JP6134297B2 - 基板分離装置 - Google Patents
基板分離装置 Download PDFInfo
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- JP6134297B2 JP6134297B2 JP2014161752A JP2014161752A JP6134297B2 JP 6134297 B2 JP6134297 B2 JP 6134297B2 JP 2014161752 A JP2014161752 A JP 2014161752A JP 2014161752 A JP2014161752 A JP 2014161752A JP 6134297 B2 JP6134297 B2 JP 6134297B2
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- 239000000758 substrate Substances 0.000 title claims description 187
- 238000000926 separation method Methods 0.000 claims description 21
- 238000000034 method Methods 0.000 description 10
- 239000011521 glass Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000003486 chemical etching Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
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- Engineering & Computer Science (AREA)
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- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Nonlinear Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
140 搬送基板
200 下定盤
320 第1上定盤
321 上部空間
323 上部真空孔
325 上部真空ポンプ
327 多角リング
Claims (16)
- 搬送基板が付着した被着物を支持する下定盤と、
前記搬送基板の上に配置されて前記搬送基板に真空力を加えて被着物から分離する上定盤と、を含み、
前記上定盤は搬送基板の一側縁領域と対応する第1領域に配置される第1上定盤と、前記搬送基板の他側縁領域と対応する第3領域に配置される第3上定盤と、前記第1領域と第3領域との間の第2領域に配置される第2上定盤を含み、
前記各上定盤の下面部の縁に沿ってリングが配置され、
前記上定盤の下部面には所定の溝が形成され、前記リングは回転部によって所定の溝に回転されて収納される、基板分離装置。 - 前記各上定盤の内部には上部空間が形成され、上部空間と連通するように各上定盤の下部面の中央領域には上部真空孔が形成され、前記各上定盤の上部空間は上部真空ポンプとそれぞれ連結される請求項1に記載の基板分離装置。
- 前記各上定盤の内部には上部空間が形成され、上部空間と連通するように各上定盤の下部面の中央領域には上部真空孔が形成され、前記各上定盤の上部空間は一つの上部真空ポンプと連結される請求項1に記載の基板分離装置。
- 前記上部真空ポンプは第1上定盤に連結される第1配管と、前記上部真空ポンプと第1配管との間に配置される第1バルブと、第2上定盤に連結される第2配管と、前記上部真空ポンプと第2配管との間に配置される第2バルブと、第3上定盤に連結される第3配管と、前記上部真空ポンプと第3配管との間に配置される第3バルブを含む請求項3に記載の基板分離装置。
- 前記第1上定盤乃至第3上定盤の面積は互いに異なる請求項1に記載の基板分離装置。
- 前記第1上定盤乃至第3上定盤に供給される真空圧は面積が大きいほど真空力を大きくする請求項5に記載の基板分離装置。
- 前記真空圧は−65kPa乃至−85kPaに設定される請求項1に記載の基板分離装置。
- 前記下定盤の内部には下部空間が形成され、下部空間と連通されるように各下定盤の下部面の中央領域には下部真空孔が形成され、前記各下定盤の下部空間は下部真空ポンプと連結される請求項1に記載の基板分離装置。
- 搬送基板が付着した被着物を支持する下定盤と、
前記搬送基板の上に配置されて前記搬送基板に真空力を加えて被着物から分離する上定盤と、を含み、
前記上定盤は搬送基板の一側縁領域と対応する第1領域に配置される第1上定盤と、前記搬送基板の他側縁領域と対応する第3領域に配置される第3上定盤と、前記第1領域と第3領域との間の第2領域に配置される第2上定盤を含み、
前記第1上定盤に真空力を加えた後、第2上定盤に真空力を加えてから第3上定盤に真空力を加えて搬送基板を被付着物から分離する、基板分離装置。 - 搬送基板が付着した被着物を支持する下定盤と、
前記搬送基板の上に配置されて前記搬送基板に真空力を加えて被着物から分離する上定盤と、を含み、
前記上定盤は搬送基板の一側縁領域と対応する第1領域に配置される第1上定盤と、前記搬送基板の他側縁領域と対応する第3領域に配置される第3上定盤と、前記第1領域と第3領域との間の第2領域に配置される第2上定盤を含み、
前記第1上定盤と第3上定盤に真空力を加えた後、第2上定盤に真空力を加えて搬送基板を被付着物から分離する、基板分離装置。 - 前記搬送基板と被付着物は最外郭縁領域から内側に向かって順次に分離される請求項1に記載の基板分離装置。
- 前記搬送基板と被付着物は一側縁領域から内側に向かって他側縁領域に沿って順次に分離される請求項1に記載の基板分離装置。
- 第1真空圧を利用して、搬送基板が付着した被着物を支持する下定盤と、
前記下定盤に前記第1真空圧を供給する下部真空ポンプと、
前記搬送基板の上に配置され、第2真空圧を利用して前記搬送基板を被着物から分離する複数の上定盤と、
前記複数の上定盤に前記第2真空圧を供給する少なくとも一つの上部真空ポンプと、を含み、
前記各上定盤の下面部の縁に沿ってリングが配置され、
