JP6218403B2 - 電界放射型電子銃を備えたx線管及びそれを用いたx線検査装置 - Google Patents
電界放射型電子銃を備えたx線管及びそれを用いたx線検査装置 Download PDFInfo
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- JP6218403B2 JP6218403B2 JP2013053576A JP2013053576A JP6218403B2 JP 6218403 B2 JP6218403 B2 JP 6218403B2 JP 2013053576 A JP2013053576 A JP 2013053576A JP 2013053576 A JP2013053576 A JP 2013053576A JP 6218403 B2 JP6218403 B2 JP 6218403B2
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- 238000007689 inspection Methods 0.000 title claims description 43
- 238000010894 electron beam technology Methods 0.000 claims description 77
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- 230000005540 biological transmission Effects 0.000 claims description 10
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- 239000012212 insulator Substances 0.000 description 10
- 239000007789 gas Substances 0.000 description 8
- 108010083687 Ion Pumps Proteins 0.000 description 7
- 238000001816 cooling Methods 0.000 description 7
- 238000005219 brazing Methods 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
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- 230000004075 alteration Effects 0.000 description 5
- 201000009310 astigmatism Diseases 0.000 description 5
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- 239000000463 material Substances 0.000 description 5
- 238000007789 sealing Methods 0.000 description 5
- 239000000047 product Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
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- 229910000986 non-evaporable getter Inorganic materials 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000008569 process Effects 0.000 description 2
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- 238000003466 welding Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 102000006391 Ion Pumps Human genes 0.000 description 1
- 229910025794 LaB6 Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
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- 230000002411 adverse Effects 0.000 description 1
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- 229910000963 austenitic stainless steel Inorganic materials 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 239000012472 biological sample Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
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- 230000005284 excitation Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000002594 fluoroscopy Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
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- 239000007787 solid Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
- H01J35/147—Spot size control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
- H01J35/153—Spot position control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
- H01J35/30—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by deflection of the cathode ray
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
- G01N23/044—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using laminography or tomosynthesis
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/12—Cooling
- H01J2235/1204—Cooling of the anode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
