JP6191838B2 - 磁気センサ - Google Patents
磁気センサ Download PDFInfo
- Publication number
- JP6191838B2 JP6191838B2 JP2015045477A JP2015045477A JP6191838B2 JP 6191838 B2 JP6191838 B2 JP 6191838B2 JP 2015045477 A JP2015045477 A JP 2015045477A JP 2015045477 A JP2015045477 A JP 2015045477A JP 6191838 B2 JP6191838 B2 JP 6191838B2
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- Japan
- Prior art keywords
- magnetic field
- component
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000005291 magnetic effect Effects 0.000 title claims description 443
- 238000001514 detection method Methods 0.000 claims description 180
- 230000005415 magnetization Effects 0.000 claims description 175
- 238000012937 correction Methods 0.000 claims description 77
- 238000012545 processing Methods 0.000 claims description 32
- 238000004364 calculation method Methods 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 26
- 230000000694 effects Effects 0.000 claims description 13
- 238000010586 diagram Methods 0.000 description 21
- 230000000052 comparative effect Effects 0.000 description 13
- 238000012360 testing method Methods 0.000 description 8
- 238000011160 research Methods 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000004088 simulation Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000005290 antiferromagnetic effect Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000002885 antiferromagnetic material Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measuring Magnetic Variables (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015045477A JP6191838B2 (ja) | 2015-03-09 | 2015-03-09 | 磁気センサ |
DE102016104285.4A DE102016104285B4 (de) | 2015-03-09 | 2016-03-09 | Magnetsensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015045477A JP6191838B2 (ja) | 2015-03-09 | 2015-03-09 | 磁気センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016166741A JP2016166741A (ja) | 2016-09-15 |
JP6191838B2 true JP6191838B2 (ja) | 2017-09-06 |
Family
ID=56801290
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015045477A Active JP6191838B2 (ja) | 2015-03-09 | 2015-03-09 | 磁気センサ |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP6191838B2 (de) |
DE (1) | DE102016104285B4 (de) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6288481B2 (ja) | 2016-06-24 | 2018-03-07 | Tdk株式会社 | 角度センサおよび角度センサシステム |
JP6350834B2 (ja) * | 2016-09-30 | 2018-07-04 | Tdk株式会社 | 角度センサおよび角度センサシステム |
JP6331177B1 (ja) * | 2017-03-24 | 2018-05-30 | Tdk株式会社 | 角度センサシステム |
JP6331176B1 (ja) * | 2017-03-24 | 2018-05-30 | Tdk株式会社 | 角度センサシステム |
CN110678714B (zh) * | 2017-05-29 | 2021-11-26 | 松下知识产权经营株式会社 | 磁传感器 |
DE102017111895B3 (de) * | 2017-05-31 | 2018-07-05 | Schaeffler Technologies AG & Co. KG | Verfahren zur Bestimmung einer Winkelposition eines sich drehenden Bauteiles, insbesondere eines Elektromotors für ein Kupplungsbetätigungssystem eines Fahrzeuges |
DE102017222508B4 (de) * | 2017-12-12 | 2022-02-17 | Carl Zeiss Industrielle Messtechnik Gmbh | Verfahren und Vorrichtung zur Korrektur von Messsystemabweichungen |
US11199424B2 (en) | 2018-01-31 | 2021-12-14 | Allegro Microsystems, Llc | Reducing angle error in a magnetic field angle sensor |
TWI798331B (zh) * | 2018-02-02 | 2023-04-11 | 日商三共製作所股份有限公司 | 檢測移動體之運動之位置變化量的方法及裝置 |
WO2020250489A1 (ja) * | 2019-06-11 | 2020-12-17 | 株式会社村田製作所 | 磁気センサ、磁気センサアレイ、磁場分布測定装置、および位置特定装置 |
KR20220050995A (ko) * | 2019-08-28 | 2022-04-25 | 알레그로 마이크로시스템스, 엘엘씨 | 자기장 각도 센서 내의 각도 오차의 감소 |
US11175359B2 (en) | 2019-08-28 | 2021-11-16 | Allegro Microsystems, Llc | Reducing voltage non-linearity in a bridge having tunneling magnetoresistance (TMR) elements |
US11408948B2 (en) | 2020-03-18 | 2022-08-09 | Allegro Microsystems, Llc | Linear bridge having nonlinear elements for operation in high magnetic field intensities |
US11467233B2 (en) | 2020-03-18 | 2022-10-11 | Allegro Microsystems, Llc | Linear bridges having nonlinear elements |
JP7215454B2 (ja) * | 2020-04-08 | 2023-01-31 | Tdk株式会社 | 磁気センサ、磁気式エンコーダおよびレンズ位置検出装置 |
JP7115505B2 (ja) * | 2020-04-20 | 2022-08-09 | Tdk株式会社 | 磁気センサ、磁気式エンコーダおよびレンズ位置検出装置 |
JP7173104B2 (ja) * | 2020-07-21 | 2022-11-16 | Tdk株式会社 | 磁気センサ |
DE102021110733A1 (de) | 2021-04-27 | 2022-10-27 | Sensitec Gmbh | Magnetfeldbasierter Winkelsensor |
DE102022125821A1 (de) | 2022-10-06 | 2024-04-11 | Tdk-Micronas Gmbh | Kompensation einer harmonischen |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2529960B2 (ja) * | 1987-03-14 | 1996-09-04 | 株式会社日立製作所 | 磁気的位置検出装置 |
DE19849613A1 (de) * | 1998-10-28 | 2000-05-04 | Philips Corp Intellectual Pty | Anordnung zur Messung einer relativen linearen Position |
US6633462B2 (en) | 2000-07-13 | 2003-10-14 | Koninklijke Philips Electronics N.V. | Magnetoresistive angle sensor having several sensing elements |
JP4487093B2 (ja) * | 2004-02-02 | 2010-06-23 | 日本電産サンキョー株式会社 | 磁気センサ |
DE102005024879B4 (de) * | 2005-05-31 | 2018-12-06 | Infineon Technologies Ag | Verfahren zum Bestimmen von Restfehler-Kompensationsparametern für einen magnetoresistiven Winkelsensor und Verfahren zum Verringern eines Restwinkelfehlers bei einem magnetoresistiven Winkelsensor |
FR2943781B1 (fr) * | 2009-03-31 | 2011-03-25 | Valeo Equip Electr Moteur | Procede et dispositif de diagnostic de defauts de fonctionnement de sondes de determination de la position angulaire d'un rotor d'une machine electrique tournante polyphasee |
JP5131339B2 (ja) | 2010-11-17 | 2013-01-30 | Tdk株式会社 | 回転磁界センサ |
JP5590349B2 (ja) | 2012-07-18 | 2014-09-17 | Tdk株式会社 | 磁気センサシステム |
WO2015030837A1 (en) * | 2013-08-27 | 2015-03-05 | Halliburton Energy Services, Inc. | Simulating fluid leak-off and flow-back in a fractured subterranean |
JP2015045529A (ja) * | 2013-08-27 | 2015-03-12 | Tdk株式会社 | 回転磁界センサ |
-
2015
- 2015-03-09 JP JP2015045477A patent/JP6191838B2/ja active Active
-
2016
- 2016-03-09 DE DE102016104285.4A patent/DE102016104285B4/de active Active
Also Published As
Publication number | Publication date |
---|---|
DE102016104285B4 (de) | 2019-05-09 |
JP2016166741A (ja) | 2016-09-15 |
DE102016104285A1 (de) | 2016-09-15 |
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