KR101614339B1 - 합성 석영 유리의 제조 방법 - Google Patents

합성 석영 유리의 제조 방법 Download PDF

Info

Publication number
KR101614339B1
KR101614339B1 KR1020147016084A KR20147016084A KR101614339B1 KR 101614339 B1 KR101614339 B1 KR 101614339B1 KR 1020147016084 A KR1020147016084 A KR 1020147016084A KR 20147016084 A KR20147016084 A KR 20147016084A KR 101614339 B1 KR101614339 B1 KR 101614339B1
Authority
KR
South Korea
Prior art keywords
sio
feedstock
liquid
carrier gas
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020147016084A
Other languages
English (en)
Korean (ko)
Other versions
KR20140098786A (ko
Inventor
클라우스-우베 바데케
노베르트 오토
마틴 트롬머
힐마르 라우단
안드레아 브루켈
Original Assignee
헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 filed Critical 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지
Publication of KR20140098786A publication Critical patent/KR20140098786A/ko
Application granted granted Critical
Publication of KR101614339B1 publication Critical patent/KR101614339B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/02—Pure silica glass, e.g. pure fused quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/32—Non-halide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/80—Feeding the burner or the burner-heated deposition site
    • C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Silicon Compounds (AREA)
KR1020147016084A 2011-12-16 2012-12-13 합성 석영 유리의 제조 방법 Active KR101614339B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102011121190.3 2011-12-16
DE102011121190A DE102011121190A1 (de) 2011-12-16 2011-12-16 OMCTS-Verdampfungsverfahren
PCT/EP2012/075346 WO2013087751A1 (de) 2011-12-16 2012-12-13 Verfahren zur herstellung von synthetischem quarzglas

Publications (2)

Publication Number Publication Date
KR20140098786A KR20140098786A (ko) 2014-08-08
KR101614339B1 true KR101614339B1 (ko) 2016-04-21

Family

ID=47435939

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020147016084A Active KR101614339B1 (ko) 2011-12-16 2012-12-13 합성 석영 유리의 제조 방법

Country Status (8)

Country Link
US (1) US9481597B2 (enExample)
EP (1) EP2791069B1 (enExample)
JP (1) JP6138145B2 (enExample)
KR (1) KR101614339B1 (enExample)
CN (1) CN103987667B (enExample)
DE (1) DE102011121190A1 (enExample)
IN (1) IN2014CN04381A (enExample)
WO (1) WO2013087751A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220085008A (ko) * 2020-12-14 2022-06-21 신에쓰 가가꾸 고교 가부시끼가이샤 다공질 유리 모재의 제조 방법 및 제조 장치

