JP6038882B2 - 光ファイバの構成体及びこのような構成体を形成する方法 - Google Patents

光ファイバの構成体及びこのような構成体を形成する方法 Download PDF

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Publication number
JP6038882B2
JP6038882B2 JP2014505662A JP2014505662A JP6038882B2 JP 6038882 B2 JP6038882 B2 JP 6038882B2 JP 2014505662 A JP2014505662 A JP 2014505662A JP 2014505662 A JP2014505662 A JP 2014505662A JP 6038882 B2 JP6038882 B2 JP 6038882B2
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Japan
Prior art keywords
fiber
aperture
array
substrate
fibers
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Japanese (ja)
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JP2014517503A5 (enExample
JP2014517503A (ja
Inventor
デ・ボア、ギード
ファン・メール、ラルフ
ファン・デ・ペウト、テウニス
デルクス、ヘンク
スピーゲルハルダー、フレデリク・マティアス
スムルデルス、エドウィン・ヨハンネス・テオドラス
デルクス、ロイ・ジョセフス・ステファヌス
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マッパー・リソグラフィー・アイピー・ビー．ブイ．
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • B32B37/142—Laminating of sheets, panels or inserts, e.g. stiffeners, by wrapping in at least one outer layer, or inserting into a preformed pocket
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/12—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
    • B32B37/1284—Application of adhesive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/12—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
    • B32B37/1284—Application of adhesive
    • B32B37/1292—Application of adhesive selectively, e.g. in stripes, in patterns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B38/00—Ancillary operations in connection with laminating processes
    • B32B38/0012—Mechanical treatment, e.g. roughening, deforming, stretching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3608—Fibre wiring boards, i.e. where fibres are embedded or attached in a pattern on or to a substrate, e.g. flexible sheets
    • G02B6/3612—Wiring methods or machines
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H01J37/3177—Multi-beam, e.g. fly's eye, comb probe
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2551/00—Optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/043—Beam blanking
    • H01J2237/0435—Multi-aperture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/248—Components associated with the control of the tube
    • H01J2237/2482—Optical means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor
    • Y10T156/1002—Methods of surface bonding and/or assembly therefor with permanent bending or reshaping or surface deformation of self sustaining lamina

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electron Beam Exposure (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Light Guides In General And Applications Therefor (AREA)
JP2014505662A 2011-04-20 2012-04-20 光ファイバの構成体及びこのような構成体を形成する方法 Active JP6038882B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201161477228P 2011-04-20 2011-04-20
US61/477,228 2011-04-20
US201161479263P 2011-04-26 2011-04-26
US61/479,263 2011-04-26
PCT/EP2012/057331 WO2012143541A1 (en) 2011-04-20 2012-04-20 Arrangement of optical fibers, and a method of forming such arrangement

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2016215308A Division JP6696887B2 (ja) 2011-04-20 2016-11-02 光ファイバの構成体及びこのような構成体を形成する方法

Publications (3)

Publication Number Publication Date
JP2014517503A JP2014517503A (ja) 2014-07-17
JP2014517503A5 JP2014517503A5 (enExample) 2015-06-18
JP6038882B2 true JP6038882B2 (ja) 2016-12-07

Family

ID=46149394

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Application Number Title Priority Date Filing Date
JP2014505662A Active JP6038882B2 (ja) 2011-04-20 2012-04-20 光ファイバの構成体及びこのような構成体を形成する方法
JP2016215308A Active JP6696887B2 (ja) 2011-04-20 2016-11-02 光ファイバの構成体及びこのような構成体を形成する方法

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Application Number Title Priority Date Filing Date
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Country Status (3)

Country Link
US (3) US9036962B2 (enExample)
JP (2) JP6038882B2 (enExample)
WO (1) WO2012143541A1 (enExample)

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US10395887B1 (en) * 2018-02-20 2019-08-27 Technische Universiteit Delft Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column
JP6847886B2 (ja) * 2018-03-20 2021-03-24 株式会社東芝 荷電粒子ビーム偏向デバイス
JP7030663B2 (ja) * 2018-09-12 2022-03-07 株式会社東芝 半導体装置及び荷電粒子線露光装置
CN113424291B (zh) * 2018-12-20 2024-03-22 Asml荷兰有限公司 平台装置
WO2022052527A1 (zh) * 2020-09-11 2022-03-17 青岛海信宽带多媒体技术有限公司 一种光模块
CN120370477A (zh) * 2024-01-25 2025-07-25 华为技术有限公司 光背板、通信设备和通信系统

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Also Published As

Publication number Publication date
WO2012143541A1 (en) 2012-10-26
JP2014517503A (ja) 2014-07-17
US20150190994A1 (en) 2015-07-09
USRE48287E1 (en) 2020-10-27
US20130043413A1 (en) 2013-02-21
US9457549B2 (en) 2016-10-04
JP2017072839A (ja) 2017-04-13
JP6696887B2 (ja) 2020-05-20
US9036962B2 (en) 2015-05-19

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