SG11201505237UA - Magnetic alignment system and alignment method therefor - Google Patents

Magnetic alignment system and alignment method therefor

Info

Publication number
SG11201505237UA
SG11201505237UA SG11201505237UA SG11201505237UA SG11201505237UA SG 11201505237U A SG11201505237U A SG 11201505237UA SG 11201505237U A SG11201505237U A SG 11201505237UA SG 11201505237U A SG11201505237U A SG 11201505237UA SG 11201505237U A SG11201505237U A SG 11201505237UA
Authority
SG
Singapore
Prior art keywords
alignment
method therefor
magnetic
alignment system
alignment method
Prior art date
Application number
SG11201505237UA
Inventor
Lin Zhang
Xiaowen Zhang
Lin Guo
Jun Chen
Zhigang Zhang
Original Assignee
Shanghai Microelectronics Equi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Microelectronics Equi filed Critical Shanghai Microelectronics Equi
Publication of SG11201505237UA publication Critical patent/SG11201505237UA/en

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22—Rotating parts of the magnetic circuit
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K15/00—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines
    • H02K15/02—Methods or apparatus specially adapted for manufacturing, assembling, maintaining or repairing of dynamo-electric machines of stator or rotor bodies
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49014—Superconductor

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Linear Motors (AREA)
  • Control Of Linear Motors (AREA)
SG11201505237UA 2013-01-25 2014-01-22 Magnetic alignment system and alignment method therefor SG11201505237UA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201310030302.9A CN103973172B (en) 2013-01-25 2013-01-25 A kind of moving-wire ring type levitation planar motor magnetic is to Barebone and alignment methods thereof
PCT/CN2014/071089 WO2014114231A1 (en) 2013-01-25 2014-01-22 Magnetic alignment system and alignment method therefor

Publications (1)

Publication Number Publication Date
SG11201505237UA true SG11201505237UA (en) 2015-08-28

Family

ID=51226935

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201505237UA SG11201505237UA (en) 2013-01-25 2014-01-22 Magnetic alignment system and alignment method therefor

Country Status (8)

Country Link
US (1) US9893596B2 (en)
EP (1) EP2950441B1 (en)
JP (1) JP6219968B2 (en)
KR (2) KR20150103731A (en)
CN (1) CN103973172B (en)
SG (1) SG11201505237UA (en)
TW (1) TW201440413A (en)
WO (1) WO2014114231A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106533281A (en) * 2015-09-11 2017-03-22 德昌电机(深圳)有限公司 Electric tool and motor driving circuit thereof
DE102015222482A1 (en) * 2015-11-13 2017-05-18 Physik Instrumente (Pi) Gmbh & Co. Kg Planar positioning device and positioning table
CN105871257B (en) * 2016-05-05 2017-11-17 江苏大学 A kind of torque current distribution method of moving-coil type magnetic suspension permanent magnet planar motor
CN106292736A (en) * 2016-08-19 2017-01-04 联想(北京)有限公司 A kind of control method, controller and electronic equipment
CN109728752B (en) * 2017-10-31 2020-04-10 上海微电子装备（集团）股份有限公司 Magnetic alignment method and magnetic suspension motor
CN111490642B (en) * 2019-01-29 2022-05-20 苏州隐冠半导体技术有限公司 Displacement device based on Hall effect sensor and planar motor
CN111835177A (en) * 2019-04-17 2020-10-27 上海微电子装备（集团）股份有限公司 Magnetic suspension motor and control method thereof

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04285878A (en) * 1991-03-14 1992-10-09 Meidensha Corp Apparatus for calculating characteristics of linear induction motor
US6128174A (en) * 1997-08-29 2000-10-03 Stereotaxis, Inc. Method and apparatus for rapidly changing a magnetic field produced by electromagnets
JPH11153136A (en) * 1997-11-18 1999-06-08 Nippon Seiko Kk Calculation method, device and recording medium for floating force of superconductive magnetic bearing
JP4295883B2 (en) * 1999-12-13 2009-07-15 株式会社ワコー Force detection device
US7134349B2 (en) * 2003-07-08 2006-11-14 Board Of Trustees Operating Michigan State University Micro-force sensing system
US7205741B2 (en) * 2004-06-24 2007-04-17 Asml Netherlands B.V. Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing method
JP2007068256A (en) * 2005-08-29 2007-03-15 Canon Inc Method of controlling stage device
DE102006035676A1 (en) 2006-07-31 2008-02-14 Siemens Ag Linear motor with force ripple compensation
CN101610054B (en) * 2009-07-21 2011-02-16 清华大学 Planar motor adopting three-dimensional permanent magnet array
CN101750187B (en) * 2010-01-19 2011-04-06 清华大学 Two-dimensional location method of moving platform based on magnetic steel array
US9465305B2 (en) * 2010-05-18 2016-10-11 Nikon Corporation Method for determining a commutation offset and for determining a compensation map for a stage
JP2012002554A (en) 2010-06-15 2012-01-05 Kumamoto Univ Three dimensional load cell
JP5864878B2 (en) 2011-03-30 2016-02-17 本田技研工業株式会社 Motorcycle
CN102607388B (en) * 2012-02-17 2014-09-24 清华大学 Rotor displacement measurement device and method for planar motor
CN102739122B (en) * 2012-07-09 2014-11-26 哈尔滨工业大学 Magnetic suspension flat motor with primary structure on both sides
CN102800368B (en) * 2012-07-12 2014-08-13 清华大学 Positioning method of initial zero position of air floatation planar motor
CN102801369B (en) * 2012-07-12 2015-05-20 清华大学 Auxiliary current loop setting device based on double-table exchange system

Also Published As

Publication number Publication date
WO2014114231A1 (en) 2014-07-31
US20150340931A1 (en) 2015-11-26
CN103973172B (en) 2016-09-28
EP2950441B1 (en) 2018-03-14
TWI513173B (en) 2015-12-11
TW201440413A (en) 2014-10-16
KR20170103041A (en) 2017-09-12
KR101796535B1 (en) 2017-11-10
US9893596B2 (en) 2018-02-13
JP6219968B2 (en) 2017-10-25
EP2950441A4 (en) 2016-11-23
JP2016504009A (en) 2016-02-08
KR20150103731A (en) 2015-09-11
CN103973172A (en) 2014-08-06
EP2950441A1 (en) 2015-12-02

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