JP6102676B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6102676B2 JP6102676B2 JP2013220523A JP2013220523A JP6102676B2 JP 6102676 B2 JP6102676 B2 JP 6102676B2 JP 2013220523 A JP2013220523 A JP 2013220523A JP 2013220523 A JP2013220523 A JP 2013220523A JP 6102676 B2 JP6102676 B2 JP 6102676B2
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- metal member
- heat generating
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- solder
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- 239000004065 semiconductor Substances 0.000 title claims description 72
- 229910052751 metal Inorganic materials 0.000 claims description 75
- 239000002184 metal Substances 0.000 claims description 75
- 229910000679 solder Inorganic materials 0.000 claims description 58
- 230000002093 peripheral effect Effects 0.000 claims description 44
- 239000000463 material Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims 3
- 230000017525 heat dissipation Effects 0.000 description 16
- 239000011347 resin Substances 0.000 description 14
- 229920005989 resin Polymers 0.000 description 14
- 238000007789 sealing Methods 0.000 description 14
- 230000004048 modification Effects 0.000 description 13
- 238000012986 modification Methods 0.000 description 13
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 239000007769 metal material Substances 0.000 description 5
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/33—Structure, shape, material or disposition of the layer connectors after the connecting process of a plurality of layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/33—Structure, shape, material or disposition of the layer connectors after the connecting process of a plurality of layer connectors
- H01L2224/331—Disposition
- H01L2224/3318—Disposition being disposed on at least two different sides of the body, e.g. dual array
- H01L2224/33181—On opposite sides of the body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8338—Bonding interfaces outside the semiconductor or solid-state body
- H01L2224/83385—Shape, e.g. interlocking features
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
- H01L2924/13055—Insulated gate bipolar transistor [IGBT]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Description
先ず、図1〜図3に基づき、半導体装置の概略構成について説明する。
本実施形態において、上記実施形態に示した半導体装置10と共通する部分についての説明は割愛する。
本実施形態において、第2実施形態に示した半導体装置10と共通する部分についての説明は割愛する。
本実施形態において、第1実施形態に示した半導体装置10と共通する部分についての説明は割愛する。
Claims (7)
- 半導体素子(20)を少なくとも含み、平面矩形状の一面(12a)を有する発熱部(12)と、
前記発熱部の一面に対向配置される第1金属部材(14)と、
前記発熱部の一面と前記第1金属部材との間に介在され、前記発熱部と前記第1金属部材とを接続するはんだ(16)と、を備え、
前記第1金属部材は、前記発熱部の一面と対向する対向面のうち、前記一面の直下にのみ位置し、前記はんだを介して前記発熱部と接続される対向部(40)と、リフロー時において前記対向部と前記発熱部の一面との間から溢れ出る前記はんだを収容するために、前記対向部の外周端に沿いつつ前記外周端に全周で隣接するように環状に設けられる溝部(42)と、を有するとともに、前記はんだよりも熱伝導性に優れる材料を用いて形成されており、
前記第1金属部材の厚み方向をZ方向、該Z方向に直交しつつ前記一面の矩形の1辺に沿う方向をX方向、前記Z方向及び前記X方向の両方向に直交するY方向とすると、
前記溝部の内周部分(44)は、前記X方向において相対する一対の第1辺部(44a)と、前記Y方向において相対する一対の第2辺部(44b)と、を有し、
一対の前記第1辺部は、それぞれ前記X方向において離反する側に凸(48a)の凹凸形状をなすとともに、凹(50a)間の前記X方向に沿う最短距離(Lxmin)は、前記発熱部の一面における前記X方向に沿う長さよりも短くされ、
一対の前記第2辺部は、それぞれ前記Y方向において離反する側に凸(48b)の凹凸形状をなすとともに、凹(50b)間の前記Y方向に沿う最短距離(Lymin)は、前記発熱部の一面における前記Y方向に沿う長さよりも短くされることを特徴とする半導体装置。 - 一対の前記第1辺部(44a)における凸(48a)間の前記X方向に沿う最長距離(Lxmax)は、前記発熱部(12)の一面(12a)における前記X方向に沿う長さと等しくされ、
一対の前記第2辺部(44b)における凸(48b)間の前記Y方向に沿う最長距離(Lymax)は、前記発熱部の一面における前記Y方向に沿う長さと等しくされることを特徴とする請求項1に記載の半導体装置。 - 前記溝部(42)の内周部分(44)は、n回対称形状となっていることを特徴とする請求項1又は請求項2に記載の半導体装置。
- 一対の前記第1辺部(44a)は、前記X方向において前記第1辺部間の中心(52)を通り、前記Y方向に沿う仮想線(54)に対して、線対称とされ、
一対の前記第2辺部(44b)は、前記Y方向において前記第2辺部間の中心(52)を通り、前記X方向に沿う仮想線(56)に対して、線対称とされることを特徴とする請求項3に記載の半導体装置。 - 前記溝部(42)の断面形状は、前記対向部(40)との境界に対して外周側に離れて頂点(58)を有する楔形状とされることを特徴とする請求項1〜4いずれか1項に記載の半導体装置。
- 前記溝部(42)の断面形状は、弧状とされることを特徴とする請求項1〜4いずれか1項に記載の半導体装置。
- 前記第1金属部材(14)との間に前記発熱部(12)を挟むように設けられ、前記半導体素子(20)と電気的に接続される第2金属部材(30)を備え、
前記発熱部は、前記半導体素子と、前記半導体素子と前記第1金属部材との間に設けられ、前記半導体素子と前記第1金属部材とを電気的に中継するターミナル(24)と、を有し、
前記ターミナルは、前記はんだ(16)を介して前記第1金属部材と接続されることを特徴とする請求項1〜6いずれか1項に記載の半導体装置。
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JP2013220523A JP6102676B2 (ja) | 2013-10-23 | 2013-10-23 | 半導体装置 |
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JP2013220523A JP6102676B2 (ja) | 2013-10-23 | 2013-10-23 | 半導体装置 |
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JP2015082614A JP2015082614A (ja) | 2015-04-27 |
JP6102676B2 true JP6102676B2 (ja) | 2017-03-29 |
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JP2013220523A Expired - Fee Related JP6102676B2 (ja) | 2013-10-23 | 2013-10-23 | 半導体装置 |
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Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6726821B2 (ja) | 2017-01-10 | 2020-07-22 | 株式会社デンソー | 半導体装置の製造方法 |
JP6969501B2 (ja) | 2018-05-28 | 2021-11-24 | 株式会社デンソー | 半導体装置 |
JP7010167B2 (ja) | 2018-07-25 | 2022-01-26 | 株式会社デンソー | 半導体装置 |
JP7059970B2 (ja) | 2019-03-11 | 2022-04-26 | 株式会社デンソー | 半導体装置 |
JP7095632B2 (ja) | 2019-03-11 | 2022-07-05 | 株式会社デンソー | 半導体装置 |
JP7263196B2 (ja) * | 2019-09-30 | 2023-04-24 | 株式会社鷺宮製作所 | 弁装置及び冷凍サイクル装置 |
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JPH0493142U (ja) * | 1990-12-25 | 1992-08-13 | ||
JP4702196B2 (ja) * | 2005-09-12 | 2011-06-15 | 株式会社デンソー | 半導体装置 |
JP2013123016A (ja) * | 2011-12-12 | 2013-06-20 | Denso Corp | 半導体装置 |
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