前記上定盤の下部面には所定の溝が形成され、前記リングは回転部によって所定の溝に回転されて収納される、基板分離装置。 - 前記少なくとも一つの上部真空ポンプは前記複数の上定盤にそれぞれ連結された複数の上部真空ポンプを含む請求項13に記載の基板分離装置。
- 前記少なくとも一つの上部真空ポンプは前記複数の上定盤に共通的に連結された一つの真空ポンプを含む請求項13に記載の基板分離装置。
- 前記上部真空ポンプと前記複数の上定盤との間に連結された複数の配管と、
前記複数の配管に配置された複数のバルブと、を含む請求項15に記載の基板分離装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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KR10-2013-0147068 | 2013-11-29 | ||
KR20130147068A KR101502239B1 (ko) | 2013-11-29 | 2013-11-29 | 기판분리장치 |
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JP2015106711A JP2015106711A (ja) | 2015-06-08 |
JP6134297B2 true JP6134297B2 (ja) | 2017-05-24 |
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JP (1) | JP6134297B2 (ja) |
KR (1) | KR101502239B1 (ja) |
CN (1) | CN104681463B (ja) |
TW (1) | TWI515818B (ja) |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH04206949A (ja) * | 1990-11-30 | 1992-07-28 | Aisin Seiki Co Ltd | Soi基板の製造方法 |
JPH08153771A (ja) * | 1994-11-29 | 1996-06-11 | Fujikoshi Mach Corp | ウェーハの供給・排出装置および供給・排出方法 |
JPH09148409A (ja) * | 1995-11-21 | 1997-06-06 | Advanced Display:Kk | 平板の吸着搬送方法 |
JP4266106B2 (ja) * | 2001-09-27 | 2009-05-20 | 株式会社東芝 | 粘着性テープの剥離装置、粘着性テープの剥離方法、半導体チップのピックアップ装置、半導体チップのピックアップ方法及び半導体装置の製造方法 |
JP2004228453A (ja) * | 2003-01-27 | 2004-08-12 | Renesas Technology Corp | 半導体装置の製造方法 |
JP4614626B2 (ja) * | 2003-02-05 | 2011-01-19 | 東京エレクトロン株式会社 | 薄肉半導体チップの製造方法 |
JP4668833B2 (ja) * | 2006-04-26 | 2011-04-13 | 三菱電機株式会社 | 半導体ウエハ分離装置及び分離方法 |
KR101054916B1 (ko) * | 2009-06-26 | 2011-08-05 | 주식회사 디엠에스 | 스템프 분리장치 |
KR101658151B1 (ko) * | 2010-04-30 | 2016-09-21 | 엘지디스플레이 주식회사 | 평판 표시 소자의 제조 장치 및 방법 |
KR101658152B1 (ko) * | 2010-05-04 | 2016-09-21 | 엘지디스플레이 주식회사 | 평판 표시 소자의 제조 장치 및 방법 |
JP5669137B2 (ja) * | 2011-03-01 | 2015-02-12 | 富士機械製造株式会社 | ダイピックアップ装置 |
KR101383281B1 (ko) * | 2011-12-30 | 2014-04-09 | 엘아이지에이디피 주식회사 | 기판 분리 장치 |
DE102012101237A1 (de) * | 2012-02-16 | 2013-08-22 | Ev Group E. Thallner Gmbh | Verfahren zum temporären Verbinden eines Produktsubstrats mit einem Trägersubstrat |
JP6377956B2 (ja) * | 2013-05-24 | 2018-08-22 | タツモ株式会社 | 剥離装置 |
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2013
- 2013-11-29 KR KR20130147068A patent/KR101502239B1/ko active IP Right Grant
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2014
- 2014-06-17 CN CN201410270236.7A patent/CN104681463B/zh active Active
- 2014-06-19 TW TW103121242A patent/TWI515818B/zh active
- 2014-08-07 JP JP2014161752A patent/JP6134297B2/ja active Active
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JP2015106711A (ja) | 2015-06-08 |
KR101502239B1 (ko) | 2015-03-19 |
CN104681463A (zh) | 2015-06-03 |
CN104681463B (zh) | 2017-12-12 |
TW201521146A (zh) | 2015-06-01 |
TWI515818B (zh) | 2016-01-01 |
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Free format text: JAPANESE INTERMEDIATE CODE: R250 |