CN103973172B - 一种动线圈式磁浮平面电机磁对准系统及其对准方法 - Google Patents

一种动线圈式磁浮平面电机磁对准系统及其对准方法 Download PDF

Info

Publication number
CN103973172B
CN103973172B CN201310030302.9A CN201310030302A CN103973172B CN 103973172 B CN103973172 B CN 103973172B CN 201310030302 A CN201310030302 A CN 201310030302A CN 103973172 B CN103973172 B CN 103973172B
Authority
CN
China
Prior art keywords
coil groups
magnetic alignment
magnetic
angle
planar motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201310030302.9A
Other languages
English (en)
Chinese (zh)
Other versions
CN103973172A (zh
Inventor
张霖
张晓文
郭琳
陈军
张志钢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Micro Electronics Equipment Co Ltd
Original Assignee
Shanghai Micro Electronics Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to CN201310030302.9A priority Critical patent/CN103973172B/zh
Application filed by Shanghai Micro Electronics Equipment Co Ltd filed Critical Shanghai Micro Electronics Equipment Co Ltd
Priority to JP2015551119A priority patent/JP6219968B2/ja
Priority to KR1020157021133A priority patent/KR20150103731A/ko
Priority to US14/758,720 priority patent/US9893596B2/en
Priority to KR1020177024470A priority patent/KR101796535B1/ko
Priority to SG11201505237UA priority patent/SG11201505237UA/en
Priority to EP14743517.6A priority patent/EP2950441B1/en
Priority to PCT/CN2014/071089 priority patent/WO2014114231A1/zh
Priority to TW103102435A priority patent/TW201440413A/zh
Publication of CN103973172A publication Critical patent/CN103973172A/zh
Application granted granted Critical
Publication of CN103973172B publication Critical patent/CN103973172B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22—Rotating parts of the magnetic circuit
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K15/00—Processes or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines
    • H02K15/02—Processes or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines of stator or rotor bodies
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49014—Superconductor

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Linear Motors (AREA)
  • Control Of Linear Motors (AREA)
CN201310030302.9A 2013-01-25 2013-01-25 一种动线圈式磁浮平面电机磁对准系统及其对准方法 Active CN103973172B (zh)

Priority Applications (9)

Application Number Priority Date Filing Date Title
CN201310030302.9A CN103973172B (zh) 2013-01-25 2013-01-25 一种动线圈式磁浮平面电机磁对准系统及其对准方法
KR1020157021133A KR20150103731A (ko) 2013-01-25 2014-01-22 자기 정렬 시스템 및 그 정렬 방법
US14/758,720 US9893596B2 (en) 2013-01-25 2014-01-22 Magnetic alignment system and alignment method therefor
KR1020177024470A KR101796535B1 (ko) 2013-01-25 2014-01-22 자기 정렬 방법
JP2015551119A JP6219968B2 (ja) 2013-01-25 2014-01-22 磁気アライメントシステム及び磁気アライメント方法
SG11201505237UA SG11201505237UA (en) 2013-01-25 2014-01-22 Magnetic alignment system and alignment method therefor
EP14743517.6A EP2950441B1 (en) 2013-01-25 2014-01-22 Magnetic alignment system and alignment method therefor
PCT/CN2014/071089 WO2014114231A1 (zh) 2013-01-25 2014-01-22 一种磁对准系统及其对准方法
TW103102435A TW201440413A (zh) 2013-01-25 2014-01-23 磁對準系統及其對準方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310030302.9A CN103973172B (zh) 2013-01-25 2013-01-25 一种动线圈式磁浮平面电机磁对准系统及其对准方法

Publications (2)

Publication Number Publication Date
CN103973172A CN103973172A (zh) 2014-08-06
CN103973172B true CN103973172B (zh) 2016-09-28

Family

ID=51226935

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310030302.9A Active CN103973172B (zh) 2013-01-25 2013-01-25 一种动线圈式磁浮平面电机磁对准系统及其对准方法

Country Status (8)

