JP6041874B2 - 多孔質針状ムライト体の製造方法 - Google Patents
多孔質針状ムライト体の製造方法 Download PDFInfo
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Description
(a)グリーン体中のアルミニウムの供給源及びケイ素の供給源がフッ素含有化合物と反応するように、炉の密閉領域を流れるフッ素化合物を含有するプロセスガスの存在下で、炉の密閉領域内において650℃〜800℃の温度まで少なくとも一つのグリーン体を加熱してフルオロトパーズを形成することと、その後
(b)フルオロトパーズが分解するように、体を800℃以上の温度に加熱して多孔質の針状ムライト体を形成することと、
を含み、ステップ(a)において、プロセスガスは、密閉領域の少なくとも一方の側にわたって分布する複数の入口を通って、密閉領域内に導入され、プロセスガスは、密閉領域の少なくとも一方の別の側にわたって分布する出口を通って密閉領域から引き出される、針状ムライト体の製造方法である。
(a)グリーン体内のアルミニウム供給源及びケイ素供給源がフッ素と反応するように、フッ素含有化合物の存在下で、グリーン体を高温に加熱してフルオロトパーズを形成することと、その後、
(b)フルオロトパーズが分解するような温度まで体を加熱して多孔質の針状ムライト体を形成することと、
を含み、ステップ(b)の間に、密閉領域の内壁及び密閉領域内の内部空間が、少なくとも1000℃に維持されるように、ステップ(a)及びステップ(b)が炉内の密閉領域内で行われ、更に、ステップ(b)の間に、パージガスを密閉領域の外側の炉の部分を通って流す、針状ムライト体を製造する方法である。
これらの実験は、フルオロトパーズ形成反応の間の、プロセスガスの再循環の利点を例示する。
この実験では、フルオロトパーズ形成反応における発熱を、プロセスガスの添加速度を制御することによって制御する。
図3に示す入口及び出口プレナムを使用する代わりに、プロセスガスを、エンクロージャーの上部に位置する単一の入口を通って炉の密閉領域に導入され、プロセスガスは、エンクロージャーの側面に位置する単一の出口を通って炉の密閉領域から取り除かれることを除き、実施例3を、図3に記載された装置を用いて行う。フルオロトパーズ形成反応を実行するための条件は、一般的に、比較実験A又は実施例1に記載されている。フルオロトパーズを、SiF4を含む雰囲気の存在下で、約1100〜1200℃で分解する。
Claims (9)
- 針状ムライト体の製造プロセスであって、
(a)炉の密閉領域を通って流れるフッ素含有化合物を含むプロセスガスの存在下で、前記炉の前記密閉領域内で少なくとも一つのグリーン体を650℃〜800℃の温度まで加熱するステップであって、前記グリーン体内のアルミニウム供給源及びケイ素供給源が、前記フッ素含有化合物と反応して、フルオロトパーズを形成するようにされる、ステップと、その後、
(b)前記フルオロトパースを800℃以上の温度に加熱するステップであって、前記フルオロトパーズが分解して多孔質針状ムライト体を形成する、ステップと、を含み、
ステップ(a)において、前記プロセスガスが、前記密閉領域の少なくとも一方の側にわたって分布する複数の入口を通って前記密閉領域中へ導入され、前記プロセスガスが、前記密閉領域の少なくとも他方の側にわたって分布する複数の出口を通って前記密閉領域から引き出され、さらに前記プロセスガスが、前記密閉領域の外側の前記炉の領域へ入らずに前記密閉領域から取り出される、プロセス。 - 前記炉が外殻によって画定される容積を有し、前記炉の前記密閉領域がエンクロージャーによって画定され、前記エンクロージャーは、前記エンクロージャーの外面の実質的に全ての点で前記外殻から離間している、請求項1に記載のプロセス。
- 前記炉の前記密閉領域が、前記エンクロージャー内の一つ以上の開口部を通って、前記エンクロージャーの外側で前記炉の部分と流体連通し、前記開口部は全体で、前記エンクロージャーの表面積の2%以下を占める、請求項2に記載のプロセス。
- ステップ(a)において、前記プロセスガスの流速、前記プロセスガス中の前記フッ素含有化合物の含有量、又はこれらの両方が、ステップ(a)の過程の間に少なくとも一度減少する、請求項1に記載のプロセス。
- ステップ(a)において、前記少なくとも1つのグリーン体の温度を監視し、前記少なくとも1つのグリーン体の前記温度が、所定の温度以上になった場合に、前記炉の前記密閉領域におけるフッ素含有化合物の分圧を下げる、請求項1に記載のプロセス。
- 針状ムライト体の製造プロセスであって、
(a)フッ素含有化合物の存在下で、グリーン体を高温に加熱するステップであって、前記グリーン体中のアルミニウム供給源及びケイ素供給源をフッ素と反応させてフルオロトパーズを形成する、ステップと、その後、
(b)前記フルオロトパーズを加熱するステップであって、前記フルオロトパーズを分解して多孔質針状ムライト体を形成する、ステップと、を含み、
ステップ(a)とステップ(b)とを炉内の密閉領域で行って、ステップ(b)中に、前記密閉領域の内壁及び前記密閉領域内の内部空間が、少なくとも1000℃の温度に維持されるようにし、更に、ステップ(b)中に、パージガスを、前記密閉領域の外側の前記炉の部分を通って流し、