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6236866B2 (ja) * 2013-05-15 2017-11-29 住友電気工業株式会社 ガラス微粒子堆積体の製造方法およびガラス微粒子堆積体製造用バーナー
DE102013209673B3 (de) 2013-05-24 2014-05-22 Heraeus Quarzglas Gmbh & Co. Kg Verfahren und Verdampfer zur Herstellung von synthetischem Quarzglas
EP3034476A1 (de) 2014-12-16 2016-06-22 Heraeus Quarzglas GmbH & Co. KG Verfahren zur herstellung von synthetischem quarzglas unter verwendung einer reinigungsvorrichtung
EP3059212A1 (de) 2015-02-18 2016-08-24 Heraeus Quarzglas GmbH & Co. KG Verfahren und vorrichtung zur herstellung von quarzglas aus einer polymerisierbaren polyalkylsiloxanverbindung mit membranfilter als reinigungsvorrichtung
EP3434653A1 (de) 2017-07-24 2019-01-30 Heraeus Quarzglas GmbH & Co. KG Einsatz von einer polyalkylsiloxanverbindung mit geringem siloxanolgehalt für die herstellung von synthetischem quarzglas
JP6978991B2 (ja) 2018-08-23 2021-12-08 信越化学工業株式会社 光ファイバ用多孔質ガラス母材の製造方法および製造装置
JP7463967B2 (ja) * 2018-12-04 2024-04-09 住友電気工業株式会社 ガラス微粒子堆積体の製造装置及び製造方法
CN109373196A (zh) * 2018-12-05 2019-02-22 上海正帆科技股份有限公司 一种八甲基环四硅氧烷的输送及汽化系统和方法
JP7058627B2 (ja) * 2019-06-11 2022-04-22 信越化学工業株式会社 光ファイバ用多孔質ガラス母材の製造装置および製造方法
EP4144705A4 (en) * 2020-05-01 2024-05-01 Shin-Etsu Chemical Co., Ltd. Manufacturing device for porous glass preform, manufacturing method for porous glass preform, and manufacturing method for optical fiber glass preform
EP3950610A1 (de) 2020-08-06 2022-02-09 Heraeus Quarzglas GmbH & Co. KG Alternative fluorierungsmittel ii: fluosil und sootaufbau
EP3950611A1 (de) 2020-08-06 2022-02-09 Heraeus Quarzglas GmbH & Co. KG Alternative fluorierungsmittel zur herstellung von fluoriertem quarzglas
EP4015468A1 (de) 2020-12-16 2022-06-22 Heraeus Quarzglas GmbH & Co. KG Verfahren zur herstellung von synthetischem quarzglas
EP4015467A1 (de) 2020-12-16 2022-06-22 Heraeus Quarzglas GmbH & Co. KG Verfahren zur herstellung von synthetischem quarzglas
EP4015466A1 (de) 2020-12-16 2022-06-22 Heraeus Quarzglas GmbH & Co. KG Verfahren zur herstellung von synthetischem quarzglas
USD982401S1 (en) * 2021-05-09 2023-04-04 Weber Product Development, Llc Cap designed to reseal a partially used tube of caulk for later reuse
EP4428106A1 (de) 2023-03-07 2024-09-11 Heraeus Quarzglas GmbH & Co. KG Antriebssynchronisation für soot-abscheidemaschine zur vermeidung von strukturbildungen in abscheideprozessen

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8905966D0 (en) 1989-03-15 1989-04-26 Tsl Group Plc Improved vitreous silica products
US5043002A (en) * 1990-08-16 1991-08-27 Corning Incorporated Method of making fused silica by decomposing siloxanes
US5152819A (en) * 1990-08-16 1992-10-06 Corning Incorporated Method of making fused silica
US5558687A (en) * 1994-12-30 1996-09-24 Corning Incorporated Vertical, packed-bed, film evaporator for halide-free, silicon-containing compounds
US5632797A (en) * 1994-12-30 1997-05-27 Corning Incorporated Method of providing vaporized halide-free, silicon-containing compounds
US5703191A (en) * 1995-09-01 1997-12-30 Corning Incorporated Method for purifying polyalkylsiloxanes and the resulting products
US6312656B1 (en) * 1995-12-19 2001-11-06 Corning Incorporated Method for forming silica by combustion of liquid reactants using oxygen
US6244575B1 (en) * 1996-10-02 2001-06-12 Micron Technology, Inc. Method and apparatus for vaporizing liquid precursors and system for using same
EP1044172A4 (en) * 1997-12-19 2005-01-19 Corning Inc BURNER AND PROCESS FOR PRODUCING METAL OXIDE SUES
JP2000017438A (ja) 1998-06-30 2000-01-18 Japan Pionics Co Ltd 気化器及び気化供給方法
US6546757B1 (en) * 1998-07-28 2003-04-15 Brown University Research Foundation Liquid spray pyrolysis method for the fabrication of optical fiber preforms, with reactant mixing
US6672106B1 (en) * 1998-08-07 2004-01-06 Corning Incorporated Method and apparatus for forming soot for the manufacture of glass
US6260385B1 (en) * 1998-08-07 2001-07-17 Corning Incorporated Method and burner for forming silica-containing soot
US6705127B1 (en) * 1998-10-30 2004-03-16 Corning Incorporated Methods of manufacturing soot for optical fiber preforms and preforms made by the methods
JP3685251B2 (ja) * 2000-08-31 2005-08-17 信越化学工業株式会社 球状シリカ粉末の製造方法
US6766702B2 (en) * 2001-07-16 2004-07-27 Institute For Tropospheric Research, A German Non-Profit Organization Method and apparatus for investigating temporal development of particles or droplets in gas-vapor mixture
KR20040078643A (ko) * 2001-12-04 2004-09-10 프라이맥스 인코포레이티드 증기를 증착실에 공급하는 방법 및 화학 증착 기화기
DE10302914B4 (de) * 2003-01-24 2005-12-29 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von synthetischem Quarzglas
GB2478307A (en) * 2010-03-02 2011-09-07 Heraeus Quartz Uk Ltd Manufacture of silica glass
DE102011119341A1 (de) * 2011-11-25 2013-05-29 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von synthetischem Quarzglas nach der Sootmethode
DE102011119339A1 (de) * 2011-11-25 2013-05-29 Heraeus Quarzglas Gmbh & Co. Kg Zerstäubungsverfahren zur Herstellung von synthetischem Quarzglas
DE102011119373A1 (de) * 2011-11-25 2013-05-29 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von synthetischem Quarzglas
DE102011119374A1 (de) * 2011-11-25 2013-05-29 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von synthetischem Quarzglas
DE102011121153B3 (de) * 2011-12-15 2013-03-21 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von synthetischem Quarzglas sowie Quarzglas für den Einsatz als Mantelmaterial einer optischen Faser

