CN104414621B - 光学测量装置和光学层析方法 - Google Patents
光学测量装置和光学层析方法 Download PDFInfo
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- CN104414621B CN104414621B CN201410072077.XA CN201410072077A CN104414621B CN 104414621 B CN104414621 B CN 104414621B CN 201410072077 A CN201410072077 A CN 201410072077A CN 104414621 B CN104414621 B CN 104414621B
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02027—Two or more interferometric channels or interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/0209—Low-coherence interferometers
- G01B9/02091—Tomographic interferometers, e.g. based on optical coherence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02034—Interferometers characterised by particularly shaped beams or wavefronts
- G01B9/02038—Shaping the wavefront, e.g. generating a spherical wavefront
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/45—Multiple detectors for detecting interferometer signals
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013182689A JP6186215B2 (ja) | 2013-09-04 | 2013-09-04 | 光計測装置及び光断層観察方法 |
| JP2013-182689 | 2013-09-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104414621A CN104414621A (zh) | 2015-03-18 |
| CN104414621B true CN104414621B (zh) | 2016-08-31 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410072077.XA Active CN104414621B (zh) | 2013-09-04 | 2014-02-28 | 光学测量装置和光学层析方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9441950B2 (enExample) |
| JP (1) | JP6186215B2 (enExample) |
| CN (1) | CN104414621B (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10337983B2 (en) * | 2015-04-12 | 2019-07-02 | Taiwan Biophotonic Corporation | Module, device and method for optical measurement |
| DE102015207328A1 (de) * | 2015-04-22 | 2016-10-27 | Siemens Aktiengesellschaft | Verfahren zur Tiefenbestimmung |
| WO2017165793A1 (en) * | 2016-03-25 | 2017-09-28 | Thorlabs, Inc. | Mems tunable vcsel powered swept source oct for 3d metrology applications |
| JP6720051B2 (ja) * | 2016-10-27 | 2020-07-08 | 株式会社日立エルジーデータストレージ | 光画像計測装置、光画像計測方法 |
| AT520258B1 (de) * | 2017-07-26 | 2022-02-15 | Univ Wien Tech | Verfahren zur spektroskopischen bzw. spektrometrischen Untersuchung einer Probe |
| JP2019037650A (ja) * | 2017-08-28 | 2019-03-14 | キヤノン株式会社 | 画像取得装置およびその制御方法 |
| JP6851000B2 (ja) * | 2017-10-26 | 2021-03-31 | パナソニックＩｐマネジメント株式会社 | レーザ溶接装置およびレーザ溶接方法 |
| CN110836869B (zh) * | 2018-08-17 | 2021-03-19 | 中国科学院西安光学精密机械研究所 | 一种全光纤高速光学相干层析扫描装置 |
| CN109470454B (zh) * | 2018-12-05 | 2020-09-04 | 陕西理工大学 | 一种曲面微透镜阵列面形检测装置 |
| IT201900023214A1 (it) * | 2019-12-06 | 2021-06-06 | Adige Spa | Procedimento e sistema per la determinazione della posizione locale di almeno un elemento ottico in una macchina per la lavorazione laser di un materiale, tramite tecniche d'interferometria ottica a bassa coerenza |
| CN115137298B (zh) * | 2021-03-29 | 2024-05-14 | 上海近观科技有限责任公司 | 一种皮下生物标志物的信号收集装置、系统及方法 |
| JP2025181308A (ja) | 2024-05-31 | 2025-12-11 | 株式会社日立ハイテクアナリシス | 粒子計測装置 |
Citations (5)
