JP6146535B2 - 方向性電磁鋼板の製造方法 - Google Patents
方向性電磁鋼板の製造方法 Download PDFInfo
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- JP6146535B2 JP6146535B2 JP2016514792A JP2016514792A JP6146535B2 JP 6146535 B2 JP6146535 B2 JP 6146535B2 JP 2016514792 A JP2016514792 A JP 2016514792A JP 2016514792 A JP2016514792 A JP 2016514792A JP 6146535 B2 JP6146535 B2 JP 6146535B2
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- steel sheet
- resist
- grain
- oriented electrical
- mask
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Images
Classifications
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Description
本発明は上記の知見に立脚するものである。
1.方向性電磁鋼板用素材に熱間圧延を施して熱延鋼板とし、
該熱延鋼板に1回または中間焼鈍を含む2回以上の冷間圧延を施して最終板厚を有する冷延鋼板とし、
前記冷延鋼板の片面または両面に、感光性樹脂を含むレジスト皮膜を塗布し、塗布した面を局所的に露光してパターニングを行い、現像によって板幅方向に連続または不連続な線状の地鉄露出部を形成し、
前記地鉄露出部が形成された鋼板を電解エッチングして、板幅方向に連続または不連続な線状の溝を形成し、
前記電解エッチング後の鋼板に一次再結晶焼鈍を施し、その後最終仕上げ焼鈍を施す方向性電磁鋼板の製造方法において、
前記電解エッチングにおいて、電極に投入する電流をI、電極の面積と同一面積の鋼板表面における地鉄露出部の面積をSとしたとき、地鉄露出部に対する電流密度ρ=I/Sが7.5A/cm2以上であることを特徴とする、方向性電磁鋼板の製造方法。
まず、発明者らが本発明を着想するに至った実験として、レジスト皮膜の塗布方法について検討を行った実験の説明を行う。
実験に使用した方向性電磁鋼板は、方向性電磁鋼用スラブを熱間圧延し、その後必要に応じて熱延板焼鈍を行った後、1回または中間焼鈍をはさむ2回の冷間圧延により最終製品板厚とし、その後、脱炭焼鈍ついで最終仕上げ焼鈍を施し、その後、上塗りコーティングを施して製造した。
かくして得られた製品板から試験片を切り出し、歪取り焼鈍を施した後、JIS C2550に記載の方法で鉄損W17/50を測定した。
その結果を表1に示す。なお、基本電流密度は、投入電流Iを電極の面積Rで除したI/R[A/cm2]で定義される電流密度である。
本発明に用いる方向性電磁鋼板用素材は、鋳造によってスラブとして供給する。鋳造の方法は特に限定しない。素材となるスラブの組成は、方向性電磁鋼板用として一般に用いられるものであれば特に限定しないが、例えば、Si:2〜5mass%、C:0.002〜0.10mass%、Mn:0.01〜0.80mass%、Al:0.002〜0.05mass%、N:0.003〜0.02mass%を含有し、残部Feおよび不可避的不純物とすることができる。
さらに、1回または中間焼鈍を含む2回以上の冷間圧延を施し、冷延鋼板(以下、単に鋼板ともいう)とする。これらの方法は公知の方法で行えば良い。
このようにして得られた冷延鋼板の片面または両面に感光性樹脂を含むレジスト皮膜を塗布する。
上記露光時に、マスクを鋼板と接触させると、レジストに疵や剥離が生じ、電解エッチング時に意図しない領域がエッチングされることで鉄損の劣化をもたらす。そこで、本発明においては、マスクと鋼板は接触させずに露光を行う。
そのために、本発明における電解電流密度は7.5A/cm2以上とする。好ましくは12A/cm2以上、より好ましくは20A/cm2以上である。電解電流密度の上限は特に指定しないが、鋼板の発熱など避ける観点から1000A/cm2以下とするのが好ましい。