さらにステップ(a)において、前記フッ素含有化合物が、前記密閉領域の外側の前記炉の領域へ入らずに前記密閉領域から取り出される、プロセス。 - ステップ(a)において、前記プロセスガスは、85〜95重量%の前記フッ素含有化合物を含有し、前記少なくとも1つのグリーン体のフルオロトパーズへの転換率が40%まで、前記プロセスガスの流速は、グリーン体1kg当たり0.3〜0.6標準リットル/分であり、前記プロセスガスの流速は、その後減少して、前記少なくとも1つのグリーン体のフルオロトパーズへの転換率が75〜100%であるときに、前記プロセスガスの流速がグリーン体1kg当たり0.05〜0.12標準リットル/分となる、請求項5に記載のプロセス。
- 前記フッ素含有化合物は、SiF4であり、ステップ(a)において、前記プロセスガスは85〜95重量%の前記SiF4を含有し、前記少なくとも1つのグリーン体のフルオロトパーズへの転換率が40%まで、前記プロセスガスの流速は、グリーン体1kg当たり0.3〜0.6標準リットル/分であり、前記少なくとも1つのグリーン体のフルオロトパーズへの転換率が40〜60%まで、前記プロセスガスの流速は、グリーン体1kg当たり0.2〜0.4標準リットル/分であり、前記少なくとも1つのグリーン体のフルオロトパーズへの転換率が60〜80%まで、前記プロセスガスの流速は、グリーン体1kg当たり0.1〜0.25標準リットル/分であり、前記少なくとも1つのグリーン体のフルオロトパーズへの転換率が80〜100%まで、前記プロセスガスの流速は、グリーン体1kg当たり0.05〜0.12標準リットル/分である、請求項5に記載のプロセス。
- 前記プロセスは、さらに前記エンクロージャーの外側の前記炉の部分にパージガスを導入することと、前記炉の前記密閉領域の中に前記パージガスを流すことにより、反応器から前記パージガスを取り除くことを含み、前記密閉領域において、前記パージガスは、前記プロセスガスと混合され、組み合されたプロセスガス及びパージガスは、当該組み合されたプロセスガス及びパージガスが前記エンクロージャーの外側の前記炉の部分に再侵入することなく、前記密閉領域から取り除かれる、請求項3に記載のプロセス。
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PCT/US2012/043495 WO2013006281A1 (en) | 2011-07-06 | 2012-06-21 | Method for making porous acicular mullite bodies |
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CN117398755B (zh) * | 2023-12-15 | 2024-02-23 | 成都润封电碳有限公司 | 一种真空状态下的固液分离装置 |
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US4911902A (en) * | 1987-07-06 | 1990-03-27 | The United States Of America As Represented By The Secretary Of The Navy | Mullite whisker preparation |
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US4948766A (en) * | 1988-08-05 | 1990-08-14 | The United States Of America As Represented By The Secretary Of The Navy | Rigid mullite=whisker felt and method of preparation |
JPH02201921A (ja) * | 1989-01-30 | 1990-08-10 | Arubatsuku B T U Kk | POCl↓3を使用する半導体熱処理炉 |
US4910172A (en) | 1989-02-08 | 1990-03-20 | The United States Of America As Represented By The Secretary Of The Navy | Preparation of mullite whiskers from AlF3, SiO2, and Al2 O3 powders |
EP0563261A1 (en) * | 1990-12-21 | 1993-10-06 | The Dow Chemical Company | Preparation and use of mullite whisker networks |
JP3158580B2 (ja) | 1991-12-20 | 2001-04-23 | 株式会社村田製作所 | 熱処理炉 |
JPH065533A (ja) | 1992-06-18 | 1994-01-14 | Nippon Steel Corp | 熱処理炉 |
JPH0758030A (ja) | 1993-08-18 | 1995-03-03 | Toshiba Corp | 半導体製造装置 |
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IL121696A (en) | 1997-09-03 | 2001-08-26 | Hadasit Med Res Service | Pacifier |
US6306335B1 (en) * | 1999-08-27 | 2001-10-23 | The Dow Chemical Company | Mullite bodies and methods of forming mullite bodies |
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