JP6115205B2 - 屈曲振動片、屈曲振動片の製造方法、振動デバイス、電子機器、および移動体 - Google Patents

屈曲振動片、屈曲振動片の製造方法、振動デバイス、電子機器、および移動体 Download PDF

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Publication number
JP6115205B2
JP6115205B2 JP2013050101A JP2013050101A JP6115205B2 JP 6115205 B2 JP6115205 B2 JP 6115205B2 JP 2013050101 A JP2013050101 A JP 2013050101A JP 2013050101 A JP2013050101 A JP 2013050101A JP 6115205 B2 JP6115205 B2 JP 6115205B2
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arm
base
bending vibration
vibration piece
width
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JP2014176064A (ja
JP2014176064A5 (enExample
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明法 山田
明法 山田
良伊 小林
良伊 小林
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Seiko Epson Corp
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Seiko Epson Corp
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  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2013050101A 2013-03-13 2013-03-13 屈曲振動片、屈曲振動片の製造方法、振動デバイス、電子機器、および移動体 Active JP6115205B2 (ja)

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JP2013050101A JP6115205B2 (ja) 2013-03-13 2013-03-13 屈曲振動片、屈曲振動片の製造方法、振動デバイス、電子機器、および移動体

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JP2013050101A JP6115205B2 (ja) 2013-03-13 2013-03-13 屈曲振動片、屈曲振動片の製造方法、振動デバイス、電子機器、および移動体

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JP2014176064A JP2014176064A (ja) 2014-09-22
JP2014176064A5 JP2014176064A5 (enExample) 2016-03-31
JP6115205B2 true JP6115205B2 (ja) 2017-04-19

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7645104B2 (ja) 2021-03-15 2025-03-13 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片及び圧電振動子

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52129395A (en) * 1976-04-23 1977-10-29 Seiko Instr & Electronics Ltd Tuner fork type peizoelectric resonatpr
JPH0298522U (enExample) * 1988-04-06 1990-08-06
JP2002141770A (ja) * 2000-11-01 2002-05-17 Citizen Watch Co Ltd 小型振動子
JP2004297769A (ja) * 2003-03-13 2004-10-21 Seiko Epson Corp 水晶振動片、水晶振動片の製造方法、この水晶振動片をパッケージに収容した水晶デバイス並びに、水晶デバイスを利用した電子機器
JP4517332B2 (ja) * 2003-04-28 2010-08-04 有限会社ピエデック技術研究所 水晶振動子と水晶ユニットと水晶発振器の製造方法
JP4301201B2 (ja) * 2005-04-27 2009-07-22 セイコーエプソン株式会社 圧電発振器
ATE421799T1 (de) * 2005-06-09 2009-02-15 Eta Sa Mft Horlogere Suisse Kompakter piezoelektrischer resonator
JP2009060478A (ja) * 2007-09-03 2009-03-19 Nippon Dempa Kogyo Co Ltd 圧電振動片の製造方法及び音叉型圧電振動片
JP5216288B2 (ja) * 2007-09-25 2013-06-19 日本電波工業株式会社 圧電振動片の製造方法、圧電デバイスの製造方法
JP2012105044A (ja) * 2010-11-10 2012-05-31 Seiko Epson Corp 振動デバイスおよび電子機器

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