JP6179131B2 - 振動素子、振動子、発振器、電子機器および移動体 - Google Patents

振動素子、振動子、発振器、電子機器および移動体 Download PDF

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Publication number
JP6179131B2
JP6179131B2 JP2013042584A JP2013042584A JP6179131B2 JP 6179131 B2 JP6179131 B2 JP 6179131B2 JP 2013042584 A JP2013042584 A JP 2013042584A JP 2013042584 A JP2013042584 A JP 2013042584A JP 6179131 B2 JP6179131 B2 JP 6179131B2
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vibration
thick
vibration element
vibrating
excitation electrode
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JP2014171149A5 (enExample
JP2014171149A (ja
Inventor
菊島　正幸
正幸 菊島
田中　雅子
雅子 田中
直久 小幡
直久 小幡
海野　幸浩
幸浩 海野
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Seiko Epson Corp
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Seiko Epson Corp
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  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2013042584A 2013-03-05 2013-03-05 振動素子、振動子、発振器、電子機器および移動体 Active JP6179131B2 (ja)

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JP2013042584A JP6179131B2 (ja) 2013-03-05 2013-03-05 振動素子、振動子、発振器、電子機器および移動体

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JP2014171149A JP2014171149A (ja) 2014-09-18
JP2014171149A5 JP2014171149A5 (enExample) 2016-04-21
JP6179131B2 true JP6179131B2 (ja) 2017-08-16

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6390104B2 (ja) * 2013-03-05 2018-09-19 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP6578709B2 (ja) * 2015-04-02 2019-09-25 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP2019102857A (ja) * 2017-11-29 2019-06-24 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7725962B2 (ja) * 2021-09-14 2025-08-20 株式会社大真空 水晶振動板および水晶振動デバイス

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5136027B2 (ja) * 2007-12-03 2013-02-06 セイコーエプソン株式会社 水晶振動片及び水晶振動片の製造方法
JP2013046085A (ja) * 2011-08-22 2013-03-04 Seiko Epson Corp 圧電振動素子、圧電振動子、電子デバイス、及び電子機器

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