JP6218403B2 - 電界放射型電子銃を備えたｘ線管及びそれを用いたｘ線検査装置 - Google Patents

電界放射型電子銃を備えたｘ線管及びそれを用いたｘ線検査装置 Download PDF

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Publication number
JP6218403B2
JP6218403B2 JP2013053576A JP2013053576A JP6218403B2 JP 6218403 B2 JP6218403 B2 JP 6218403B2 JP 2013053576 A JP2013053576 A JP 2013053576A JP 2013053576 A JP2013053576 A JP 2013053576A JP 6218403 B2 JP6218403 B2 JP 6218403B2
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Japan
Prior art keywords
ray
electron
tube
vacuum
electron gun
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JP2013053576A
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English (en)
Japanese (ja)
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JP2014179281A (ja
JP2014179281A5 (enExample
Inventor
畊平 代田
畊平 代田
勝利 南
勝利 南
健司 大橋
健司 大橋
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Mars Tohken Solution Co Ltd
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Mars Tohken Solution Co Ltd
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Publication date
Application filed by Mars Tohken Solution Co Ltd filed Critical Mars Tohken Solution Co Ltd
Priority to JP2013053576A priority Critical patent/JP6218403B2/ja
Priority to US14/197,482 priority patent/US20140270071A1/en
Priority to EP14159162.8A priority patent/EP2779203A3/en
Publication of JP2014179281A publication Critical patent/JP2014179281A/ja
Publication of JP2014179281A5 publication Critical patent/JP2014179281A5/ja
Priority to US15/359,946 priority patent/US9984847B2/en
Application granted granted Critical
Publication of JP6218403B2 publication Critical patent/JP6218403B2/ja
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/153—Spot position control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H01J35/30—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by deflection of the cathode ray
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/044—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using laminography or tomosynthesis
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1204—Cooling of the anode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H01J35/116—Transmissive anodes

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
JP2013053576A 2013-03-15 2013-03-15 電界放射型電子銃を備えたｘ線管及びそれを用いたｘ線検査装置 Active JP6218403B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013053576A JP6218403B2 (ja) 2013-03-15 2013-03-15 電界放射型電子銃を備えたｘ線管及びそれを用いたｘ線検査装置
US14/197,482 US20140270071A1 (en) 2013-03-15 2014-03-05 X-ray tube comprising field emission type electron gun and x-ray inspection apparatus using the same
EP14159162.8A EP2779203A3 (en) 2013-03-15 2014-03-12 X-ray tube comprising field emission type electron gun and X-ray inspection apparatus using the same
US15/359,946 US9984847B2 (en) 2013-03-15 2016-11-23 Open-type X-ray tube comprising field emission type electron gun and X-ray inspection apparatus using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013053576A JP6218403B2 (ja) 2013-03-15 2013-03-15 電界放射型電子銃を備えたｘ線管及びそれを用いたｘ線検査装置

Publications (3)

Publication Number Publication Date
JP2014179281A JP2014179281A (ja) 2014-09-25
JP2014179281A5 JP2014179281A5 (enExample) 2016-04-28
JP6218403B2 true JP6218403B2 (ja) 2017-10-25

Family

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JP2013053576A Active JP6218403B2 (ja) 2013-03-15 2013-03-15 電界放射型電子銃を備えたｘ線管及びそれを用いたｘ線検査装置

Country Status (3)

Country Link
US (1) US20140270071A1 (enExample)
EP (1) EP2779203A3 (enExample)
JP (1) JP6218403B2 (enExample)

