JP6168686B2 - 熱に敏感な半導体デバイスの熱への露出を低減するための方法および構造体 - Google Patents
熱に敏感な半導体デバイスの熱への露出を低減するための方法および構造体 Download PDFInfo
- Publication number
- JP6168686B2 JP6168686B2 JP2013114003A JP2013114003A JP6168686B2 JP 6168686 B2 JP6168686 B2 JP 6168686B2 JP 2013114003 A JP2013114003 A JP 2013114003A JP 2013114003 A JP2013114003 A JP 2013114003A JP 6168686 B2 JP6168686 B2 JP 6168686B2
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- circuit board
- tsv
- tsvs
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/4824—Connecting between the body and an opposite side of the item with respect to the body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/50—Peripheral circuit region structures
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Semiconductor Memories (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/485,886 US8680674B2 (en) | 2012-05-31 | 2012-05-31 | Methods and structures for reducing heat exposure of thermally sensitive semiconductor devices |
| US13/485,886 | 2012-05-31 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013251545A JP2013251545A (ja) | 2013-12-12 |
| JP2013251545A5 JP2013251545A5 (enExample) | 2016-07-14 |
| JP6168686B2 true JP6168686B2 (ja) | 2017-07-26 |
Family
ID=49669203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013114003A Active JP6168686B2 (ja) | 2012-05-31 | 2013-05-30 | 熱に敏感な半導体デバイスの熱への露出を低減するための方法および構造体 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8680674B2 (enExample) |
| JP (1) | JP6168686B2 (enExample) |
| BR (1) | BR102013013566B1 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9093429B2 (en) | 2012-06-27 | 2015-07-28 | Freescale Semiconductor, Inc. | Methods and structures for reducing heat exposure of thermally sensitive semiconductor devices |
| US10319660B2 (en) * | 2013-10-31 | 2019-06-11 | Nxp Usa, Inc. | Semiconductor device packages using a thermally enhanced conductive molding compound |
| EP3089823A4 (en) * | 2013-12-31 | 2017-12-20 | Canon U.S. Life Sciences, Inc. | Field deployable small format fast first result microfluidic system |
| US9472483B2 (en) | 2014-12-17 | 2016-10-18 | International Business Machines Corporation | Integrated circuit cooling apparatus |
| US9184112B1 (en) | 2014-12-17 | 2015-11-10 | International Business Machines Corporation | Cooling apparatus for an integrated circuit |
| CN108010931B (zh) * | 2017-12-28 | 2021-03-30 | 苏州晶方半导体科技股份有限公司 | 一种光学指纹芯片的封装结构以及封装方法 |
| US11276470B2 (en) * | 2020-07-17 | 2022-03-15 | Micron Technology, Inc. | Bitline driver isolation from page buffer circuitry in memory device |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0661382A (ja) * | 1992-08-12 | 1994-03-04 | Matsushita Electric Ind Co Ltd | 半導体冷却装置 |
| JPH08222700A (ja) * | 1995-02-16 | 1996-08-30 | Nissan Motor Co Ltd | 半導体装置 |
| US6190943B1 (en) | 2000-06-08 | 2001-02-20 | United Test Center Inc. | Chip scale packaging method |
| TW497236B (en) | 2001-08-27 | 2002-08-01 | Chipmos Technologies Inc | A soc packaging process |
| JP3791459B2 (ja) * | 2002-05-27 | 2006-06-28 | 株式会社デンソー | 半導体装置およびその製造方法 |
| US7129640B2 (en) * | 2003-06-03 | 2006-10-31 | Avago Technologies Fiber Ip (Singapore) Pte. Ltd. | Integrated circuit device for driving a laser diode with reduced heat transfer and method for fabricating the device |
| US7335972B2 (en) * | 2003-11-13 | 2008-02-26 | Sandia Corporation | Heterogeneously integrated microsystem-on-a-chip |
| JP4458906B2 (ja) * | 2004-04-05 | 2010-04-28 | 株式会社ルネサステクノロジ | 半導体装置 |
