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K1/00Details of the magnetic circuit
    • H02K1/06Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22Rotating parts of the magnetic circuit
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K15/00Processes or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines
    • H02K15/02Processes or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines of stator or rotor bodies
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K2201/00Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18Machines moving with multiple degrees of freedom
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49014Superconductor

Definitions

  • the invention relates to a dynamic coil type magnetic floating plane motor magnetic alignment system and an alignment method thereof. Background technique
  • the basic control principle of the moving coil type magnetic floating plane motor is similar to that of the ordinary linear motor, that is, according to the position of the coil in the magnetic field, the current angle of the three-phase coil is changed, so that the output of the motor in the desired direction is constant. Due to the vector control method of ID and IQ decoupling, the accuracy of the initial magnetic alignment angle, in addition to ensuring the horizontal and vertical output of the moving coil type maglev plane motor, also affects the horizontal and vertical directions of the motor. Decoupling. If the magnetic alignment angle is not accurate enough, and the horizontal and vertical decoupling is not thorough enough, horizontal and vertical crosstalk will be introduced into the control, which will affect the servo performance of the motor.
  • US Pat. No. 7,205,741 B2 discloses a prior art system for detecting an initial magnetic alignment angle. As shown in FIG. 1, the solution proposes: laying a layer of sensitive element 3 made of compressible material between the motor coil 1 and the surface of the magnetic steel 2. With the capacitance or inductance distance sensor 4, the sensing element 3 compresses the shape variable when the motor is in the vertical output. The initial magnetic alignment angle of the motor is found by changing the three-phase coil current angle within the magnetic alignment range and judging the magnitude of the shape of the sensitive element 3.
  • the accuracy of the above magnetic alignment angle system depends on the shape variable of the sensor 3 and the resolution of the distance sensor 4 when the motor is vertically outputting, which requires a good linear relationship between the vertical output of the motor and the 3-shaped variable of the sensitive component. When the vertical output is too large or too small, this linear relationship will be difficult to satisfy, which will affect the accuracy of the measured magnetic alignment angle.
  • the invention provides a moving coil type magnetic floating plane motor magnetic alignment system and an alignment method thereof to improve magnetic alignment precision.
  • the present invention provides a magnetic alignment system comprising: a magnetic steel array, For generating a magnetic field; a motor mover disposed above the magnetic steel array, the motor mover comprising four coil groups arranged in a matrix, one of each two adjacent coil groups in a first direction Arranging, the other being arranged in a second direction perpendicular to the first direction; the fixing tool having a fixed relative position with respect to the magnetic steel array, and the fixing tool is not in contact with the motor mover and the magnetic steel array And at least one force sensor unit connected between the motor mover and the fixed tool, wherein the force sensor is configured to measure the coil when a three-phase current is applied to a coil group of the motor mover The output value generated by the group under the action of the magnetic field.
  • each coil set includes a plurality of three-phase coils arranged in parallel.
  • the magnetic steel array comprises a plurality of magnets arranged in a matrix in the third and fourth directions, wherein the third direction and the fourth direction are perpendicular, and the third direction is opposite to the first direction At an angle of 45 degrees, the fourth direction forms an angle of 45 degrees with the second direction.
  • the distance between two adjacent three-phase coils in each coil group is / 3 , where ⁇ is the pole pitch between two adjacent magnets in the array of magnetic steel.
  • the force sensor unit comprises a force sensor above three dimensions or comprises three one-dimensional force sensors.
  • the present invention also provides a magnetic alignment method for use in the above magnetic alignment system, the method comprising:
  • a fixed tooling and force sensor unit is mounted, and the following steps are performed on each of the four coil sets to complete the initial magnetic alignment:
  • the magnetic alignment angle of the coil group is determined according to a three-phase current angle corresponding to a horizontal or vertical output force value of the coil group.
  • the method further includes:
  • the fixed tooling and the force sensor are removed, and the following steps are performed on each of the four coil sets to servo correct the magnetic alignment angle:
  • the coil set is separated from the closed loop control, and the remaining three coil sets form a closed loop control under the control of a controller, and the output of the controller is recorded as an initial offset;
  • the three-phase current angle of the one coil set is adjusted to bring the actual output of the controller closest to the initial offset.
  • the angle of the three-phase current is changed on the basis of the initial magnetic alignment angle, and the range is changed from -1/N magnetic alignment angle periods to +1/N magnetic alignment angle periods. , where N is a natural number.
  • the present invention has the following advantages:
  • the present invention employs a force sensor that has a more reliable linear operating range compared to the compressible materials used in the prior art, reducing the effect of nonlinear factors on magnetic alignment;
  • the compressible material in the prior art can only measure the vertical output of the motor.
  • the force sensor of the present invention can measure the vertical output of the motor, and can also measure the horizontal output force;
  • the motor mover is fixed on the fixed tool through the force sensor, which can prevent the motor from being displaced due to the horizontal output force being greater than the static friction force of the motor mover and the surface of the magnetic steel array;