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JP2017536555A (ja) * 2014-12-03 2017-12-07 トタル エス アー 多孔性媒体試料中の流体を分析するためのデバイスおよび対応する方法
CN105140088B (zh) * 2015-07-24 2017-10-17 北京航空航天大学 大束流电子束打靶微束斑x射线源的聚焦装置及其使用方法
US10453643B2 (en) 2016-03-30 2019-10-22 Moxtek, Inc. Shielded, transmission-target, x-ray tube
JP6864888B2 (ja) * 2016-07-15 2021-04-28 株式会社リガク Ｘ線検査装置、ｘ線薄膜検査方法およびロッキングカーブ測定方法
KR102195101B1 (ko) * 2016-09-21 2020-12-24 가부시키가이샤 시마즈세이사쿠쇼 X선관
DE102016013747B4 (de) * 2016-11-18 2018-05-30 Yxlon International Gmbh Blende für eine Röntgenröhre und Röntgenröhre mit einer solchen Blende
US11315751B2 (en) * 2019-04-25 2022-04-26 The Boeing Company Electromagnetic X-ray control
US11508591B2 (en) * 2021-02-08 2022-11-22 Kla Corporation High resolution electron beam apparatus with dual-aperture schemes
WO2022223055A1 (en) * 2021-09-03 2022-10-27 Focus E-Beam Technology Pte. Ltd. Target assembly and x-ray microscope
CN113984813B (zh) * 2021-09-27 2024-07-26 上海大学 一种高通量薄膜晶体结构表征装置及方法
CN114927403B (zh) * 2022-06-08 2025-09-26 四川华束科技有限公司 一种x射线源及基于x射线的高速轨道检测方法
CN115616017B (zh) * 2022-09-30 2023-11-10 南方科技大学 一种电子光学测试平台装置

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JPS4622519Y1 (enExample) * 1968-07-30 1971-08-04
JPS4811512B1 (enExample) * 1970-04-07 1973-04-13
US5044001A (en) * 1987-12-07 1991-08-27 Nanod Ynamics, Inc. Method and apparatus for investigating materials with X-rays
JPH071681B2 (ja) * 1990-04-19 1995-01-11 株式会社日立製作所 荷電粒子線装置
JP3191554B2 (ja) * 1994-03-18 2001-07-23 株式会社日立製作所 Ｘ線撮像装置
US5892809A (en) * 1997-09-10 1999-04-06 Wittry; David B. Simplified system for local excitation by monochromatic x-rays
JP3900792B2 (ja) * 2000-04-26 2007-04-04 株式会社日立製作所 電子銃
DE19949978A1 (de) * 1999-10-08 2001-05-10 Univ Dresden Tech Elektronenstoßionenquelle
JP4029209B2 (ja) 2002-10-17 2008-01-09 株式会社東研 高分解能ｘ線顕微検査装置
JP3998556B2 (ja) * 2002-10-17 2007-10-31 株式会社東研 高分解能ｘ線顕微検査装置
US7218703B2 (en) * 2003-11-21 2007-05-15 Tohken Co., Ltd. X-ray microscopic inspection apparatus
JP4868330B2 (ja) * 2004-10-08 2012-02-01 独立行政法人科学技術振興機構 多価イオン発生源およびこの発生源を用いた荷電粒子ビーム装置
US7428298B2 (en) * 2005-03-31 2008-09-23 Moxtek, Inc. Magnetic head for X-ray source
JP4751635B2 (ja) 2005-04-13 2011-08-17 株式会社日立ハイテクノロジーズ 磁界重畳型電子銃
JP5458472B2 (ja) * 2007-03-20 2014-04-02 株式会社島津製作所 Ｘ線管
JP2009026600A (ja) * 2007-07-19 2009-02-05 Toshiba Corp 電子銃およびｘ線源
JP5149707B2 (ja) 2008-06-13 2013-02-20 浜松ホトニクス株式会社 Ｘ線発生装置
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JP5670111B2 (ja) * 2009-09-04 2015-02-18 東京エレクトロン株式会社 Ｘ線発生用ターゲット、ｘ線発生装置、及びｘ線発生用ターゲットの製造方法
JP2011113705A (ja) * 2009-11-25 2011-06-09 Toshiba Corp Ｘ線管
CN102110566B (zh) * 2009-12-24 2012-08-22 江苏天瑞仪器股份有限公司 X射线管
JP5769242B2 (ja) * 2010-07-30 2015-08-26 株式会社リガク 工業用ｘ線管
US8831179B2 (en) * 2011-04-21 2014-09-09 Carl Zeiss X-ray Microscopy, Inc. X-ray source with selective beam repositioning

Also Published As

Publication number Publication date
JP2014179281A (ja) 2014-09-25
EP2779203A3 (en) 2017-09-27
EP2779203A2 (en) 2014-09-17
US20140270071A1 (en) 2014-09-18

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