JP6046051B2 - 工業用金属蒸気発生器のための自動供給装置 - Google Patents

工業用金属蒸気発生器のための自動供給装置 Download PDF

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JP6046051B2
JP6046051B2 JP2013548844A JP2013548844A JP6046051B2 JP 6046051 B2 JP6046051 B2 JP 6046051B2 JP 2013548844 A JP2013548844 A JP 2013548844A JP 2013548844 A JP2013548844 A JP 2013548844A JP 6046051 B2 JP6046051 B2 JP 6046051B2
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metal
pot
pipe
evaporation
valve
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JP2014505794A (ja
JP2014505794A5 (enExample
Inventor
ピエール バナスザク,
ピエール バナスザク,
ディディエ マルネッフェ,
ディディエ マルネッフェ,
ブルーノ シュミッツ,
ブルーノ シュミッツ,
エリック シルバーバーグ,
エリック シルバーバーグ,
リュク ヴァニー,
リュク ヴァニー,
Original Assignee
アルセロールミタル インベスティガシオン イ デサローロ,エス.エル.
アルセロールミタル インベスティガシオン イ デサローロ,エス.エル.
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54Apparatus specially adapted for continuous coating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/16Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/246Replenishment of source material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP2013548844A 2011-01-14 2012-01-12 工業用金属蒸気発生器のための自動供給装置 Active JP6046051B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP11151004.6 2011-01-14
EP11151004 2011-01-14
PCT/EP2012/050432 WO2012095489A1 (fr) 2011-01-14 2012-01-12 Dispositif d'alimentation automatique d'un generateur de vapeur metallique industriel

Publications (3)

Publication Number Publication Date
JP2014505794A JP2014505794A (ja) 2014-03-06
JP2014505794A5 JP2014505794A5 (enExample) 2014-11-27
JP6046051B2 true JP6046051B2 (ja) 2016-12-14

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JP2013548844A Active JP6046051B2 (ja) 2011-01-14 2012-01-12 工業用金属蒸気発生器のための自動供給装置

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US (1) US10011905B2 (enExample)
EP (1) EP2663665B1 (enExample)
JP (1) JP6046051B2 (enExample)
KR (1) KR101786160B1 (enExample)
CN (1) CN103328680B (enExample)
AU (1) AU2012206581B2 (enExample)
BR (1) BR112013018030B1 (enExample)
CA (1) CA2824248C (enExample)
ES (1) ES2538661T3 (enExample)
HU (1) HUE026398T2 (enExample)
IN (1) IN2013DN06279A (enExample)
MX (1) MX342299B (enExample)
PL (1) PL2663665T3 (enExample)
RU (1) RU2584369C2 (enExample)
UA (1) UA111602C2 (enExample)
WO (1) WO2012095489A1 (enExample)
ZA (1) ZA201305032B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2579799B2 (ja) 1987-07-09 1997-02-12 グラヴルベル 小球化炉およびガラス質ビーズの製造方法

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101461738B1 (ko) * 2012-12-21 2014-11-14 주식회사 포스코 가열장치 및 이를 포함하는 코팅 시스템
US9240584B1 (en) * 2012-12-27 2016-01-19 Sakti3, Inc. Phase change material source for physical vapor deposition
CN105793464B (zh) * 2013-11-05 2018-01-02 塔塔钢铁荷兰科技有限责任公司 用于控制蒸发器装置中的液体金属的组成的方法和设备
ES2787924T3 (es) * 2016-05-03 2020-10-19 Tata Steel Nederland Tech Bv Aparato para alimentar un metal líquido a un dispositivo evaporador
WO2018020296A1 (en) 2016-07-27 2018-02-01 Arcelormittal Apparatus and method for vacuum deposition
EP3735996B1 (de) * 2019-05-07 2023-09-27 Free Life Medical GmbH Bidirektionale perfusionskanüle
CN112505286B (zh) * 2019-09-16 2023-08-11 中国科学院上海光学精密机械研究所 一种锌致液态金属裂纹形成条件的检测装置及方法
CN113930738B (zh) * 2020-06-29 2023-09-12 宝山钢铁股份有限公司 一种真空镀膜用的金属蒸汽调制装置及其调制方法
CN113957389B (zh) * 2020-07-21 2023-08-11 宝山钢铁股份有限公司 一种具有多孔降噪及均匀化分配金属蒸汽的真空镀膜装置
US20220090256A1 (en) 2020-09-18 2022-03-24 Applied Materials, Inc. Evaporation apparatus, vapor deposition apparatus, and evaporation method
CN114029001B (zh) * 2021-12-03 2023-11-24 上海镁源动力科技有限公司 一种用于液态金属原料自动上料的装置及上料方法
EP4446459A1 (en) * 2023-04-11 2024-10-16 NEOVAC GmbH Evaporation crucible and evaporation unit

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1505064A2 (ru) * 1987-08-04 1994-12-15 Специализированное конструкторско-технологическое бюро с опытным производством Института электроники им.У.А.Арифова Электродуговой испаритель
US5356673A (en) * 1991-03-18 1994-10-18 Jet Process Corporation Evaporation system and method for gas jet deposition of thin film materials
BE1010351A6 (fr) 1996-06-13 1998-06-02 Centre Rech Metallurgique Procede et dispositif pour revetir en continu un substrat en mouvement au moyen d'une vapeur metallique.
JP3901773B2 (ja) * 1996-11-26 2007-04-04 三菱重工業株式会社 真空蒸着装置
LV13383B (en) * 2004-05-27 2006-02-20 Sidrabe As Method and device for vacuum vaporization metals or alloys
EP1972699A1 (fr) * 2007-03-20 2008-09-24 ArcelorMittal France Procede de revetement d'un substrat et installation de depot sous vide d'alliage metallique
EP2048261A1 (fr) * 2007-10-12 2009-04-15 ArcelorMittal France Générateur de vapeur industriel pour le dépôt d'un revêtement d'alliage sur une bande métallique
EP2199425A1 (fr) * 2008-12-18 2010-06-23 ArcelorMittal France Générateur de vapeur industriel pour le dépôt d'un revêtement d'alliage sur une bande métallique (II)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2579799B2 (ja) 1987-07-09 1997-02-12 グラヴルベル 小球化炉およびガラス質ビーズの製造方法

Also Published As

Publication number Publication date
CA2824248A1 (en) 2012-07-19
MX2013008174A (es) 2013-12-02
MX342299B (es) 2016-09-23
ZA201305032B (en) 2014-07-30
BR112013018030A2 (pt) 2020-10-27
CN103328680A (zh) 2013-09-25
CN103328680B (zh) 2015-05-20
JP2014505794A (ja) 2014-03-06
ES2538661T3 (es) 2015-06-23
PL2663665T3 (pl) 2015-08-31
IN2013DN06279A (enExample) 2015-08-14
EP2663665A1 (fr) 2013-11-20
US20140127406A1 (en) 2014-05-08
AU2012206581B2 (en) 2017-03-30
EP2663665B1 (fr) 2015-03-11
KR20140041436A (ko) 2014-04-04
CA2824248C (en) 2019-11-05
UA111602C2 (uk) 2016-05-25
HUE026398T2 (en) 2016-06-28
WO2012095489A1 (fr) 2012-07-19
KR101786160B1 (ko) 2017-10-17
RU2584369C2 (ru) 2016-05-20
BR112013018030B1 (pt) 2021-05-18
RU2013137228A (ru) 2015-02-20
US10011905B2 (en) 2018-07-03

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