Si:3.0mass%、C:0.05mass%、Mn:0.03mass%、Al:0.02mass%、N:0.01mass%を含有し、残部Feおよび不可避的不純物からなる鋼スラブを、1400℃で加熱した後、熱間圧延して2.2mmの板厚とし、1100℃×60秒の熱延板焼鈍を施した後、冷間圧延して板厚1.8mmとし、1100℃×60秒の中間焼鈍を施した後、2回目の冷間圧延で0.23mmの最終板厚とした。
ここで、グラビアオフセット印刷では、版ロールに設けるメッシュを、板幅方向に100μm幅で延びる未塗布部が圧延方向に3mmピッチで並ぶように設定し、このメッシュを用いてエポキシ系樹脂を主成分とするレジストを冷延鋼板に印刷した。
その後、磁区細分化処理を施さなかった試験片とともに、脱炭焼鈍を兼ねた一次再結晶焼鈍を施したのち、MgOを主体とする焼鈍分離剤を塗布して最終仕上げ焼鈍を施した。
実施例1で作製したものと同様の冷延鋼板コイルに、表3に示す種々のレジストを塗布した。ここで、オフセットグラビア印刷以外のレジストは、ロールコータにて鋼板表面に均一塗布され、表3に示す光源と幅100μmのスリットまたは遮蔽部の形成されたマスクとを用い、ミラーおよびレンズの光学系を介した投影型で露光を施した。投影倍率は等倍とした。
実施例1で作製したものと同様の冷延鋼板コイルに、ノボラック樹脂とナフトキノンジアジド系感光剤を主成分とするポジ型レジストを膜厚3μmでロールコートし、100℃×30秒の熱処理を施した。その後、近接マスク型、投影型、直接描画型の3つの露光方法でそれぞれ種々の条件で鋼板片面に露光を施した。
2 光
3 光照射装置(光源)
4 ミラー
5 マスク部材
6 マスクと鋼板との距離:L
7 レンズ
Claims (7)
- 方向性電磁鋼板用素材に熱間圧延を施して熱延鋼板とし、
該熱延鋼板に1回または中間焼鈍を含む2回以上の冷間圧延を施して最終板厚を有する冷延鋼板とし、
前記冷延鋼板の片面または両面に、感光性樹脂を含むレジスト皮膜を塗布し、塗布した面を局所的に露光してパターニングを行い、現像によって板幅方向に連続または不連続な線状の地鉄露出部を形成し、
前記地鉄露出部が形成された鋼板を電解エッチングして、板幅方向に連続または不連続な線状の溝を形成し、
前記電解エッチング後の鋼板に一次再結晶焼鈍を施し、その後最終仕上げ焼鈍を施す方向性電磁鋼板の製造方法において、
前記電解エッチングにおいて、電極に投入する電流をI、電極の面積と同一面積の鋼板表面における地鉄露出部の面積をSとしたとき、地鉄露出部に対する電流密度ρ=I/Sが7.5A/cm2以上であることを特徴とする、方向性電磁鋼板の製造方法。 - 前記レジスト皮膜はポジ型レジストであり、前記パターニングは該ポジ型レジスト皮膜を塗布した面の溝形成領域を露光して行うことを特徴とする、請求項1に記載の方向性電磁鋼板の製造方法。
- 前記レジスト皮膜はネガ型レジストであり、前記パターニングは該ネガ型レジスト皮膜を塗布した面の非溝形成領域を露光して行うことを特徴とする、請求項1に記載の方向性電磁鋼板の製造方法。
- 前記レジスト皮膜は化学増幅型レジストであることを特徴とする、請求項2または3に記載の方向性電磁鋼板の製造方法。
- 前記パターニングの露光は、前記鋼板上で光を走査し、該光の照射により前記レジスト皮膜を変性させて行うことを特徴とする、請求項1〜4のいずれか1項に記載の方向性電磁鋼板の製造方法。
- 前記パターニングの露光は、前記鋼板と離間して設置したマスクの開口部を通過した光を、前記鋼板に照射することにより行い、かつ、前記マスクと前記鋼板との距離が50μm以上5000μm以下であることを特徴とする、請求項1〜4のいずれか1項に記載の方向性電磁鋼板の製造方法。
- 前記パターニングの露光は、レンズおよび/またはミラーを介して、前記鋼板と離間して設置したマスクの開口部を通過した光を、前記鋼板に照射することにより行うことを特徴とする、請求項1〜4のいずれか1項に記載の方向性電磁鋼板の製造方法。
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DE102019201468A1 (de) * | 2019-02-05 | 2020-08-06 | Carl Zeiss Smt Gmbh | Vorrichtung und Verfahren zum Reparieren einer fotolithographischen Maske |
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