  • the method of servo-corrected magnetic alignment angle can improve the magnetic alignment accuracy without unnecessary sensors and avoid the influence of sensor resolution on magnetic alignment accuracy.
  • FIG. 1 is a schematic structural view of a magnetic alignment system of a moving coil type magnetic floating plane motor in the prior art
  • FIG. 2 is a schematic plan view showing a magnetic alignment system of a moving coil type magnetic floating plane motor according to an embodiment of the present invention
  • FIG. 3 is a side elevational view of a magnetic coil type magnetic floating planar motor magnetic alignment system according to an embodiment of the present invention
  • FIG. 4 is a schematic diagram of an output force of a moving coil type magnetic floating plane motor according to an embodiment of the present invention
  • FIG. 5 is a flow chart of a magnetic alignment method of a moving coil type magnetic floating plane motor according to an embodiment of the present invention
  • FIG. 6 is a block diagram showing a control structure of a moving coil type magnetic floating plane motor according to an embodiment of the present invention
  • FIG. 7 is a block diagram showing a control structure of a closed loop control of a three-group coil of a moving coil type magnetic floating plane motor according to an embodiment of the present invention
  • FIG. 8 is a flow chart of a servo correction magnetic alignment angle method according to an embodiment of the present invention. detailed description
  • the magnetic coil type magnetic floating plane motor magnetic alignment system provided by the present invention, as shown in FIG. 2 to FIG. 4, includes a magnetic steel array 10, a motor mover 20, a fixed tool 30, and a force sensor 40, specifically, the magnetic steel
  • the array 10 is a two-dimensional magnetic steel array, which is composed of a plurality of magnets arranged in a two-dimensional array in X, -Y, and a plane, each magnet is placed in a direction perpendicular to the plane of the ⁇ '- ⁇ ', and adjacent The magnetic poles of the magnets are opposite, that is, for a magnet with a bungee facing up, its adjacent magnets are placed with the S pole facing up.
  • the magnetic pole array is represented by a magnetic pole pitch from the drain to the S pole, and the magnetic steel array 10 forms a magnetic field in its surrounding area.
  • the motor mover 20 is placed above the magnetic steel array 10, and includes four coil groups XI, ⁇ 2, Y1, ⁇ 2 arranged in a matrix, wherein one of each two adjacent coil groups is along the first direction (X The direction is arranged, and the other is arranged in a second direction ( ⁇ direction) perpendicular to the first direction.
  • X and X, direction, ⁇ and ⁇ the directions are respectively at an angle of 45 degrees, so that the magnetic steel array
  • the magnetic density distribution of 10 is sinusoidally distributed along the X and ⁇ directions.
  • Each coil group of the motor mover 20 is a power generating body.
  • each coil group includes a plurality of three-phase coils 21 arranged in parallel.
  • each coil group includes three three-phase coils. 21, When the three-phase coil 21 is energized, the magnetic field of the magnetic steel array 10 will exert a force on the three-phase coil 21 and drive the motor mover 20 to move.
  • the motor mover 20 In order to detect the initial magnetic alignment angle of each coil group, it is necessary to pass three-phase current into the coil group. In this case, the motor mover 20 is kept in place, and the force generated by the magnetic field on the X, Y, and ⁇ directions of the coil group at this time is accurately measured. To this end, the motor mover 20 is connected to the stationary tooling 30 which remains unchanged from the magnetic steel array 10 by a force sensor 40 capable of measuring the three axial forces of X, ⁇ , ⁇ , respectively.
  • the fixed tooling 30 adopts a frame structure and is disposed on the outer side of the magnetic steel array 10. Specifically, the magnetic steel array 10 and the fixed tooling 30 are disposed on the base 50.
  • the fixed tooling 30 has a sufficient width and height to accommodate the magnetic steel array 10 together with the motor mover 20 above it in the space enclosed by the fixed tooling 30, and the fixed tooling 30 does not contact the magnetic steel array 10. And the motor mover 20, so as not to interfere with the normal operation of the magnetic steel array 10 and the motor mover 20.
  • the force sensor 40 is a three-dimensional force sensor, that is, the three axial force measurements of X, ⁇ , and ⁇ can be realized by the one force sensor 40. In other embodiments, three one-dimensional force sensors can also be used. Make a combined measurement, or use a three-dimensional force sensor for direct measurement.
  • the force sensor 40 is connected to the motor mover 20 and the fixed tool 30, respectively, so that the position of the motor mover 20 relative to the fixed tool 30, and thus the magnetic steel array 10, remains unchanged, and on the other hand, the motor can be measured in real time.
  • the output of the motor mover 20 in three dimensions.
  • coil group XI generates horizontal force ⁇ and vertical force ⁇
  • coil group ⁇ 2 generates horizontal force and vertical force F
  • coil group Y 1 produces horizontal force Fj > and vertical force
  • coil group Y2 generates a horizontal force ⁇ 2 and a vertical force ⁇ 2 .
  • the distance between two adjacent three-phase coils 21 in each coil group is 4 3 , where ⁇ is a magnetic steel array N pole The magnetic pole distance to the S pole.
  • the arrangement direction of the magnets in the magnetic steel array 10 is at an angle of 45 degrees with the arrangement direction of the coil groups in the motor mover 20, the magnetic dense distribution of the magnetic steel array 10 is along the X/Y direction.
  • the sinusoidal distribution is such that the expression of the magnetic tightness distribution at the three-phase coil 21 of each force body is:
  • each power generating body relative to the magnetic steel array 10 Since the position of each power generating body relative to the magnetic steel array 10 is constant under the action of the fixed tool 30 and the force sensor 40, the corresponding magnetic angle is also unchanged, and in addition, for a given magnetic steel array 10 and electricity
  • the corresponding magnetic density amplitude and three-phase current amplitude i of the motor 20 are also constant. Under such conditions, the F size in the above formula (3) will only be related to the current angle in the three-phase coil 21. . Therefore, when the magnetic alignment system of the present invention is used to detect the initial magnetic alignment angle of a power generating body, it is only necessary to change the current angle in the three-phase coil 21 of the power generating body in the [- period].
