AU2012206581B2 - Automatic feeding device for an industrial metal-vapor generator - Google Patents

Automatic feeding device for an industrial metal-vapor generator Download PDF

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Publication number
AU2012206581B2
AU2012206581B2 AU2012206581A AU2012206581A AU2012206581B2 AU 2012206581 B2 AU2012206581 B2 AU 2012206581B2 AU 2012206581 A AU2012206581 A AU 2012206581A AU 2012206581 A AU2012206581 A AU 2012206581A AU 2012206581 B2 AU2012206581 B2 AU 2012206581B2
Authority
AU
Australia
Prior art keywords
metal
pot
vapor
facility
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
AU2012206581A
Other languages
English (en)
Other versions
AU2012206581A1 (en
Inventor
Pierre Banaszak
Didier Marneffe
Bruno Schmitz
Eric Silberberg
Luc Vanhee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ArcelorMittal Investigacion y Desarrollo SL
Original Assignee
ArcelorMittal Investigacion y Desarrollo SL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ArcelorMittal Investigacion y Desarrollo SL filed Critical ArcelorMittal Investigacion y Desarrollo SL
Publication of AU2012206581A1 publication Critical patent/AU2012206581A1/en
Application granted granted Critical
Publication of AU2012206581B2 publication Critical patent/AU2012206581B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
AU2012206581A 2011-01-14 2012-01-12 Automatic feeding device for an industrial metal-vapor generator Active AU2012206581B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP11151004.6 2011-01-14
EP11151004 2011-01-14
PCT/EP2012/050432 WO2012095489A1 (fr) 2011-01-14 2012-01-12 Dispositif d'alimentation automatique d'un generateur de vapeur metallique industriel

Publications (2)

Publication Number Publication Date
AU2012206581A1 AU2012206581A1 (en) 2013-08-08
AU2012206581B2 true AU2012206581B2 (en) 2017-03-30

Family

ID=43711015

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2012206581A Active AU2012206581B2 (en) 2011-01-14 2012-01-12 Automatic feeding device for an industrial metal-vapor generator

Country Status (17)

Country Link
US (1) US10011905B2 (enExample)
EP (1) EP2663665B1 (enExample)
JP (1) JP6046051B2 (enExample)
KR (1) KR101786160B1 (enExample)
CN (1) CN103328680B (enExample)
AU (1) AU2012206581B2 (enExample)
BR (1) BR112013018030B1 (enExample)
CA (1) CA2824248C (enExample)
ES (1) ES2538661T3 (enExample)
HU (1) HUE026398T2 (enExample)
IN (1) IN2013DN06279A (enExample)
MX (1) MX342299B (enExample)
PL (1) PL2663665T3 (enExample)
RU (1) RU2584369C2 (enExample)
UA (1) UA111602C2 (enExample)
WO (1) WO2012095489A1 (enExample)
ZA (1) ZA201305032B (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2206575B (en) 1987-07-09 1992-01-02 Glaverbel Spherulizing furnace and process of manufacturing vitreous beads
KR101461738B1 (ko) * 2012-12-21 2014-11-14 주식회사 포스코 가열장치 및 이를 포함하는 코팅 시스템
US9240584B1 (en) * 2012-12-27 2016-01-19 Sakti3, Inc. Phase change material source for physical vapor deposition
CN105793464B (zh) * 2013-11-05 2018-01-02 塔塔钢铁荷兰科技有限责任公司 用于控制蒸发器装置中的液体金属的组成的方法和设备
ES2787924T3 (es) * 2016-05-03 2020-10-19 Tata Steel Nederland Tech Bv Aparato para alimentar un metal líquido a un dispositivo evaporador
WO2018020296A1 (en) 2016-07-27 2018-02-01 Arcelormittal Apparatus and method for vacuum deposition
EP3735996B1 (de) * 2019-05-07 2023-09-27 Free Life Medical GmbH Bidirektionale perfusionskanüle
CN112505286B (zh) * 2019-09-16 2023-08-11 中国科学院上海光学精密机械研究所 一种锌致液态金属裂纹形成条件的检测装置及方法
CN113930738B (zh) * 2020-06-29 2023-09-12 宝山钢铁股份有限公司 一种真空镀膜用的金属蒸汽调制装置及其调制方法
CN113957389B (zh) * 2020-07-21 2023-08-11 宝山钢铁股份有限公司 一种具有多孔降噪及均匀化分配金属蒸汽的真空镀膜装置
US20220090256A1 (en) 2020-09-18 2022-03-24 Applied Materials, Inc. Evaporation apparatus, vapor deposition apparatus, and evaporation method
CN114029001B (zh) * 2021-12-03 2023-11-24 上海镁源动力科技有限公司 一种用于液态金属原料自动上料的装置及上料方法
EP4446459A1 (en) * 2023-04-11 2024-10-16 NEOVAC GmbH Evaporation crucible and evaporation unit

