JP6138145B2 - 合成石英ガラスの製造方法 - Google Patents

合成石英ガラスの製造方法 Download PDF

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Publication number
JP6138145B2
JP6138145B2 JP2014546502A JP2014546502A JP6138145B2 JP 6138145 B2 JP6138145 B2 JP 6138145B2 JP 2014546502 A JP2014546502 A JP 2014546502A JP 2014546502 A JP2014546502 A JP 2014546502A JP 6138145 B2 JP6138145 B2 JP 6138145B2
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Japan
Prior art keywords
sio
starting material
droplets
liquid
carrier gas
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JP2014546502A
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English (en)
Japanese (ja)
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JP2015505291A5 (enExample
JP2015505291A (ja
Inventor
バデケ クラウス−ウーヴェ
バデケ クラウス−ウーヴェ
オットー ノアベアト
オットー ノアベアト
トロマー マーティン
トロマー マーティン
ラウダーン ヒルマー
ラウダーン ヒルマー
ブリュッケル アンドレアス
ブリュッケル アンドレアス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Quarzglas GmbH and Co KG
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Heraeus Quarzglas GmbH and Co KG
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Publication of JP2015505291A5 publication Critical patent/JP2015505291A5/ja
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/02—Pure silica glass, e.g. pure fused quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/32—Non-halide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Silicon Compounds (AREA)
JP2014546502A 2011-12-16 2012-12-13 合成石英ガラスの製造方法 Active JP6138145B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102011121190.3 2011-12-16
DE102011121190A DE102011121190A1 (de) 2011-12-16 2011-12-16 OMCTS-Verdampfungsverfahren
PCT/EP2012/075346 WO2013087751A1 (de) 2011-12-16 2012-12-13 Verfahren zur herstellung von synthetischem quarzglas

Publications (3)

Publication Number Publication Date
JP2015505291A JP2015505291A (ja) 2015-02-19
JP2015505291A5 JP2015505291A5 (enExample) 2016-01-28
JP6138145B2 true JP6138145B2 (ja) 2017-05-31

Family

ID=47435939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014546502A Active JP6138145B2 (ja) 2011-12-16 2012-12-13 合成石英ガラスの製造方法

Country Status (8)

Country Link
US (1) US9481597B2 (enExample)
EP (1) EP2791069B1 (enExample)
JP (1) JP6138145B2 (enExample)
KR (1) KR101614339B1 (enExample)
CN (1) CN103987667B (enExample)
DE (1) DE102011121190A1 (enExample)
IN (1) IN2014CN04381A (enExample)
WO (1) WO2013087751A1 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6236866B2 (ja) * 2013-05-15 2017-11-29 住友電気工業株式会社 ガラス微粒子堆積体の製造方法およびガラス微粒子堆積体製造用バーナー
DE102013209673B3 (de) * 2013-05-24 2014-05-22 Heraeus Quarzglas Gmbh & Co. Kg Verfahren und Verdampfer zur Herstellung von synthetischem Quarzglas
EP3034476A1 (de) 2014-12-16 2016-06-22 Heraeus Quarzglas GmbH & Co. KG Verfahren zur herstellung von synthetischem quarzglas unter verwendung einer reinigungsvorrichtung
EP3059212A1 (de) 2015-02-18 2016-08-24 Heraeus Quarzglas GmbH & Co. KG Verfahren und vorrichtung zur herstellung von quarzglas aus einer polymerisierbaren polyalkylsiloxanverbindung mit membranfilter als reinigungsvorrichtung
EP3434653A1 (de) 2017-07-24 2019-01-30 Heraeus Quarzglas GmbH & Co. KG Einsatz von einer polyalkylsiloxanverbindung mit geringem siloxanolgehalt für die herstellung von synthetischem quarzglas
JP6978991B2 (ja) 2018-08-23 2021-12-08 信越化学工業株式会社 光ファイバ用多孔質ガラス母材の製造方法および製造装置
JP7463967B2 (ja) * 2018-12-04 2024-04-09 住友電気工業株式会社 ガラス微粒子堆積体の製造装置及び製造方法
CN109373196A (zh) * 2018-12-05 2019-02-22 上海正帆科技股份有限公司 一种八甲基环四硅氧烷的输送及汽化系统和方法
JP7058627B2 (ja) * 2019-06-11 2022-04-22 信越化学工業株式会社 光ファイバ用多孔質ガラス母材の製造装置および製造方法
KR20230004461A (ko) 2020-05-01 2023-01-06 신에쓰 가가꾸 고교 가부시끼가이샤 다공질 유리 모재 제조 장치, 다공질 유리 모재의 제조 방법, 및 광섬유용 유리 모재의 제조 방법
EP3950611A1 (de) 2020-08-06 2022-02-09 Heraeus Quarzglas GmbH & Co. KG Alternative fluorierungsmittel zur herstellung von fluoriertem quarzglas
EP3950610A1 (de) 2020-08-06 2022-02-09 Heraeus Quarzglas GmbH & Co. KG Alternative fluorierungsmittel ii: fluosil und sootaufbau
JP7428632B2 (ja) * 2020-12-14 2024-02-06 信越化学工業株式会社 多孔質ガラス母材の製造方法及び製造装置
EP4015468A1 (de) 2020-12-16 2022-06-22 Heraeus Quarzglas GmbH & Co. KG Verfahren zur herstellung von synthetischem quarzglas
EP4015466A1 (de) 2020-12-16 2022-06-22 Heraeus Quarzglas GmbH & Co. KG Verfahren zur herstellung von synthetischem quarzglas
EP4015467A1 (de) 2020-12-16 2022-06-22 Heraeus Quarzglas GmbH & Co. KG Verfahren zur herstellung von synthetischem quarzglas
USD982401S1 (en) * 2021-05-09 2023-04-04 Weber Product Development, Llc Cap designed to reseal a partially used tube of caulk for later reuse
EP4428106A1 (de) 2023-03-07 2024-09-11 Heraeus Quarzglas GmbH & Co. KG Antriebssynchronisation für soot-abscheidemaschine zur vermeidung von strukturbildungen in abscheideprozessen

