JP6182646B2 - 基板処理装置 - Google Patents
基板処理装置 Download PDFInfo
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- JP6182646B2 JP6182646B2 JP2016129196A JP2016129196A JP6182646B2 JP 6182646 B2 JP6182646 B2 JP 6182646B2 JP 2016129196 A JP2016129196 A JP 2016129196A JP 2016129196 A JP2016129196 A JP 2016129196A JP 6182646 B2 JP6182646 B2 JP 6182646B2
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Description
111:チューブ
112:外部チューブ
120:チャンバ
130:ガス供給部
140:排気部
190:流動調節部
191:噴射口
192:ダクト
193:調節ガス供給ライン
195:噴射ユニット
Claims (8)
- 基板が処理される内部空間を提供するチューブと、
前記チューブの内部空間に設けられて複数枚の基板を多段に積載する基板支持部と、
前記複数枚の基板に工程ガスを供給するガス供給部と、
前記工程ガスを吸い込むために前記ガス供給部と向かい合うように配置される排気部と、
前記ガス供給部と前記排気部との間における前記チューブの周縁に沿って形成されて調節ガスを噴射する噴射口を有する流動調節部と、
を備え、
前記噴射口は、スリット状に又は列設される複数の孔状に形成されており、
前記噴射口は、前記ガス供給部から前記排気部に向かって進むにつれて幅が可変となっている、基板処理装置。 - 内部に前記チューブを収容する外部チューブをさらに備え、
前記流動調節部は、前記チューブ及び前記外部チューブの間に配置される請求項1に記載の基板処理装置。 - 前記基板支持部は、前記複数枚の基板がそれぞれ処理される処理空間を仕切るように前記基板が積載される方向に沿って前記基板同士の間にそれぞれ配置される複数のアイソレーションプレートを備え、
前記噴射口は、前記処理空間にそれぞれ対応して異なる高さに前記チューブに複数形成される請求項1又は請求項2に記載の基板処理装置。 - 前記流動調節部は、
前記チューブの外側面に設けられ、前記調節ガスが前記噴射口に移動するように流動空間を提供するダクトと、
調節ガスを供給するように前記ダクトに接続される調節ガス供給ラインと、
を備える請求項1に記載の基板処理装置。 - 前記流動調節部は、前記ダクトの内部において各処理空間に対応して調節ガスを噴射するように前記ダクトの内部に配置され、前記調節ガス供給ラインと接続される噴射ユニットをさらに備える請求項4に記載の基板処理装置。
- 前記噴射口は、前記チューブの両側に相対向するようにそれぞれ配置される請求項1に記載の基板処理装置。
- 基板が処理される内部空間を提供するチューブと、
前記チューブの内部空間に設けられて複数枚の基板を多段に積載する基板支持部と、
前記複数枚の基板に工程ガスを供給するガス供給部と、
前記工程ガスを吸い込むために前記ガス供給部と向かい合うように配置される排気部と、
前記ガス供給部と前記排気部との間における前記チューブの周縁に沿って形成されて調節ガスを噴射する噴射口を有する流動調節部と、
を備え、
前記基板支持部は、前記複数枚の基板がそれぞれ処理される処理空間を仕切るように前記基板が積載される方向に沿って前記基板同士の間にそれぞれ配置される複数のアイソレーションプレートを備え、
前記噴射口は、前記処理空間にそれぞれ対応して異なる高さに前記チューブに複数形成されており、
前記複数の噴射口は、高さに応じて異なる面積を有する、基板処理装置。 - 前記複数の噴射口は、前記ガス供給部の工程ガスを噴射する複数の噴射ノズルとそれぞれ同じ高さに配置される請求項3に記載の基板処理装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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KR10-2015-0128970 | 2015-09-11 | ||
KR1020150128970A KR101710944B1 (ko) | 2015-09-11 | 2015-09-11 | 기판처리장치 |
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JP2017055105A JP2017055105A (ja) | 2017-03-16 |
JP6182646B2 true JP6182646B2 (ja) | 2017-08-16 |
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JP2016129196A Active JP6182646B2 (ja) | 2015-09-11 | 2016-06-29 | 基板処理装置 |
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US (1) | US10161036B2 (ja) |
JP (1) | JP6182646B2 (ja) |
KR (1) | KR101710944B1 (ja) |
CN (1) | CN106531661B (ja) |
TW (1) | TWI606137B (ja) |
Families Citing this family (7)