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220085008A (ko) * 2020-12-14 2022-06-21 신에쓰 가가꾸 고교 가부시끼가이샤 다공질 유리 모재의 제조 방법 및 제조 장치
KR102475516B1 (ko) * 2020-12-14 2022-12-07 신에쓰 가가꾸 고교 가부시끼가이샤 다공질 유리 모재의 제조 방법 및 제조 장치
US11667557B2 (en) * 2020-12-14 2023-06-06 Shin-Etsu Chemical Co., Ltd. Apparatus and method for producing porous glass preform

Also Published As

Publication number Publication date
DE102011121190A1 (de) 2013-06-20
US20150007611A1 (en) 2015-01-08
KR20140098786A (ko) 2014-08-08
JP2015505291A (ja) 2015-02-19
EP2791069A1 (de) 2014-10-22
EP2791069B1 (de) 2017-08-02
JP6138145B2 (ja) 2017-05-31
IN2014CN04381A (enExample) 2015-09-04
CN103987667B (zh) 2016-10-19
WO2013087751A1 (de) 2013-06-20
CN103987667A (zh) 2014-08-13
US9481597B2 (en) 2016-11-01

Similar Documents

Publication Publication Date Title
KR101614339B1 (ko) 합성 석영 유리의 제조 방법
US8984911B2 (en) Atomizing method for producing synthetic quartz glass
CN103946170B (zh) 根据灰料法制造合成石英玻璃的方法
AU741475B2 (en) Method and apparatus for forming silica by combustion of liquidreactants using a heater
CN103946167B (zh) 通过将二氧化硅灰料体由蒸汽相沉积在基底上制造合成石英玻璃的方法
JP2015504408A5 (enExample)
US20090317504A1 (en) Device and method for producing nanoparticles
US6260385B1 (en) Method and burner for forming silica-containing soot
US20130133378A1 (en) Method for producing synthetic quartz glass
KR101818830B1 (ko) 티타늄-도핑된 합성 석영 유리의 생산방법
KR20190052234A (ko) 광섬유 모재 증착 시스템
CN112028466B (zh) 一种用于制备光纤预制棒的有机硅原料蒸发装置
JP2004509041A (ja) チタニアドープ石英ガラスプリフォームの作成方法
Jung Flame Synthesis of Nanomaterials
MXPA00000586A (en) Method and apparatus for forming silica by combustion of liquid reactants using a heater

Legal Events

Date Code Title Description
A201 Request for examination
PA0105 International application

Patent event date: 20140613

Patent event code: PA01051R01D

Comment text: International Patent Application

PA0201 Request for examination
PG1501 Laying open of application
E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20150820

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20160318

PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20160415

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20160418

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
PR1001 Payment of annual fee

Payment date: 20190405

Start annual number: 4

End annual number: 4

PR1001 Payment of annual fee

Payment date: 20200403

Start annual number: 5

End annual number: 5

PR1001 Payment of annual fee

Payment date: 20210402

Start annual number: 6

End annual number: 6

PR1001 Payment of annual fee

Payment date: 20220408

Start annual number: 7

End annual number: 7