Country Link
US (1) US9893596B2 (enExample)
EP (1) EP2950441B1 (enExample)
JP (1) JP6219968B2 (enExample)
KR (2) KR20150103731A (enExample)
CN (1) CN103973172B (enExample)
SG (1) SG11201505237UA (enExample)
TW (1) TW201440413A (enExample)
WO (1) WO2014114231A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106533274A (zh) * 2015-09-11 2017-03-22 德昌电机(深圳)有限公司 电动工具
DE102015222482A1 (de) * 2015-11-13 2017-05-18 Physik Instrumente (Pi) Gmbh & Co. Kg Planar-Positioniervorrichtung und Positioniertisch
CN105871257B (zh) * 2016-05-05 2017-11-17 江苏大学 一种动圈式磁悬浮永磁平面电机的转矩电流分配方法
CN106292736A (zh) * 2016-08-19 2017-01-04 联想(北京)有限公司 一种控制方法、控制器及电子设备
CN109728752B (zh) * 2017-10-31 2020-04-10 上海微电子装备（集团）股份有限公司 一种磁对准方法及一种磁浮电机
DE102018209403A1 (de) * 2018-06-13 2019-12-19 Robert Bosch Gmbh Aus Unterbaugruppen zusammengesetzte Bewegungsvorrichtung
CN111490642B (zh) * 2019-01-29 2022-05-20 苏州隐冠半导体技术有限公司 一种基于霍尔效应传感器和平面电机的位移装置
CN111835177A (zh) * 2019-04-17 2020-10-27 上海微电子装备（集团）股份有限公司 磁浮电机及其控制方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11153136A (ja) * 1997-11-18 1999-06-08 Nippon Seiko Kk 超電導磁気軸受の浮上力計算法及び装置並びに記録媒体
US6128174A (en) * 1997-08-29 2000-10-03 Stereotaxis, Inc. Method and apparatus for rapidly changing a magnetic field produced by electromagnets
CN102739122A (zh) * 2012-07-09 2012-10-17 哈尔滨工业大学 双边初级结构磁悬浮平面电机
CN102801369A (zh) * 2012-07-12 2012-11-28 清华大学 一种基于双台交换系统的电流环辅助整定装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04285878A (ja) * 1991-03-14 1992-10-09 Meidensha Corp リニア誘導モータの特性算定方式
JP4295883B2 (ja) * 1999-12-13 2009-07-15 株式会社ワコー 力検出装置
US7134349B2 (en) * 2003-07-08 2006-11-14 Board Of Trustees Operating Michigan State University Micro-force sensing system
US7205741B2 (en) * 2004-06-24 2007-04-17 Asml Netherlands B.V. Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing method
JP2007068256A (ja) * 2005-08-29 2007-03-15 Canon Inc ステージ装置の制御方法
DE102006035676A1 (de) * 2006-07-31 2008-02-14 Siemens Ag Linearmotor mit Kraftwelligkeitsausgleich
CN101610054B (zh) * 2009-07-21 2011-02-16 清华大学 采用三维永磁阵列的平面电机
CN101750187B (zh) * 2010-01-19 2011-04-06 清华大学 一种基于磁钢阵列的运动平台二维定位方法
US9465305B2 (en) * 2010-05-18 2016-10-11 Nikon Corporation Method for determining a commutation offset and for determining a compensation map for a stage
JP2012002554A (ja) * 2010-06-15 2012-01-05 Kumamoto Univ ３次元ロードセル
JP5864878B2 (ja) 2011-03-30 2016-02-17 本田技研工業株式会社 自動二輪車
CN102607388B (zh) 2012-02-17 2014-09-24 清华大学 平面电机动子位移测量装置及方法
CN102800368B (zh) * 2012-07-12 2014-08-13 清华大学 一种气浮平面电机初始零位的定位方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6128174A (en) * 1997-08-29 2000-10-03 Stereotaxis, Inc. Method and apparatus for rapidly changing a magnetic field produced by electromagnets
JPH11153136A (ja) * 1997-11-18 1999-06-08 Nippon Seiko Kk 超電導磁気軸受の浮上力計算法及び装置並びに記録媒体
CN102739122A (zh) * 2012-07-09 2012-10-17 哈尔滨工业大学 双边初级结构磁悬浮平面电机
CN102801369A (zh) * 2012-07-12 2012-11-28 清华大学 一种基于双台交换系统的电流环辅助整定装置

Also Published As

Publication number Publication date
EP2950441A4 (en) 2016-11-23
WO2014114231A1 (zh) 2014-07-31
KR20170103041A (ko) 2017-09-12
CN103973172A (zh) 2014-08-06
SG11201505237UA (en) 2015-08-28
JP6219968B2 (ja) 2017-10-25
JP2016504009A (ja) 2016-02-08
EP2950441B1 (en) 2018-03-14
US20150340931A1 (en) 2015-11-26
US9893596B2 (en) 2018-02-13
EP2950441A1 (en) 2015-12-02
TWI513173B (enExample) 2015-12-11
TW201440413A (zh) 2014-10-16
KR20150103731A (ko) 2015-09-11
KR101796535B1 (ko) 2017-11-10

Similar Documents

Publication Publication Date Title
CN103973172B (zh) 一种动线圈式磁浮平面电机磁对准系统及其对准方法
CN103425100B (zh) 基于力矩平衡的机器人直接示教控制方法
CN103076131B (zh) 用于测量大型机械臂大力与小力矩的六维力与力矩传感器
CN102759900B (zh) 一种机床主轴热误差的测试系统及测试方法
CN101398316B (zh) 一种电机转子位置传感器的标定方法
CN115319727B (zh) 一种基于位姿约束和力感知的机器人标定方法
CN115560659B (zh) 差分电容位移传感器的标定方法
CN108334029A (zh) 嵌入误差补偿功能的数控机床设备及其补偿方法
CN102126162B (zh) 一种数控机床加工在线测量方法
CN106125574A (zh) 基于dpi模型的压电陶瓷微定位平台建模方法
CN102607391B (zh) 一种平面电机动子位移的测量方法
CN105068564A (zh) 一种压电陶瓷作动器的位移控制方法
CN103411624A (zh) 基于微动平台的磁跟踪系统的磁场源标定方法及系统
CN101820240B (zh) 一种基于球面规划的永磁球形电动机定子绕组通电方法
CN102022974A (zh) 一种磁感应效应角度传感器的标定方法
CN101800502B (zh) 一种磁悬浮精密运动定位平台的解耦控制方法
CN107356523B (zh) 基于离散切线刚度估计的实时混合模拟试验反馈力修正方法
CN103091041A (zh) 一种基于位置恢复原理的静平衡测量系统及测量方法
CN101344547A (zh) 非对称组合电极结构的电容成像传感器
CN106289208A (zh) 一种基于非线性自适应算法的磁轴承系统惯性轴辨识方法
CN105068032A (zh) 一种光伏汇流箱电流采集通道温度漂移系数的校准方法
CN104079209A (zh) 抗线圈干扰的磁浮平面电机初始化位置检测系统及方法
Li et al. Micro-disturbance compensation method for ultralow frequency vibration waveform of electromagnetic vibrator
CN205049331U (zh) 一种测试电涡流阻尼器旋转阻尼系数的装置
CN112762807A (zh) 平面电机动子位移测量方法及装置

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CP01 Change in the name or title of a patent holder
CP01 Change in the name or title of a patent holder

Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai

Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd

Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai

Patentee before: Shanghai Micro Electronics Equipment Co., Ltd.