  • the force sensor 40 finds the current angle at which the force output F is maximized, and the corresponding value is obtained as the initial magnetic alignment angle of the power body. The specific process will be described in detail below.
  • the invention also provides a magnetic coil type magnetic floating plane motor magnetic alignment method, which is implemented by the above-mentioned dynamic coil type magnetic floating plane motor magnetic alignment system, as shown in FIG. 5, and combined with FIG. 2 to FIG. 4, the steps thereof include :
  • the initial magnetic alignment of the coil set ends.
  • Each of the four power bodies is subjected to the above initial magnetic alignment step.
  • the force sensor 40 measures the horizontal force (X-direction or Y-direction force) in the above embodiment
  • the vertical force (Z-direction force) may be measured instead, because the vertical force is still
  • the horizontal force is equal to the position where the motor mover 20 is fixed relative to the magnetic steel array 10, the output changes sinusoidally with the change. Therefore, for the case of measuring the vertical force, the magnetic alignment angle of the coil group can be determined only by the three-phase current angle corresponding to the maximum output force of the coil group in the vertical direction.
  • the dynamic coil type magnetic floating plane motor has realized the preliminary decoupling of the horizontal output force and the vertical output of the motor, and the fixed tool 30 and the force sensor 40 can be removed at this time to make electricity
  • the motor 20 is movable relative to the magnetic steel array 10 and is capable of servo closed loop control of the motor based on the measured initial magnetic alignment angle. In the closed loop state, the magnetic alignment accuracy can be further improved by monitoring the amount of control representing the magnitude of the motor output.
  • FIG. 6 a block diagram of a six-degree-of-freedom decoupling control strategy of a moving coil type magnetic floating plane motor is shown in FIG. 6, and includes: four power generating bodies, that is, four coil groups XI, X2, Y1, and ⁇ 2; six controllers, That is, the X controller, the RX controller, the ⁇ controller, the RY controller, the ⁇ controller, and the RZ controller respectively correspond to the six logic axes X, Rx, Y, Ry, Z, Rz, and are used to respectively control the corresponding a logical axis output; and an actuator system for receiving logical axis outputs F x , F Y , F z , T ra , ⁇ ⁇ , T rz from six controllers and converting them into eight physical axes xl, zl, X2, z2, yl, z3, y2, z4 output F* X1 , F* Z1 , F* X2 ,
  • the magnetic alignment method of the moving coil type magnetic floating plane motor of the present invention further comprises a servo correction magnetic alignment angle method for further improving the magnetic alignment precision, each coil group XI of the planar motor, X2, Y1, and Y2 perform closed-loop control in a servo system, and the controller in the servo system correspondingly controls the output of the planar motor in each movement direction.
  • the steps include:
  • the target coil group is separated from the closed loop control, and the remaining three coil groups form a closed loop control, and the output of the controller is recorded as an initial offset, that is, It is said that when the magnetic angle of one of the coil groups, for example, the coil group XI, is servo-corrected, the coil group XI does not participate in the servo control, and the other three coil groups, that is, the coil groups X2, Y1, and ⁇ 2 constitute a closed loop control. Since the three power bodies can also complete the six-degree-of-freedom control of the motor, as shown in Fig.
  • the driver 1 is out of the closed-loop control
  • the block diagram of the six-degree-of-freedom decoupling control strategy of the moving coil type magnetic floating plane motor includes three powers of the motor.
  • Body ie three coil sets ⁇ 2, Yl, ⁇ 2), six logical axes (X, Rx, Y, Ry, ⁇ , Rz) and six physical axes (x2, z2, yl, z3, y2, z4) control.
  • the coil group XI can be used for further correction of the magnetic alignment angle of the power body, and the other three power control bodies are in the servo suspension state;
  • the coil group Passing three-phase current to the target coil group, the coil group is kept in place under the action of a servo system composed of the remaining three coil groups, and transforming the angle of the three-phase current in the target coil group, recording the controller at this time
  • the output is used as the actual output.
  • the three-phase current angle to the target coil set is on the basis of the initial magnetic alignment angle. Transforming within a range of -1/N magnetic alignment angle periods to +1/N magnetic alignment angle periods;
  • the coil group XI when the other three power control bodies are in the servo suspension state, the coil group XI generates an open loop vertical force by the current, and if a horizontal component is generated, Continue with the magnetic alignment angle adjustment. That is, the output of the X controller should be a fixed offset value. / (Theoretically ⁇ . / ⁇ , but due to the limitation of the alignment accuracy in the initial magnetic alignment, the vertical output of the motor suspension is coupled into the horizontal direction).
  • the vertical current i d is set to the power body not in the closed-loop control, the motor will remain in place under the servo action, and the output Fx of the X controller at this time is recorded, if Fx is not equal to the initial fixed offset value. " , then the description is not in closed loop control
  • the vertical force of the power body is coupled into the horizontal direction, that is, the magnetic alignment accuracy can be improved, so the magnetic angle needs to be continuously adjusted, preferably, according to the reading amount in the closed loop control, the determination is made.
  • the horizontal component of force generated by the coil group XI corrected by Yueliang, and then the range of magnetic angle adjustment is determined.
  • the observed magnetic offset angle of the power body is adjusted to be closest to the initial fixed offset value ⁇ .
  • the servo correction magnetic alignment angle is completed.
  • each of the power generating bodies can improve the magnetic alignment accuracy by the above-mentioned servo correction magnetic alignment angle method.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Linear Motors (AREA)
  • Control Of Linear Motors (AREA)
PCT/CN2014/071089 2013-01-25 2014-01-22 一种磁对准系统及其对准方法 Ceased WO2014114231A1 (zh)

