TW201440413A - 磁對準系統及其對準方法 - Google Patents

磁對準系統及其對準方法 Download PDF

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Publication number
TW201440413A
TW201440413A TW103102435A TW103102435A TW201440413A TW 201440413 A TW201440413 A TW 201440413A TW 103102435 A TW103102435 A TW 103102435A TW 103102435 A TW103102435 A TW 103102435A TW 201440413 A TW201440413 A TW 201440413A
Authority
TW
Taiwan
Prior art keywords
magnetic
angle
magnetic alignment
coil
force sensor
Prior art date
Application number
TW103102435A
Other languages
English (en)
Chinese (zh)
Other versions
TWI513173B (enExample
Inventor
Lin Zhang
xiao-wen Zhang
Lin Guo
Jun Chen
zhi-gang Zhang
Original Assignee
Shanghai Microelectronics Equi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Microelectronics Equi filed Critical Shanghai Microelectronics Equi
Publication of TW201440413A publication Critical patent/TW201440413A/zh
Application granted granted Critical
Publication of TWI513173B publication Critical patent/TWI513173B/zh

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22—Rotating parts of the magnetic circuit
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K15/00—Processes or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines
    • H02K15/02—Processes or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines of stator or rotor bodies
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49014—Superconductor

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Linear Motors (AREA)
  • Control Of Linear Motors (AREA)
TW103102435A 2013-01-25 2014-01-23 磁對準系統及其對準方法 TW201440413A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310030302.9A CN103973172B (zh) 2013-01-25 2013-01-25 一种动线圈式磁浮平面电机磁对准系统及其对准方法

Publications (2)

Publication Number Publication Date
TW201440413A true TW201440413A (zh) 2014-10-16
TWI513173B TWI513173B (enExample) 2015-12-11

Family

ID=51226935

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103102435A TW201440413A (zh) 2013-01-25 2014-01-23 磁對準系統及其對準方法

Country Status (8)

Country Link
US (1) US9893596B2 (enExample)
EP (1) EP2950441B1 (enExample)
JP (1) JP6219968B2 (enExample)
KR (2) KR20150103731A (enExample)
CN (1) CN103973172B (enExample)
SG (1) SG11201505237UA (enExample)
TW (1) TW201440413A (enExample)
WO (1) WO2014114231A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI741563B (zh) * 2019-04-17 2021-10-01 大陸商上海微電子裝備（集團）股份有限公司 磁浮電機及其控制方法

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CN106533274A (zh) * 2015-09-11 2017-03-22 德昌电机(深圳)有限公司 电动工具
DE102015222482A1 (de) * 2015-11-13 2017-05-18 Physik Instrumente (Pi) Gmbh & Co. Kg Planar-Positioniervorrichtung und Positioniertisch
CN105871257B (zh) * 2016-05-05 2017-11-17 江苏大学 一种动圈式磁悬浮永磁平面电机的转矩电流分配方法
CN106292736A (zh) * 2016-08-19 2017-01-04 联想(北京)有限公司 一种控制方法、控制器及电子设备
CN109728752B (zh) * 2017-10-31 2020-04-10 上海微电子装备（集团）股份有限公司 一种磁对准方法及一种磁浮电机
DE102018209403A1 (de) * 2018-06-13 2019-12-19 Robert Bosch Gmbh Aus Unterbaugruppen zusammengesetzte Bewegungsvorrichtung
CN111490642B (zh) * 2019-01-29 2022-05-20 苏州隐冠半导体技术有限公司 一种基于霍尔效应传感器和平面电机的位移装置

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JPH04285878A (ja) * 1991-03-14 1992-10-09 Meidensha Corp リニア誘導モータの特性算定方式
US6128174A (en) * 1997-08-29 2000-10-03 Stereotaxis, Inc. Method and apparatus for rapidly changing a magnetic field produced by electromagnets
JPH11153136A (ja) * 1997-11-18 1999-06-08 Nippon Seiko Kk 超電導磁気軸受の浮上力計算法及び装置並びに記録媒体
JP4295883B2 (ja) * 1999-12-13 2009-07-15 株式会社ワコー 力検出装置
US7134349B2 (en) * 2003-07-08 2006-11-14 Board Of Trustees Operating Michigan State University Micro-force sensing system
US7205741B2 (en) * 2004-06-24 2007-04-17 Asml Netherlands B.V. Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing method
JP2007068256A (ja) * 2005-08-29 2007-03-15 Canon Inc ステージ装置の制御方法
DE102006035676A1 (de) * 2006-07-31 2008-02-14 Siemens Ag Linearmotor mit Kraftwelligkeitsausgleich
CN101610054B (zh) * 2009-07-21 2011-02-16 清华大学 采用三维永磁阵列的平面电机
CN101750187B (zh) * 2010-01-19 2011-04-06 清华大学 一种基于磁钢阵列的运动平台二维定位方法
US9465305B2 (en) * 2010-05-18 2016-10-11 Nikon Corporation Method for determining a commutation offset and for determining a compensation map for a stage
JP2012002554A (ja) * 2010-06-15 2012-01-05 Kumamoto Univ ３次元ロードセル
JP5864878B2 (ja) 2011-03-30 2016-02-17 本田技研工業株式会社 自動二輪車
CN102607388B (zh) 2012-02-17 2014-09-24 清华大学 平面电机动子位移测量装置及方法
CN102739122B (zh) * 2012-07-09 2014-11-26 哈尔滨工业大学 双边初级结构磁悬浮平面电机
CN102801369B (zh) * 2012-07-12 2015-05-20 清华大学 一种基于双台交换系统的电流环辅助整定装置
CN102800368B (zh) * 2012-07-12 2014-08-13 清华大学 一种气浮平面电机初始零位的定位方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI741563B (zh) * 2019-04-17 2021-10-01 大陸商上海微電子裝備（集團）股份有限公司 磁浮電機及其控制方法

Also Published As

Publication number Publication date
EP2950441A4 (en) 2016-11-23
WO2014114231A1 (zh) 2014-07-31
KR20170103041A (ko) 2017-09-12
CN103973172A (zh) 2014-08-06
SG11201505237UA (en) 2015-08-28
JP6219968B2 (ja) 2017-10-25
JP2016504009A (ja) 2016-02-08
EP2950441B1 (en) 2018-03-14
CN103973172B (zh) 2016-09-28
US20150340931A1 (en) 2015-11-26
US9893596B2 (en) 2018-02-13
EP2950441A1 (en) 2015-12-02
TWI513173B (enExample) 2015-12-11
KR20150103731A (ko) 2015-09-11
KR101796535B1 (ko) 2017-11-10

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