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8905966D0 (en) 1989-03-15 1989-04-26 Tsl Group Plc Improved vitreous silica products
US5043002A (en) * 1990-08-16 1991-08-27 Corning Incorporated Method of making fused silica by decomposing siloxanes
US5152819A (en) * 1990-08-16 1992-10-06 Corning Incorporated Method of making fused silica
US5632797A (en) * 1994-12-30 1997-05-27 Corning Incorporated Method of providing vaporized halide-free, silicon-containing compounds
US5558687A (en) * 1994-12-30 1996-09-24 Corning Incorporated Vertical, packed-bed, film evaporator for halide-free, silicon-containing compounds
US5703191A (en) * 1995-09-01 1997-12-30 Corning Incorporated Method for purifying polyalkylsiloxanes and the resulting products
US6312656B1 (en) * 1995-12-19 2001-11-06 Corning Incorporated Method for forming silica by combustion of liquid reactants using oxygen
US6244575B1 (en) * 1996-10-02 2001-06-12 Micron Technology, Inc. Method and apparatus for vaporizing liquid precursors and system for using same
CN1126720C (zh) * 1997-12-19 2003-11-05 康宁股份有限公司 制备金属氧化物烟灰的燃烧器和方法
JP2000017438A (ja) * 1998-06-30 2000-01-18 Japan Pionics Co Ltd 気化器及び気化供給方法
US6546757B1 (en) * 1998-07-28 2003-04-15 Brown University Research Foundation Liquid spray pyrolysis method for the fabrication of optical fiber preforms, with reactant mixing
US6260385B1 (en) * 1998-08-07 2001-07-17 Corning Incorporated Method and burner for forming silica-containing soot
US6672106B1 (en) * 1998-08-07 2004-01-06 Corning Incorporated Method and apparatus for forming soot for the manufacture of glass
US6705127B1 (en) * 1998-10-30 2004-03-16 Corning Incorporated Methods of manufacturing soot for optical fiber preforms and preforms made by the methods
JP3685251B2 (ja) * 2000-08-31 2005-08-17 信越化学工業株式会社 球状シリカ粉末の製造方法
US6766702B2 (en) * 2001-07-16 2004-07-27 Institute For Tropospheric Research, A German Non-Profit Organization Method and apparatus for investigating temporal development of particles or droplets in gas-vapor mixture
US20030116091A1 (en) * 2001-12-04 2003-06-26 Primaxx, Inc. Chemical vapor deposition vaporizer
DE10302914B4 (de) * 2003-01-24 2005-12-29 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von synthetischem Quarzglas
GB2478307A (en) * 2010-03-02 2011-09-07 Heraeus Quartz Uk Ltd Manufacture of silica glass
DE102011119339A1 (de) * 2011-11-25 2013-05-29 Heraeus Quarzglas Gmbh & Co. Kg Zerstäubungsverfahren zur Herstellung von synthetischem Quarzglas
DE102011119341A1 (de) * 2011-11-25 2013-05-29 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von synthetischem Quarzglas nach der Sootmethode
DE102011119373A1 (de) * 2011-11-25 2013-05-29 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von synthetischem Quarzglas
DE102011119374A1 (de) * 2011-11-25 2013-05-29 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von synthetischem Quarzglas
DE102011121153B3 (de) * 2011-12-15 2013-03-21 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von synthetischem Quarzglas sowie Quarzglas für den Einsatz als Mantelmaterial einer optischen Faser

Also Published As

Publication number Publication date
US9481597B2 (en) 2016-11-01
WO2013087751A1 (de) 2013-06-20
CN103987667A (zh) 2014-08-13
US20150007611A1 (en) 2015-01-08
KR20140098786A (ko) 2014-08-08
IN2014CN04381A (enExample) 2015-09-04
CN103987667B (zh) 2016-10-19
JP2015505291A (ja) 2015-02-19
DE102011121190A1 (de) 2013-06-20
KR101614339B1 (ko) 2016-04-21
EP2791069B1 (de) 2017-08-02
EP2791069A1 (de) 2014-10-22

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