JP2015225002A5 - - Google Patents

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Publication number
JP2015225002A5
JP2015225002A5 JP2014110839A JP2014110839A JP2015225002A5 JP 2015225002 A5 JP2015225002 A5 JP 2015225002A5 JP 2014110839 A JP2014110839 A JP 2014110839A JP 2014110839 A JP2014110839 A JP 2014110839A JP 2015225002 A5 JP2015225002 A5 JP 2015225002A5
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JP
Japan
Prior art keywords
diaphragm
neck
pressure sensor
base
bonding pad
Prior art date
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Application number
JP2014110839A
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English (en)
Japanese (ja)
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JP2015225002A (ja
JP6170879B2 (ja
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Priority to JP2014110839A priority Critical patent/JP6170879B2/ja
Priority claimed from JP2014110839A external-priority patent/JP6170879B2/ja
Publication of JP2015225002A publication Critical patent/JP2015225002A/ja
Publication of JP2015225002A5 publication Critical patent/JP2015225002A5/ja
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Publication of JP6170879B2 publication Critical patent/JP6170879B2/ja
Expired - Fee Related legal-status Critical Current
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JP2014110839A 2014-05-29 2014-05-29 歪みゲージ圧力センサ Expired - Fee Related JP6170879B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014110839A JP6170879B2 (ja) 2014-05-29 2014-05-29 歪みゲージ圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014110839A JP6170879B2 (ja) 2014-05-29 2014-05-29 歪みゲージ圧力センサ

Publications (3)

Publication Number Publication Date
JP2015225002A JP2015225002A (ja) 2015-12-14
JP2015225002A5 true JP2015225002A5 (enExample) 2017-06-22
JP6170879B2 JP6170879B2 (ja) 2017-07-26

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ID=54841843

Family Applications (1)

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JP2014110839A Expired - Fee Related JP6170879B2 (ja) 2014-05-29 2014-05-29 歪みゲージ圧力センサ

Country Status (1)

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JP (1) JP6170879B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102232405B1 (ko) * 2014-08-19 2021-03-26 타이코에이엠피 주식회사 압력 센서
US10545064B2 (en) * 2017-05-04 2020-01-28 Sensata Technologies, Inc. Integrated pressure and temperature sensor
JP6992482B2 (ja) * 2017-12-18 2022-01-13 富士電機株式会社 圧力センサ
CN110349738B (zh) * 2019-07-12 2020-06-30 安第斯新材料科技(浙江)有限公司 一种利用电阻变化保护单晶硅差压变送器内的电子元件

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7077008B2 (en) * 2004-07-02 2006-07-18 Honeywell International Inc. Differential pressure measurement using backside sensing and a single ASIC
KR20070059108A (ko) * 2004-08-23 2007-06-11 허니웰 인터내셔널 인코포레이티드 미세가공된 절대 압력 감지 다이를 이용한 배출 가스재순환 시스템
JP2008151738A (ja) * 2006-12-20 2008-07-03 Denso Corp 圧力センサ
DE102007031980A1 (de) * 2007-07-10 2009-01-15 Robert Bosch Gmbh Anschlusseinheit für eine Druckmesszelle
EP2390641B1 (en) * 2010-05-27 2019-06-26 Sensata Technologies, Inc. Pressure Sensor
DE102010041169A1 (de) * 2010-09-22 2012-03-22 Robert Bosch Gmbh Drucksensor, insbesondere für Bremsvorrichtung
US20130192379A1 (en) * 2012-01-27 2013-08-01 Neil S. Petrarca Small form factor microfused silicon strain gage (msg) pressure sensor packaging

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