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KR101760316B1 (ko) * | 2015-09-11 | 2017-07-21 | 주식회사 유진테크 | 기판처리장치 |
CN109314054A (zh) | 2016-07-21 | 2019-02-05 | 株式会社国际电气 | 等离子体生成装置、衬底处理装置及半导体器件的制造方法 |
KR101910085B1 (ko) * | 2017-06-08 | 2018-10-22 | 주식회사 유진테크 | 기판처리장치 |
JP1624352S (ja) * | 2018-07-19 | 2019-02-12 | ||
WO2020189205A1 (ja) * | 2019-03-18 | 2020-09-24 | 株式会社Kokusai Electric | 基板処理装置、半導体装置の製造方法およびノズル |
CN114846587A (zh) * | 2020-03-02 | 2022-08-02 | 株式会社国际电气 | 基板处理装置、半导体装置的制造方法和存储介质 |
CN115440633B (zh) * | 2022-10-17 | 2023-07-11 | 北京北方华创微电子装备有限公司 | 半导体工艺设备和排气调节机构 |
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EP0308946B1 (en) * | 1987-09-22 | 1993-11-24 | Nec Corporation | Chemical vapor deposition apparatus for obtaining high quality epitaxial layer with uniform film thickness |
JPH03255618A (ja) * | 1990-03-05 | 1991-11-14 | Fujitsu Ltd | 縦型cvd装置 |
US20090197424A1 (en) * | 2008-01-31 | 2009-08-06 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus and method for manufacturing semiconductor device |
JP4560575B2 (ja) * | 2008-01-31 | 2010-10-13 | 株式会社日立国際電気 | 基板処理装置及び半導体装置の製造方法 |
JP5195676B2 (ja) * | 2008-08-29 | 2013-05-08 | 東京エレクトロン株式会社 | 成膜装置、基板処理装置、成膜方法及び記憶媒体 |
KR101016016B1 (ko) * | 2009-07-09 | 2011-02-23 | 세메스 주식회사 | 반도체 기판의 증착 장치 |
JP2012074560A (ja) * | 2010-09-29 | 2012-04-12 | Stanley Electric Co Ltd | 気相成長装置 |
KR101380240B1 (ko) | 2011-11-17 | 2014-04-03 | 주식회사 유진테크 | 열차단플레이트를 포함하는 기판 처리 장치 |
KR101408084B1 (ko) | 2011-11-17 | 2014-07-04 | 주식회사 유진테크 | 보조가스공급포트를 포함하는 기판 처리 장치 |
KR101463592B1 (ko) | 2013-07-10 | 2014-11-21 | 주식회사 유진테크 | 기판 처리장치 |
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2015
- 2015-09-11 KR KR1020150128970A patent/KR101710944B1/ko active IP Right Grant
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2016
- 2016-06-29 JP JP2016129196A patent/JP6182646B2/ja active Active
- 2016-07-07 TW TW105121514A patent/TWI606137B/zh active
- 2016-07-26 US US15/220,383 patent/US10161036B2/en active Active
- 2016-07-27 CN CN201610600648.1A patent/CN106531661B/zh active Active
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Publication number | Publication date |
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US20170073810A1 (en) | 2017-03-16 |
KR101710944B1 (ko) | 2017-02-28 |
JP2017055105A (ja) | 2017-03-16 |
TWI606137B (zh) | 2017-11-21 |
CN106531661A (zh) | 2017-03-22 |
US10161036B2 (en) | 2018-12-25 |
TW201720948A (zh) | 2017-06-16 |
CN106531661B (zh) | 2019-06-11 |
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