JP6170879B2 - 歪みゲージ圧力センサ - Google Patents

歪みゲージ圧力センサ Download PDF

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Publication number
JP6170879B2
JP6170879B2 JP2014110839A JP2014110839A JP6170879B2 JP 6170879 B2 JP6170879 B2 JP 6170879B2 JP 2014110839 A JP2014110839 A JP 2014110839A JP 2014110839 A JP2014110839 A JP 2014110839A JP 6170879 B2 JP6170879 B2 JP 6170879B2
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diaphragm
neck
base
pressure sensor
wire bonding
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Japanese (ja)
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JP2015225002A (ja
JP2015225002A5 (enExample
Inventor
エス ペトラルカ ネイル
エス ペトラルカ ネイル
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センサータ テクノロジーズ インコーポレーテッド
センサータ テクノロジーズ インコーポレーテッド
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  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
JP2014110839A 2014-05-29 2014-05-29 歪みゲージ圧力センサ Expired - Fee Related JP6170879B2 (ja)

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JP2014110839A JP6170879B2 (ja) 2014-05-29 2014-05-29 歪みゲージ圧力センサ

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JP2014110839A JP6170879B2 (ja) 2014-05-29 2014-05-29 歪みゲージ圧力センサ

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JP2015225002A JP2015225002A (ja) 2015-12-14
JP2015225002A5 JP2015225002A5 (enExample) 2017-06-22
JP6170879B2 true JP6170879B2 (ja) 2017-07-26

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017525961A (ja) * 2014-08-19 2017-09-07 タイコ エレクトロニクス アンプ コリア カンパニー リミテッドＴｙｃｏ Ｅｌｅｃｔｒｏｎｉｃｓ ＡＭＰ Ｋｏｒｅａ Ｃｏ．，Ｌｔｄ 圧力センサ
JP2018189642A (ja) * 2017-05-04 2018-11-29 センサータ テクノロジーズ インコーポレーテッド 統合された圧力および温度センサ

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6992482B2 (ja) * 2017-12-18 2022-01-13 富士電機株式会社 圧力センサ
CN110349738B (zh) * 2019-07-12 2020-06-30 安第斯新材料科技(浙江)有限公司 一种利用电阻变化保护单晶硅差压变送器内的电子元件

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7077008B2 (en) * 2004-07-02 2006-07-18 Honeywell International Inc. Differential pressure measurement using backside sensing and a single ASIC
KR20070059108A (ko) * 2004-08-23 2007-06-11 허니웰 인터내셔널 인코포레이티드 미세가공된 절대 압력 감지 다이를 이용한 배출 가스재순환 시스템
JP2008151738A (ja) * 2006-12-20 2008-07-03 Denso Corp 圧力センサ
DE102007031980A1 (de) * 2007-07-10 2009-01-15 Robert Bosch Gmbh Anschlusseinheit für eine Druckmesszelle
EP2390641B1 (en) * 2010-05-27 2019-06-26 Sensata Technologies, Inc. Pressure Sensor
DE102010041169A1 (de) * 2010-09-22 2012-03-22 Robert Bosch Gmbh Drucksensor, insbesondere für Bremsvorrichtung
US20130192379A1 (en) * 2012-01-27 2013-08-01 Neil S. Petrarca Small form factor microfused silicon strain gage (msg) pressure sensor packaging

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017525961A (ja) * 2014-08-19 2017-09-07 タイコ エレクトロニクス アンプ コリア カンパニー リミテッドＴｙｃｏ Ｅｌｅｃｔｒｏｎｉｃｓ ＡＭＰ Ｋｏｒｅａ Ｃｏ．，Ｌｔｄ 圧力センサ
JP2018189642A (ja) * 2017-05-04 2018-11-29 センサータ テクノロジーズ インコーポレーテッド 統合された圧力および温度センサ

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