JP6120962B2 - マルチモジュール型光子検出器及びその使用 - Google Patents
マルチモジュール型光子検出器及びその使用 Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
- G01N23/2252—Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/24—Measuring radiation intensity with semiconductor detectors
- G01T1/244—Auxiliary details, e.g. casings, cooling, damping or insulation against damage by, e.g. heat, pressure or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2441—Semiconductor detectors, e.g. diodes
- H01J2237/24415—X-ray
- H01J2237/2442—Energy-dispersive (Si-Li type) spectrometer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2446—Position sensitive detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Pathology (AREA)
- High Energy & Nuclear Physics (AREA)
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- Spectroscopy & Molecular Physics (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Measurement Of Radiation (AREA)
Description
10 本発明に係るX線検出器
11 センサヘッド
12 センサーチップ
13 端面
14 光子ビーム/X線ビーム
15 プリント回路基板
16 冷却素子16
17 熱除去手段
18 はんだ接続部
19 コリメーター
20 筐体
21 窓部
22 検出器モジュール
23 検出器軸
24 平面
25 走査型電子顕微鏡(SEM)
26 磁極片
27 電子ビーム
28 試料ホルダー
29 試料ベンチ
30 ポート
31 顕微鏡壁
32 透過型電子顕微鏡(TEM)
33 磁極片
Claims (16)
- 検出器軸の長手方向に沿った円柱状の測定指形状で、前記測定指の第1端に検出器ヘッドを有する光子検出器であって、
器前記検出器 ヘッドは、
少なくとも2以上の検出器モジュールを有し、前記検出器モジュールはそれぞれ、露出される端部を有し光子放射に反応するセンサーチップを含み、
前記検出器モジュールは、
前記検出器軸に垂直な平面上にて前記検出器軸の周りに配置され、
前記光子検出器は筐体をさらに含み、
前記筐体内に2以上の検出器モジュールを有する前記検出器ヘッドが収められ、
前記筐体は検出器軸の長手方向に沿った円柱状である、光子検出器。 - 前記検出器モジュールが、前記検出器軸に関して軸対称に配置される、
請求項1に記載の光子検出器。 - 少なくとも1つのセンサーチップが、前記検出器軸に垂直な前記平面に対して傾いて設けられる、
請求項1に記載の光子検出器。 - 前記センサーチップの前記端部と、前記光子検出器の視線方向の前記検出器軸と、の間の角度が90度より小さくなるように傾いている、
請求項3に記載の光子検出器。 - 前記センサーチップと前記検出器軸との角度が10度以上90度未満である、
請求項4に記載の光子検出器。 - 前記検出器モジュールの数が2個〜12個である、
請求項1に記載の光子検出器。 - 前記検出器モジュールはそれぞれ、さらにプリント回路基板を有し、
前記プリント回路基板は、前記センサーチップと面し、前記センサーチップの前記端部と逆向きに設けられ、
前記センサーチップと信号導電可能に接続されている、
請求項1に記載の光子検出器。 - 前記検出器モジュールはそれぞれ、さらにアクティブ冷却素子を有する、
請求項1に記載の光子検出器。 - 前記検出器モジュールはそれぞれ、さらに熱伝導ベースを有し、
前記熱伝導ベースは、検出器の共通の熱除去手段又は共通のアクティブ冷却素子と熱的に接触している、
請求項1に記載の光子検出器。 - 複数の前記センサーチップの上流にそれぞれに少なくとも1つのコリメーター、又は複数の前記センサーチップ全体として上流に少なくとも1つのコリメーター、をさらに有する、
請求項1に記載の光子検出器。 - 複数の前記センサーチップのそれぞれが上流に少なくとも1つの窓部、又は複数の前記センサーチップ全体として上流に少なくとも1つの窓部をさらに有し、
前記窓部は光子放射透過性である、
請求項1に記載の光子検出器。 - 前記センサーチップは、 シリコンドリフト検出器(SDD)で形成される、
請求項1に記載の光子検出器。 - 互いに独立した前記センサーチップの前記端部の表面積は、2mm2 〜100mm2 である、
請求項1に記載の光子検出器。 - 前記アクティブ冷却素子は熱電冷却素子である、
請求項8に記載の光子検出器。 - 前記請求項1に記載された前記光子検出器を用いた、電子顕微鏡によるエネルギー分散型X線検出のための方法。
- 前記電子顕微鏡は透過型電子顕微鏡であり、
前記光子検出器は、前記検出器軸とともに実質的に試料が配置された平面に配置される、
請求項15に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102012213130.2A DE102012213130A1 (de) | 2012-07-26 | 2012-07-26 | Mehrfachmodul-Photonendetektor und seine Verwendung |
DE102012213130.2 | 2012-07-26 | ||
PCT/EP2013/065092 WO2014016180A1 (de) | 2012-07-26 | 2013-07-17 | Mehrfachmodul-photonendetektor und seine verwendung |
Publications (2)
Publication Number | Publication Date |
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JP2015529805A JP2015529805A (ja) | 2015-10-08 |
JP6120962B2 true JP6120962B2 (ja) | 2017-04-26 |
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JP2015523497A Active JP6120962B2 (ja) | 2012-07-26 | 2013-07-17 | マルチモジュール型光子検出器及びその使用 |
Country Status (5)
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US (2) | US9797848B2 (ja) |
EP (1) | EP2878004B1 (ja) |
JP (1) | JP6120962B2 (ja) |
DE (1) | DE102012213130A1 (ja) |