Priority Applications (6)

Application Number Priority Date Filing Date Title
KR1020157021133A KR20150103731A (ko) 2013-01-25 2014-01-22 자기 정렬 시스템 및 그 정렬 방법
US14/758,720 US9893596B2 (en) 2013-01-25 2014-01-22 Magnetic alignment system and alignment method therefor
KR1020177024470A KR101796535B1 (ko) 2013-01-25 2014-01-22 자기 정렬 방법
JP2015551119A JP6219968B2 (ja) 2013-01-25 2014-01-22 磁気アライメントシステム及び磁気アライメント方法
SG11201505237UA SG11201505237UA (en) 2013-01-25 2014-01-22 Magnetic alignment system and alignment method therefor
EP14743517.6A EP2950441B1 (en) 2013-01-25 2014-01-22 Magnetic alignment system and alignment method therefor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201310030302.9A CN103973172B (zh) 2013-01-25 2013-01-25 一种动线圈式磁浮平面电机磁对准系统及其对准方法
CN201310030302.9 2013-01-25

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WO2014114231A1 true WO2014114231A1 (zh) 2014-07-31

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US (1) US9893596B2 (enExample)
EP (1) EP2950441B1 (enExample)
JP (1) JP6219968B2 (enExample)
KR (2) KR20150103731A (enExample)
CN (1) CN103973172B (enExample)
SG (1) SG11201505237UA (enExample)
TW (1) TW201440413A (enExample)
WO (1) WO2014114231A1 (enExample)

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EP2950441A4 (en) 2016-11-23
KR20170103041A (ko) 2017-09-12
CN103973172A (zh) 2014-08-06
SG11201505237UA (en) 2015-08-28
JP6219968B2 (ja) 2017-10-25
JP2016504009A (ja) 2016-02-08
EP2950441B1 (en) 2018-03-14
CN103973172B (zh) 2016-09-28
US20150340931A1 (en) 2015-11-26
US9893596B2 (en) 2018-02-13
EP2950441A1 (en) 2015-12-02
TWI513173B (enExample) 2015-12-11
TW201440413A (zh) 2014-10-16
KR20150103731A (ko) 2015-09-11
KR101796535B1 (ko) 2017-11-10

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