JP6034616B2 - 導波路及びその製造方法、ならびに電磁波分析装置 - Google Patents

導波路及びその製造方法、ならびに電磁波分析装置 Download PDF

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Publication number
JP6034616B2
JP6034616B2 JP2012173724A JP2012173724A JP6034616B2 JP 6034616 B2 JP6034616 B2 JP 6034616B2 JP 2012173724 A JP2012173724 A JP 2012173724A JP 2012173724 A JP2012173724 A JP 2012173724A JP 6034616 B2 JP6034616 B2 JP 6034616B2
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Japan
Prior art keywords
waveguide
substrate
conductor layer
electromagnetic wave
layer
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JP2012173724A
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English (en)
Japanese (ja)
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JP2013070361A (ja
JP2013070361A5 (https=
Inventor
泰史 小山
泰史 小山
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2012173724A priority Critical patent/JP6034616B2/ja
Priority to US13/599,708 priority patent/US9041415B2/en
Publication of JP2013070361A publication Critical patent/JP2013070361A/ja
Publication of JP2013070361A5 publication Critical patent/JP2013070361A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1226—Basic optical elements, e.g. light-guiding paths involving surface plasmon interaction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49016—Antenna or wave energy "plumbing" making

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Power Engineering (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Waveguide Aerials (AREA)
JP2012173724A 2011-09-09 2012-08-06 導波路及びその製造方法、ならびに電磁波分析装置 Expired - Fee Related JP6034616B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012173724A JP6034616B2 (ja) 2011-09-09 2012-08-06 導波路及びその製造方法、ならびに電磁波分析装置
US13/599,708 US9041415B2 (en) 2011-09-09 2012-08-30 Waveguide, method of manufacturing the same, and electromagnetic wave analysis apparatus

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011197123 2011-09-09
JP2011197123 2011-09-09
JP2012173724A JP6034616B2 (ja) 2011-09-09 2012-08-06 導波路及びその製造方法、ならびに電磁波分析装置

Publications (3)

Publication Number Publication Date
JP2013070361A JP2013070361A (ja) 2013-04-18
JP2013070361A5 JP2013070361A5 (https=) 2015-09-17
JP6034616B2 true JP6034616B2 (ja) 2016-11-30

Family

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Family Applications (1)

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JP2012173724A Expired - Fee Related JP6034616B2 (ja) 2011-09-09 2012-08-06 導波路及びその製造方法、ならびに電磁波分析装置

Country Status (2)

Country Link
US (1) US9041415B2 (https=)
JP (1) JP6034616B2 (https=)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9008983B2 (en) 2011-05-17 2015-04-14 Canon Kabushiki Kaisha Waveguide, apparatus including the waveguide, and method of manufacturing the waveguide
US8805147B2 (en) 2011-05-17 2014-08-12 Canon Kabushiki Kaisha Waveguide, apparatus including the waveguide, and method of manufacturing the waveguide
US9405064B2 (en) * 2012-04-04 2016-08-02 Texas Instruments Incorporated Microstrip line of different widths, ground planes of different distances
JP2014207654A (ja) * 2013-03-16 2014-10-30 キヤノン株式会社 導波路素子
US9112253B2 (en) * 2013-03-19 2015-08-18 Texas Instruments Incorporated Dielectric waveguide combined with electrical cable
CN104064852A (zh) * 2013-03-19 2014-09-24 德克萨斯仪器股份有限公司 用于将电磁信号从微带线发射到介电波导的喇叭天线
US9158069B2 (en) * 2013-04-15 2015-10-13 Technion Research & Development Foundation Ltd. Charge-discharge electro-optical microring modulator
US9766127B2 (en) * 2013-07-15 2017-09-19 The Aerospace Corporation Terahertz detection assembly and methods for use in detecting terahertz radiation
US10020634B2 (en) * 2014-01-06 2018-07-10 National Technology & Engineering Solutions Of Sandia, Llc Monolithically integrated infrared transceiver
JP6719882B2 (ja) * 2015-10-20 2020-07-08 キヤノン株式会社 発振素子及びそれを用いた測定装置
CN105390816B (zh) * 2015-10-28 2018-05-22 西安电子科技大学 一种超宽带tem喇叭天线及建模方法
JP6879729B2 (ja) * 2015-12-24 2021-06-02 日本電産株式会社 スロットアレーアンテナ、ならびに当該スロットアレーアンテナを備えるレーダ、レーダシステム、および無線通信システム
CN105703048B (zh) * 2016-01-13 2018-07-13 北京大学 一种超宽带太赫兹类表面等离子体激元耦合器及耦合方法
JP6721431B2 (ja) * 2016-02-18 2020-07-15 浜松ホトニクス株式会社 量子カスケード検出器
TWI794271B (zh) * 2017-08-18 2023-03-01 美商康寧公司 玻璃系兆赫光波導及其形成方法
FR3078833B1 (fr) * 2018-03-08 2021-05-07 St Microelectronics Sa Connecteur sans fil
CN112612078B (zh) * 2020-12-18 2023-02-10 海南师范大学 一种基于goi或soi上的高效耦合波导及其制备方法
CN120275424A (zh) * 2025-03-21 2025-07-08 哈尔滨工业大学 基于介质加载矩形波导天线的微波无损检测装置及方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998043314A1 (en) * 1997-03-25 1998-10-01 The University Of Virginia Patent Foundation Integration of hollow waveguides, channels and horns by lithographic and etching techniques
JP4154388B2 (ja) * 2004-12-27 2008-09-24 キヤノン株式会社 被対象物を透過した電磁波の状態を検出するための検出装置
JP4817826B2 (ja) * 2005-11-09 2011-11-16 国立大学法人東北大学 検査システム
JP4857027B2 (ja) * 2006-05-31 2012-01-18 キヤノン株式会社 レーザ素子
FR2908931B1 (fr) 2006-11-21 2009-02-13 Centre Nat Rech Scient Antenne et emetteur/recepteur terahertz integres,et procede pour leur fabrication.
US7715667B2 (en) * 2008-02-26 2010-05-11 Sungkyunkwan University Foundation For Corporate Collaboration Metal waveguide device and nano plasmonic integrated circuits and optical integrated circuit module using the same
JP5334242B2 (ja) * 2008-09-05 2013-11-06 大学共同利用機関法人自然科学研究機構 受信イメージングアンテナアレイ

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Publication number Publication date
JP2013070361A (ja) 2013-04-18
US9041415B2 (en) 2015-05-26
US20130063159A1 (en) 2013-03-14

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