- H01J35/116—Transmissive anodes
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Description
2:X線管 X-ray tube
3:X線検出器 X-ray detector
4:試料 sample
5:試料ステージ sample stage
6:装置制御部 apparatus control section
7:CT装置制御部 CT-apparatus control section
8:X線CT装置 X-ray CT apparatus
11:真空管球部 vacuum tube section
12:電子銃室 electron gun chamber
13:電子銃 electron gun
14:絶縁碍子部 insulator section
15:高圧ケーブル high-tension cable
16:電子源 electron source
17:電子ビーム electron beam
18:アノード anode
19:ライナーチューブ部 liner tube section
20:上部ライナーチューブ upper liner tube
21:下部ライナーチューブ lower liner tube
22:嵌合部A fitting section
23:X線ターゲット X-ray target
24:ターゲット支持体 target supporting body
25:ターゲットホルダ target holder
26:真空ポート vacuum port
27:真空ポンプ vacuum pump
28:磁界電子レンズ部 electron magnetic lens section
31:磁極穴 hole of magnetic polepiece
32:第1の電子レンズ first electron lens
33:第1の電子レンズ上極 first upper magnetic polepiece
34:第1の電子レンズ下極 first lower magnetic polepiece
35:第2の電子レンズ second electron lens
36:第2の電子レンズ上極 second upper magnetic polepiece
37:第2の電子レンズ下極 second lower magnetic polepiece
38:嵌合部B fitting section
39:走査コイル scanning coil
40:電子線絞り electron beam aperture
41:散乱線絞り scattered radiation aperture
42:反射電子検出電極 backscattered electron detecting electrode
43:リード線 lead line
44:検出端子支持部材 detecting-terminal supporting member
45:ロー付け brazing
46:メタルOリング metal O-ring
47:X線源 X-ray source
48:X線ビーム X-ray beam
49:反射電子検出部 backscattered electron detecting section
50:反射電子backscattered electron
51:非点補正子 Stigmator
52:嵌合部C fitting section
53:嵌合部D fitting section
54:冷却部ヒートシンク heat sink
Claims (6)
- 電子ビームを発生する電界放射型電子銃を備えた電子銃室と、
前記電子ビームを集束する磁界電子レンズ部と、
前記電子ビームを絞る電子線絞りと、
前記電子ビームの照射によりX線を発生させるX線ターゲットと、
前記電子銃室及び前記X線ターゲットを配置したライナーチューブ部と、
前記電子銃室を超高真空に排気する真空ポンプとを備え、
前記電子銃室、前記電子線絞り、前記X線ターゲット、前記ライナーチューブ部及び前記真空ポンプは一体的に真空封止されて成る真空管球部を構成し、前記真空管球部は前記磁界電子レンズ部から着脱可能な構成であり、
前記ライナーチューブ部は、上部ライナーチューブと下部ライナーチューブの上下に2分割できるように構成され、前記上部ライナーチューブと前記下部ライナーチューブの分割部分の真空シールには、温度制限のある部品を有せず、
前記真空シールは、メタルOリング又は高温耐熱のOリングとし、
前記真空管球部を200℃以上の高温でのベーキングを可能とすることを特徴とするX線管。 - 前記ライナーチューブ部に設けた第1の嵌合部と
前記磁界電子レンズ部に設けた第2の嵌合部とを嵌合することにより、
前記真空管球部の光学軸と前記磁界電子レンズ部の光学軸とを軸合わせする構成である請求項1に記載のX線管。 - 前記ライナーチューブ部は、前記ライナーチューブ部の長さ方向に複数に分割可能な構成である請求項1又は2に記載のX線管。
- 前記磁界電子レンズ部は更に前記電子ビームを前記X線ターゲット上で走査する走査コイルを備え、
前記ライナーチューブ部は前記X線ターゲットで反射する電子線を検出する反射電子検出部を備えることにより、
前記X線ターゲットの表面の反射電子像を観察可能としている請求項1〜3のいずれか1項に記載のX線管。 - 前記磁界電子レンズ部は前記電界放射型電子銃に最も近い側に、
上極ポールピースの内径が下極ポールピースの内径よりも大きい第1の電子レンズを備え、
磁界重畳型電子銃を構成する請求項1〜4のいずれか1項に記載のX線管。 - 請求項1〜5のいずれか1項に記載のX線管と、
試料ステージと、
前記試料ステージを透過した試料のX線透過画像を検出するX線検出器とを備えたことを特徴とするX線検査装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013053576A JP6218403B2 (ja) | 2013-03-15 | 2013-03-15 | 電界放射型電子銃を備えたx線管及びそれを用いたx線検査装置 |
US14/197,482 US20140270071A1 (en) | 2013-03-15 | 2014-03-05 | X-ray tube comprising field emission type electron gun and x-ray inspection apparatus using the same |
EP14159162.8A EP2779203A3 (en) | 2013-03-15 | 2014-03-12 | X-ray tube comprising field emission type electron gun and X-ray inspection apparatus using the same |