WO (1) | WO2014016180A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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SG114502A1 (en) * | 2000-10-24 | 2005-09-28 | Semiconductor Energy Lab | Light emitting device and method of driving the same |
WO2017001367A1 (en) * | 2015-07-02 | 2017-01-05 | Nestec S.A. | Mobile liquid tank for heating liquids |
US20180217059A1 (en) * | 2015-07-31 | 2018-08-02 | Fei Company | Segmented detector for a charged particle beam device |
WO2018086853A1 (en) * | 2016-11-09 | 2018-05-17 | Imec Vzw | Apparatus for combined stem and eds tomography |
CN110376229B (zh) | 2019-06-12 | 2020-09-04 | 聚束科技(北京)有限公司 | 具备复合式探测系统的扫描电子显微镜和样品探测方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2588833B2 (ja) | 1993-06-25 | 1997-03-12 | 株式会社トプコン | 分析電子顕微鏡 |
JPH08222172A (ja) * | 1995-02-16 | 1996-08-30 | Hitachi Ltd | 電子顕微鏡 |
JPH1186783A (ja) | 1997-09-10 | 1999-03-30 | Nec Corp | 電子エネルギ分析装置 |
EP1022766B1 (en) * | 1998-11-30 | 2004-02-04 | Advantest Corporation | Particle beam apparatus |
DE102005037860A1 (de) | 2005-08-10 | 2007-02-22 | Deutsches Elektronen-Synchrotron Desy | Röntgendetektormodul |
DE102008014578B3 (de) | 2008-03-14 | 2009-11-26 | Bruker Axs Microanalysis Gmbh | Streufeldarme Magnetfalle sowie diese enthaltender Röntgendetektor |
DE102008019406B4 (de) * | 2008-04-17 | 2011-12-15 | Politecnico Di Milano | Strahlungsdetektor und Verfahren zum Detektieren von elektromagnetischer Strahlung |
DE102008028487B3 (de) | 2008-06-13 | 2010-01-07 | Bruker Axs Microanalysis Gmbh | Sensorkopf für einen Röntgendetektor sowie diesen Sensorkopf enthaltender Röntgendetektor |
US8080791B2 (en) | 2008-12-12 | 2011-12-20 | Fei Company | X-ray detector for electron microscope |
DE102009024928B4 (de) | 2009-04-06 | 2012-07-12 | Bruker Nano Gmbh | Detektor, Vorrichtung und Verfahren zur gleichzeitigen, energiedispersiven Aufnahme von Rückstreuelektronen und Röntgenquanten |
CN103887134B (zh) * | 2009-05-15 | 2017-01-11 | Fei 公司 | 带集成探测器的电子显微镜 |
DE102009026946B4 (de) * | 2009-06-15 | 2012-03-08 | Bruker Nano Gmbh | Störungsarmer Sensorkopf für einen Strahlungsdetektor sowie diesen störungsarmen Sensorkopf enthaltender Strahlungsdetektor |
DE102010056321B9 (de) * | 2010-12-27 | 2018-03-22 | Carl Zeiss Microscopy Gmbh | Partikelstrahlmikroskop |
DE102011012989B4 (de) | 2011-03-03 | 2019-05-02 | Ketek Gmbh | Sensorkopf für einen Röntgendetektor |
-
2012
- 2012-07-26 DE DE102012213130.2A patent/DE102012213130A1/de not_active Ceased
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2013
- 2013-07-17 EP EP13737282.7A patent/EP2878004B1/de active Active
- 2013-07-17 WO PCT/EP2013/065092 patent/WO2014016180A1/de active Application Filing
- 2013-07-17 JP JP2015523497A patent/JP6120962B2/ja active Active
- 2013-07-17 US US14/415,405 patent/US9797848B2/en active Active
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2017
- 2017-09-22 US US15/712,712 patent/US10197514B2/en active Active
Also Published As
Publication number | Publication date |
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US9797848B2 (en) | 2017-10-24 |
EP2878004B1 (de) | 2022-10-26 |
US10197514B2 (en) | 2019-02-05 |
JP2015529805A (ja) | 2015-10-08 |
EP2878004A1 (de) | 2015-06-03 |
US20180038810A1 (en) | 2018-02-08 |
WO2014016180A1 (de) | 2014-01-30 |
US20150168320A1 (en) | 2015-06-18 |
DE102012213130A1 (de) | 2014-01-30 |
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