JP6044222B2 - 振動片、振動子、電子デバイス、電子機器、および移動体 - Google Patents
振動片、振動子、電子デバイス、電子機器、および移動体 Download PDFInfo
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- JP6044222B2 JP6044222B2 JP2012206655A JP2012206655A JP6044222B2 JP 6044222 B2 JP6044222 B2 JP 6044222B2 JP 2012206655 A JP2012206655 A JP 2012206655A JP 2012206655 A JP2012206655 A JP 2012206655A JP 6044222 B2 JP6044222 B2 JP 6044222B2
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- base
- vibrating
- insulating layer
- lower electrode
- film
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
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- 229910000833 kovar Inorganic materials 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
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Images
Landscapes
- Oscillators With Electromechanical Resonators (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012206655A JP6044222B2 (ja) | 2012-09-20 | 2012-09-20 | 振動片、振動子、電子デバイス、電子機器、および移動体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012206655A JP6044222B2 (ja) | 2012-09-20 | 2012-09-20 | 振動片、振動子、電子デバイス、電子機器、および移動体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014064078A JP2014064078A (ja) | 2014-04-10 |
| JP2014064078A5 JP2014064078A5 (enrdf_load_stackoverflow) | 2015-09-17 |
| JP6044222B2 true JP6044222B2 (ja) | 2016-12-14 |
Family
ID=50618959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012206655A Expired - Fee Related JP6044222B2 (ja) | 2012-09-20 | 2012-09-20 | 振動片、振動子、電子デバイス、電子機器、および移動体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6044222B2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102435364B1 (ko) * | 2017-11-13 | 2022-08-22 | 엘지디스플레이 주식회사 | 전자 기기 |
| JP2021005783A (ja) | 2019-06-26 | 2021-01-14 | セイコーエプソン株式会社 | 振動片、電子機器、および移動体 |
| CN114553171B (zh) * | 2022-01-25 | 2024-11-01 | 北京中科飞鸿科技股份有限公司 | 一种声表面波器件电极结构及其制作方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5067033B2 (ja) * | 2007-06-20 | 2012-11-07 | セイコーエプソン株式会社 | 音叉型振動子、発振器 |
| JP2010081156A (ja) * | 2008-09-25 | 2010-04-08 | Seiko Epson Corp | 圧電薄膜振動片、圧電薄膜振動片の製造方法、圧電薄膜振動子及び発振回路 |
| JP2011142374A (ja) * | 2010-01-05 | 2011-07-21 | Seiko Epson Corp | 圧電デバイス、圧電デバイスの製造方法 |
| JP2011147053A (ja) * | 2010-01-18 | 2011-07-28 | Seiko Epson Corp | 圧電振動片、圧電発振器 |
| JP5533349B2 (ja) * | 2010-06-30 | 2014-06-25 | セイコーエプソン株式会社 | 屈曲振動片、屈曲振動子、発振器、および電子機器 |
| JP5581931B2 (ja) * | 2010-09-17 | 2014-09-03 | セイコーエプソン株式会社 | 振動片、振動片の製造方法、振動子、振動デバイスおよび電子機器 |
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2012
- 2012-09-20 JP JP2012206655A patent/JP6044222B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014064078A (ja) | 2014-04-10 |
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