US15/359,946 US9984847B2 (en) | 2013-03-15 | 2016-11-23 | Open-type X-ray tube comprising field emission type electron gun and X-ray inspection apparatus using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013053576A JP6218403B2 (ja) | 2013-03-15 | 2013-03-15 | 電界放射型電子銃を備えたx線管及びそれを用いたx線検査装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2014179281A JP2014179281A (ja) | 2014-09-25 |
JP2014179281A5 JP2014179281A5 (ja) | 2016-04-28 |
JP6218403B2 true JP6218403B2 (ja) | 2017-10-25 |
Family
ID=50289396
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2013053576A Active JP6218403B2 (ja) | 2013-03-15 | 2013-03-15 | 電界放射型電子銃を備えたx線管及びそれを用いたx線検査装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20140270071A1 (ja) |
EP (1) | EP2779203A3 (ja) |
JP (1) | JP6218403B2 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10663412B2 (en) * | 2014-12-03 | 2020-05-26 | Total Sa | Device for analyzing a fluid in a sample of porous medium, and corresponding method |
CN105140088B (zh) * | 2015-07-24 | 2017-10-17 | 北京航空航天大学 | 大束流电子束打靶微束斑x射线源的聚焦装置及其使用方法 |
US10453643B2 (en) | 2016-03-30 | 2019-10-22 | Moxtek, Inc. | Shielded, transmission-target, x-ray tube |
JP6864888B2 (ja) * | 2016-07-15 | 2021-04-28 | 株式会社リガク | X線検査装置、x線薄膜検査方法およびロッキングカーブ測定方法 |
CN109791864A (zh) * | 2016-09-21 | 2019-05-21 | 株式会社岛津制作所 | X射线管 |
DE102016013747B4 (de) * | 2016-11-18 | 2018-05-30 | Yxlon International Gmbh | Blende für eine Röntgenröhre und Röntgenröhre mit einer solchen Blende |
US11315751B2 (en) * | 2019-04-25 | 2022-04-26 | The Boeing Company | Electromagnetic X-ray control |
WO2022223055A1 (en) * | 2021-09-03 | 2022-10-27 | Focus E-Beam Technology Pte. Ltd. | Target assembly and x-ray microscope |
CN113984813B (zh) * | 2021-09-27 | 2024-07-26 | 上海大学 | 一种高通量薄膜晶体结构表征装置及方法 |
CN115616017B (zh) * | 2022-09-30 | 2023-11-10 | 南方科技大学 | 一种电子光学测试平台装置 |
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JPH071681B2 (ja) * | 1990-04-19 | 1995-01-11 | 株式会社日立製作所 | 荷電粒子線装置 |
JP3191554B2 (ja) * | 1994-03-18 | 2001-07-23 | 株式会社日立製作所 | X線撮像装置 |
US5892809A (en) * | 1997-09-10 | 1999-04-06 | Wittry; David B. | Simplified system for local excitation by monochromatic x-rays |
JP3900792B2 (ja) * | 2000-04-26 | 2007-04-04 | 株式会社日立製作所 | 電子銃 |
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JP4029209B2 (ja) | 2002-10-17 | 2008-01-09 | 株式会社東研 | 高分解能x線顕微検査装置 |
JP3998556B2 (ja) * | 2002-10-17 | 2007-10-31 | 株式会社東研 | 高分解能x線顕微検査装置 |
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JP4751635B2 (ja) | 2005-04-13 | 2011-08-17 | 株式会社日立ハイテクノロジーズ | 磁界重畳型電子銃 |
JP5458472B2 (ja) * | 2007-03-20 | 2014-04-02 | 株式会社島津製作所 | X線管 |
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JP2011113705A (ja) * | 2009-11-25 | 2011-06-09 | Toshiba Corp | X線管 |
CN102110566B (zh) * | 2009-12-24 | 2012-08-22 | 江苏天瑞仪器股份有限公司 | X射线管 |
JP5769242B2 (ja) * | 2010-07-30 | 2015-08-26 | 株式会社リガク | 工業用x線管 |
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-
2013
- 2013-03-15 JP JP2013053576A patent/JP6218403B2/ja active Active
-
2014
- 2014-03-05 US US14/197,482 patent/US20140270071A1/en not_active Abandoned
- 2014-03-12 EP EP14159162.8A patent/EP2779203A3/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
JP2014179281A (ja) | 2014-09-25 |
EP2779203A2 (en) | 2014-09-17 |
EP2779203A3 (en) | 2017-09-27 |
US20140270071A1 (en) | 2014-09-18 |
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