JP6186215B2 - 光計測装置及び光断層観察方法 - Google Patents

光計測装置及び光断層観察方法 Download PDF

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Publication number
JP6186215B2
JP6186215B2 JP2013182689A JP2013182689A JP6186215B2 JP 6186215 B2 JP6186215 B2 JP 6186215B2 JP 2013182689 A JP2013182689 A JP 2013182689A JP 2013182689 A JP2013182689 A JP 2013182689A JP 6186215 B2 JP6186215 B2 JP 6186215B2
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light
signal light
optical
path length
optical path
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Japanese (ja)
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JP2015049204A (ja
JP2015049204A5 (enExample
Inventor
賢太郎 大澤
賢太郎 大澤
大輔 冨田
大輔 冨田
将樹 向尾
将樹 向尾
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Hitachi LG Data Storage Inc
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Hitachi LG Data Storage Inc
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Priority to JP2013182689A priority Critical patent/JP6186215B2/ja
Priority to US14/189,159 priority patent/US9441950B2/en
Priority to CN201410072077.XA priority patent/CN104414621B/zh
Publication of JP2015049204A publication Critical patent/JP2015049204A/ja
Publication of JP2015049204A5 publication Critical patent/JP2015049204A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
    • G01B9/02038—Shaping the wavefront, e.g. generating a spherical wavefront
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP2013182689A 2013-09-04 2013-09-04 光計測装置及び光断層観察方法 Active JP6186215B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013182689A JP6186215B2 (ja) 2013-09-04 2013-09-04 光計測装置及び光断層観察方法
US14/189,159 US9441950B2 (en) 2013-09-04 2014-02-25 Optical measurement apparatus and optical measurement method
CN201410072077.XA CN104414621B (zh) 2013-09-04 2014-02-28 光学测量装置和光学层析方法

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Application Number Priority Date Filing Date Title
JP2013182689A JP6186215B2 (ja) 2013-09-04 2013-09-04 光計測装置及び光断層観察方法

Publications (3)

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JP2015049204A JP2015049204A (ja) 2015-03-16
JP2015049204A5 JP2015049204A5 (enExample) 2016-04-28
JP6186215B2 true JP6186215B2 (ja) 2017-08-23

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US (1) US9441950B2 (enExample)
JP (1) JP6186215B2 (enExample)
CN (1) CN104414621B (enExample)

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EP3081163B1 (en) * 2015-04-12 2021-10-20 Taiwan Biophotonic Corporation Module, device and method for optical measurement
DE102015207328A1 (de) * 2015-04-22 2016-10-27 Siemens Aktiengesellschaft Verfahren zur Tiefenbestimmung
CN109310328B (zh) * 2016-03-25 2022-05-17 统雷有限公司 用于3d测量应用的mems可调vcsel驱动的扫频光源oct
JP6720051B2 (ja) * 2016-10-27 2020-07-08 株式会社日立エルジーデータストレージ 光画像計測装置、光画像計測方法
AT520258B1 (de) * 2017-07-26 2022-02-15 Univ Wien Tech Verfahren zur spektroskopischen bzw. spektrometrischen Untersuchung einer Probe
JP2019037650A (ja) 2017-08-28 2019-03-14 キヤノン株式会社 画像取得装置およびその制御方法
JP6851000B2 (ja) * 2017-10-26 2021-03-31 パナソニックＩｐマネジメント株式会社 レーザ溶接装置およびレーザ溶接方法
CN110836869B (zh) * 2018-08-17 2021-03-19 中国科学院西安光学精密机械研究所 一种全光纤高速光学相干层析扫描装置
CN109470454B (zh) * 2018-12-05 2020-09-04 陕西理工大学 一种曲面微透镜阵列面形检测装置
IT201900023214A1 (it) * 2019-12-06 2021-06-06 Adige Spa Procedimento e sistema per la determinazione della posizione locale di almeno un elemento ottico in una macchina per la lavorazione laser di un materiale, tramite tecniche d'interferometria ottica a bassa coerenza
CN115137298B (zh) * 2021-03-29 2024-05-14 上海近观科技有限责任公司 一种皮下生物标志物的信号收集装置、系统及方法
CN121049110A (zh) 2024-05-31 2025-12-02 株式会社日立高新技术分析 粒子测量装置

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ATA107495A (de) * 1995-06-23 1996-06-15 Fercher Adolf Friedrich Dr Kohärenz-biometrie und -tomographie mit dynamischem kohärentem fokus
JP4182580B2 (ja) * 1999-01-18 2008-11-19 ソニー株式会社 照明装置及び画像表示装置
JP4151159B2 (ja) * 1999-06-17 2008-09-17 松下電器産業株式会社 媒質の測定装置
US7139081B2 (en) * 2002-09-09 2006-11-21 Zygo Corporation Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
JP4062606B2 (ja) * 2003-01-20 2008-03-19 フジノン株式会社 低可干渉測定／高可干渉測定共用干渉計装置およびその測定方法
KR101169293B1 (ko) * 2003-03-06 2012-07-30 지고 코포레이션 주사 간섭측정을 이용한 복합 표면 구조의 프로파일링
US7177029B2 (en) * 2003-07-10 2007-02-13 Zygo Corporation Stroboscopic interferometry with frequency domain analysis
JP2005055538A (ja) * 2003-08-07 2005-03-03 Fuji Xerox Co Ltd マルチビームレーザ出射ユニット、及び画像形成装置
DE602006017558D1 (de) * 2005-08-09 2010-11-25 Gen Hospital Corp Gerät und verfahren zur durchführung von polarisationsbasierter quadraturdemodulation bei optischer kohärenztomographie
US20080024767A1 (en) * 2006-07-28 2008-01-31 Peter Seitz Imaging optical coherence tomography with dynamic coherent focus
JP4564948B2 (ja) 2006-09-11 2010-10-20 株式会社日立製作所 光情報検出方法、光ヘッド及び光ディスク装置
EP1962051A1 (de) * 2007-02-21 2008-08-27 Agfa HealthCare N.V. System und Verfahren zur optischen Kohärenztomographie
JP4880519B2 (ja) * 2007-05-11 2012-02-22 浜松ホトニクス株式会社 干渉測定装置
JP2009055538A (ja) * 2007-08-29 2009-03-12 Sharp Corp 表示装置および表示システム
JP5339934B2 (ja) * 2009-01-22 2013-11-13 キヤノン株式会社 光断層撮像装置および光断層撮像方法
JP5801577B2 (ja) 2010-03-25 2015-10-28 キヤノン株式会社 光断層撮像装置及び光断層撮像装置の制御方法
WO2012127880A1 (ja) * 2011-03-24 2012-09-27 株式会社ニコン 観察装置および観察方法
JP2012230321A (ja) * 2011-04-27 2012-11-22 Hitachi Media Electoronics Co Ltd 走査型画像表示装置
JP2012248243A (ja) * 2011-05-26 2012-12-13 Hitachi Media Electoronics Co Ltd 光学的情報処理装置、及び光学的情報処理装置のトラッキング制御方法
JP2013003561A (ja) * 2011-06-22 2013-01-07 Hitachi Media Electoronics Co Ltd 走査型画像表示装置

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Publication number Publication date
CN104414621B (zh) 2016-08-31
US9441950B2 (en) 2016-09-13
US20150062589A1 (en) 2015-03-05
JP2015049204A (ja) 2015-03-16
CN104414621A (zh) 2015-03-18

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