JP6158634B2 - 静電チャック - Google Patents

静電チャック Download PDF

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Publication number
JP6158634B2
JP6158634B2 JP2013164284A JP2013164284A JP6158634B2 JP 6158634 B2 JP6158634 B2 JP 6158634B2 JP 2013164284 A JP2013164284 A JP 2013164284A JP 2013164284 A JP2013164284 A JP 2013164284A JP 6158634 B2 JP6158634 B2 JP 6158634B2
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Japan
Prior art keywords
metal base
ceramic
heat insulating
heater
electrostatic chuck
Prior art date
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JP2013164284A
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Japanese (ja)
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JP2015035446A5 (enExample
JP2015035446A (ja
Inventor
要 三輪
要 三輪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Priority to JP2013164284A priority Critical patent/JP6158634B2/ja
Publication of JP2015035446A publication Critical patent/JP2015035446A/ja
Publication of JP2015035446A5 publication Critical patent/JP2015035446A5/ja
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Publication of JP6158634B2 publication Critical patent/JP6158634B2/ja
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  • Drying Of Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2013164284A 2013-08-07 2013-08-07 静電チャック Active JP6158634B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013164284A JP6158634B2 (ja) 2013-08-07 2013-08-07 静電チャック

Applications Claiming Priority (1)

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JP2013164284A JP6158634B2 (ja) 2013-08-07 2013-08-07 静電チャック

Publications (3)

Publication Number Publication Date
JP2015035446A JP2015035446A (ja) 2015-02-19
JP2015035446A5 JP2015035446A5 (enExample) 2016-05-19
JP6158634B2 true JP6158634B2 (ja) 2017-07-05

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ID=52543797

Family Applications (1)

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JP2013164284A Active JP6158634B2 (ja) 2013-08-07 2013-08-07 静電チャック

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JP (1) JP6158634B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6653535B2 (ja) * 2015-08-07 2020-02-26 日本発條株式会社 ヒータユニット
JP2019075477A (ja) * 2017-10-17 2019-05-16 株式会社ディスコ チャックテーブル機構
CN111161995B (zh) * 2020-03-07 2025-07-01 江苏先锋精密科技股份有限公司 一种等离子刻蚀机用全封闭式云母加热基座
KR102677038B1 (ko) * 2020-05-22 2024-06-19 세메스 주식회사 정전 척과 그 제조 방법 및 기판 처리 장치
CN111863693B (zh) * 2020-07-06 2025-10-24 北京华卓精科科技股份有限公司 一种静电卡盘及其制备方法
KR102808059B1 (ko) * 2022-11-11 2025-05-16 엔지케이 인슐레이터 엘티디 웨이퍼 적재대
JP2024143492A (ja) * 2023-03-30 2024-10-11 日本発條株式会社 ステージ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010045170A (ja) * 2008-08-12 2010-02-25 Hitachi High-Technologies Corp 試料載置電極
JP5482282B2 (ja) * 2009-03-03 2014-05-07 東京エレクトロン株式会社 載置台構造及び成膜装置

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JP2015035446A (ja) 2015-02-19

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