| JP4504798B2 (ja) * | 2004-12-16 | 2010-07-14 | パナソニック株式会社 | 多段構成半導体モジュール |
| US7339267B2 (en) | 2005-05-26 | 2008-03-04 | Freescale Semiconductor, Inc. | Semiconductor package and method for forming the same |
| US7446407B2 (en) * | 2005-08-31 | 2008-11-04 | Chipmos Technologies Inc. | Chip package structure |
| US7750459B2 (en) * | 2008-02-01 | 2010-07-06 | International Business Machines Corporation | Integrated module for data processing system |
| US7935571B2 (en) | 2008-11-25 | 2011-05-03 | Freescale Semiconductor, Inc. | Through substrate vias for back-side interconnections on very thin semiconductor wafers |
| US8604603B2 (en) * | 2009-02-20 | 2013-12-10 | The Hong Kong University Of Science And Technology | Apparatus having thermal-enhanced and cost-effective 3D IC integration structure with through silicon via interposers |
| JP2011249430A (ja) * | 2010-05-24 | 2011-12-08 | Panasonic Corp | 半導体装置及び半導体装置の製造方法 |
-
2012
- 2012-05-31 US US13/485,886 patent/US8680674B2/en active Active
-
2013
- 2013-05-30 JP JP2013114003A patent/JP6168686B2/ja active Active
- 2013-05-31 BR BR102013013566-6A patent/BR102013013566B1/pt active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| US20130320480A1 (en) | 2013-12-05 |
| JP2013251545A (ja) | 2013-12-12 |
| BR102013013566B1 (pt) | 2021-04-20 |
| US8680674B2 (en) | 2014-03-25 |
| BR102013013566A2 (pt) | 2015-10-20 |
| BR102013013566A8 (pt) | 2017-10-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6168686B2 (ja) | 熱に敏感な半導体デバイスの熱への露出を低減するための方法および構造体 | |
| JP6445586B2 (ja) | 区分された論理素子を有する積層半導体ダイアセンブリおよび関連システムと方法 | |
| TW415056B (en) | Multi-chip packaging structure | |
| TWI285420B (en) | Heat stud for stacked chip packsge | |
| US9209163B2 (en) | Package-on-package structures | |
| KR20130020570A (ko) | 반도체 장치 | |
| US7224059B2 (en) | Method and apparatus for thermo-electric cooling | |
| US11901349B2 (en) | Semiconductor packages and methods for forming the same | |
| US9907181B2 (en) | Electronic module | |
| CN103579209B (zh) | 用于dram在gpu之上的可替换3d堆叠方案 | |
| TW201423921A (zh) | 改善疊合式結構內邏輯晶片的熱效能 | |
| US20130068509A1 (en) | Method and apparatus for connecting inlaid chip into printed circuit board | |
| TW202131460A (zh) | 用以切斷熱串擾之散熱片切斷器及絕緣矽穿孔 | |
| US9111948B2 (en) | Method of fabricating semiconductor package structure | |
| US9093429B2 (en) | Methods and structures for reducing heat exposure of thermally sensitive semiconductor devices | |
| CN107482002A (zh) | 具有层叠封装结构的半导体组件及包括该组件的电子设备 | |
| JPH1187574A (ja) | 垂直実装形半導体チップパッケージ及びそれを含むパッケージモジュール | |
| US7030487B1 (en) | Chip scale packaging with improved heat dissipation capability | |
| US12406921B2 (en) | Electronic device | |
| US8466563B2 (en) | Apparatus and methods for 3-D stacking of thinned die | |
| JP2002141436A (ja) | 半導体装置及びその製造方法 | |
| JP4910117B2 (ja) | 積層型メモリ装置 | |
| KR20250157576A (ko) | 반도체 패키지 | |
| KR20100112894A (ko) | 반도체 칩 및 이를 포함하는 반도체 패키지 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160524 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20160524 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20170228 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170314 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170519 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20170530 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20170626 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 6168686 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |