JP6087709B2 - リニア駆動ユニット - Google Patents

リニア駆動ユニット Download PDF

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Publication number
JP6087709B2
JP6087709B2 JP2013086577A JP2013086577A JP6087709B2 JP 6087709 B2 JP6087709 B2 JP 6087709B2 JP 2013086577 A JP2013086577 A JP 2013086577A JP 2013086577 A JP2013086577 A JP 2013086577A JP 6087709 B2 JP6087709 B2 JP 6087709B2
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JP
Japan
Prior art keywords
guide shaft
drive unit
linear drive
linear actuator
linear
Prior art date
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Expired - Fee Related
Application number
JP2013086577A
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English (en)
Japanese (ja)
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JP2014212591A (ja
JP2014212591A5 (cg-RX-API-DMAC7.html
Inventor
西谷　仁志
仁志 西谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2013086577A priority Critical patent/JP6087709B2/ja
Publication of JP2014212591A publication Critical patent/JP2014212591A/ja
Publication of JP2014212591A5 publication Critical patent/JP2014212591A5/ja
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Publication of JP6087709B2 publication Critical patent/JP6087709B2/ja
Expired - Fee Related legal-status Critical Current
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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2013086577A 2013-04-17 2013-04-17 リニア駆動ユニット Expired - Fee Related JP6087709B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013086577A JP6087709B2 (ja) 2013-04-17 2013-04-17 リニア駆動ユニット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013086577A JP6087709B2 (ja) 2013-04-17 2013-04-17 リニア駆動ユニット

Publications (3)

Publication Number Publication Date
JP2014212591A JP2014212591A (ja) 2014-11-13
JP2014212591A5 JP2014212591A5 (cg-RX-API-DMAC7.html) 2016-06-09
JP6087709B2 true JP6087709B2 (ja) 2017-03-01

Family

ID=51931963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013086577A Expired - Fee Related JP6087709B2 (ja) 2013-04-17 2013-04-17 リニア駆動ユニット

Country Status (1)

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JP (1) JP6087709B2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2022113510A1 (cg-RX-API-DMAC7.html) * 2020-11-24 2022-06-02

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0687772U (ja) * 1993-05-31 1994-12-22 富士機工株式会社 車両用変速装置
JPH08290360A (ja) * 1995-04-19 1996-11-05 Nikon Corp 研削加工用砥石のドレッシング装置
JPH09150343A (ja) * 1995-11-24 1997-06-10 Unisia Jecs Corp 防塵カバー
JP2006202654A (ja) * 2005-01-21 2006-08-03 Horon:Kk ステージ
WO2006106697A1 (ja) * 2005-03-30 2006-10-12 Thk Co., Ltd. リニアモータアクチュエータ
JP2006280124A (ja) * 2005-03-30 2006-10-12 Thk Co Ltd リニアモータアクチュエータ

Also Published As

Publication number Publication date
JP2014212591A (ja) 2014-11-13

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