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005116290A1 (en) * 2004-05-27 2005-12-08 Sidrabe, Inc. Method and apparatus for vacuum deposition by vaporizing metals and metal alloys
EP1972699A1 (fr) * 2007-03-20 2008-09-24 ArcelorMittal France Procede de revetement d'un substrat et installation de depot sous vide d'alliage metallique
EP2048261A1 (fr) * 2007-10-12 2009-04-15 ArcelorMittal France Générateur de vapeur industriel pour le dépôt d'un revêtement d'alliage sur une bande métallique

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1505064A2 (ru) * 1987-08-04 1994-12-15 Специализированное конструкторско-технологическое бюро с опытным производством Института электроники им.У.А.Арифова Электродуговой испаритель
US5356673A (en) * 1991-03-18 1994-10-18 Jet Process Corporation Evaporation system and method for gas jet deposition of thin film materials
BE1010351A6 (fr) 1996-06-13 1998-06-02 Centre Rech Metallurgique Procede et dispositif pour revetir en continu un substrat en mouvement au moyen d'une vapeur metallique.
JP3901773B2 (ja) * 1996-11-26 2007-04-04 三菱重工業株式会社 真空蒸着装置
EP2199425A1 (fr) * 2008-12-18 2010-06-23 ArcelorMittal France Générateur de vapeur industriel pour le dépôt d'un revêtement d'alliage sur une bande métallique (II)

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005116290A1 (en) * 2004-05-27 2005-12-08 Sidrabe, Inc. Method and apparatus for vacuum deposition by vaporizing metals and metal alloys
EP1972699A1 (fr) * 2007-03-20 2008-09-24 ArcelorMittal France Procede de revetement d'un substrat et installation de depot sous vide d'alliage metallique
EP2048261A1 (fr) * 2007-10-12 2009-04-15 ArcelorMittal France Générateur de vapeur industriel pour le dépôt d'un revêtement d'alliage sur une bande métallique

Also Published As

Publication number Publication date
CA2824248A1 (en) 2012-07-19
MX2013008174A (es) 2013-12-02
MX342299B (es) 2016-09-23
ZA201305032B (en) 2014-07-30
BR112013018030A2 (pt) 2020-10-27
CN103328680A (zh) 2013-09-25
CN103328680B (zh) 2015-05-20
JP2014505794A (ja) 2014-03-06
ES2538661T3 (es) 2015-06-23
PL2663665T3 (pl) 2015-08-31
IN2013DN06279A (enExample) 2015-08-14
JP6046051B2 (ja) 2016-12-14
EP2663665A1 (fr) 2013-11-20
US20140127406A1 (en) 2014-05-08
EP2663665B1 (fr) 2015-03-11
KR20140041436A (ko) 2014-04-04
CA2824248C (en) 2019-11-05
UA111602C2 (uk) 2016-05-25
HUE026398T2 (en) 2016-06-28
WO2012095489A1 (fr) 2012-07-19
KR101786160B1 (ko) 2017-10-17
RU2584369C2 (ru) 2016-05-20
BR112013018030B1 (pt) 2021-05-18
RU2013137228A (ru) 2015-02-20
US10011905B2 (en) 2018-07-03

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