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| CN1517672A (zh) * | 2003-01-20 | 2004-08-04 | 富士写真光机株式会社 | 用于低相干性测量和高相干性测量的干涉仪设备及方法 |
| CN1784588A (zh) * | 2003-03-06 | 2006-06-07 | 齐戈股份有限公司 | 使用扫描干涉测量形成复杂表面结构的轮廓以及对其表征 |
| CN102759847A (zh) * | 2011-04-27 | 2012-10-31 | 日立视听媒体股份有限公司 | 扫描型图像显示装置 |
| CN102800334A (zh) * | 2011-05-26 | 2012-11-28 | 日立视听媒体股份有限公司 | 光学信息处理装置和光学信息处理装置的跟踪控制方法 |
| CN102841495A (zh) * | 2011-06-22 | 2012-12-26 | 日立视听媒体股份有限公司 | 扫描型图像显示装置 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ATA107495A (de) * | 1995-06-23 | 1996-06-15 | Fercher Adolf Friedrich Dr | Kohärenz-biometrie und -tomographie mit dynamischem kohärentem fokus |
| JP4182580B2 (ja) * | 1999-01-18 | 2008-11-19 | ソニー株式会社 | 照明装置及び画像表示装置 |
| JP4151159B2 (ja) * | 1999-06-17 | 2008-09-17 | 松下電器産業株式会社 | 媒質の測定装置 |
| US7139081B2 (en) * | 2002-09-09 | 2006-11-21 | Zygo Corporation | Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures |
| US7177029B2 (en) * | 2003-07-10 | 2007-02-13 | Zygo Corporation | Stroboscopic interferometry with frequency domain analysis |
| JP2005055538A (ja) * | 2003-08-07 | 2005-03-03 | Fuji Xerox Co Ltd | マルチビームレーザ出射ユニット、及び画像形成装置 |
| KR101387454B1 (ko) * | 2005-08-09 | 2014-04-22 | 더 제너럴 하스피탈 코포레이션 | 광간섭 단층촬영법에서 편광 기반 직교 복조를 수행하기위한 장치, 방법 및 저장 매체 |
| US20080024767A1 (en) * | 2006-07-28 | 2008-01-31 | Peter Seitz | Imaging optical coherence tomography with dynamic coherent focus |
| JP4564948B2 (ja) | 2006-09-11 | 2010-10-20 | 株式会社日立製作所 | 光情報検出方法、光ヘッド及び光ディスク装置 |
| EP1962051A1 (de) * | 2007-02-21 | 2008-08-27 | Agfa HealthCare N.V. | System und Verfahren zur optischen Kohärenztomographie |
| JP4880519B2 (ja) * | 2007-05-11 | 2012-02-22 | 浜松ホトニクス株式会社 | 干渉測定装置 |
| JP2009055538A (ja) * | 2007-08-29 | 2009-03-12 | Sharp Corp | 表示装置および表示システム |
| JP5339934B2 (ja) | 2009-01-22 | 2013-11-13 | キヤノン株式会社 | 光断層撮像装置および光断層撮像方法 |
| JP5801577B2 (ja) | 2010-03-25 | 2015-10-28 | キヤノン株式会社 | 光断層撮像装置及び光断層撮像装置の制御方法 |
| JP5610063B2 (ja) * | 2011-03-24 | 2014-10-22 | 株式会社ニコン | 観察装置および観察方法 |
-
2013
- 2013-09-04 JP JP2013182689A patent/JP6186215B2/ja active Active
-
2014
- 2014-02-25 US US14/189,159 patent/US9441950B2/en active Active
- 2014-02-28 CN CN201410072077.XA patent/CN104414621B/zh active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1517672A (zh) * | 2003-01-20 | 2004-08-04 | 富士写真光机株式会社 | 用于低相干性测量和高相干性测量的干涉仪设备及方法 |
| CN1784588A (zh) * | 2003-03-06 | 2006-06-07 | 齐戈股份有限公司 | 使用扫描干涉测量形成复杂表面结构的轮廓以及对其表征 |
| CN102759847A (zh) * | 2011-04-27 | 2012-10-31 | 日立视听媒体股份有限公司 | 扫描型图像显示装置 |
| CN102800334A (zh) * | 2011-05-26 | 2012-11-28 | 日立视听媒体股份有限公司 | 光学信息处理装置和光学信息处理装置的跟踪控制方法 |
| CN102841495A (zh) * | 2011-06-22 | 2012-12-26 | 日立视听媒体股份有限公司 | 扫描型图像显示装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6186215B2 (ja) | 2017-08-23 |
| JP2015049204A (ja) | 2015-03-16 |
| US9441950B2 (en) | 2016-09-13 |
| US20150062589A1 (en) | 2015-03-05 |
| CN104414621A (zh) | 2015-03-18 |
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