JP6029338B2 - 光デバイスの加工方法 - Google Patents
光デバイスの加工方法 Download PDFInfo
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- JP6029338B2 JP6029338B2 JP2012132747A JP2012132747A JP6029338B2 JP 6029338 B2 JP6029338 B2 JP 6029338B2 JP 2012132747 A JP2012132747 A JP 2012132747A JP 2012132747 A JP2012132747 A JP 2012132747A JP 6029338 B2 JP6029338 B2 JP 6029338B2
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- 230000003287 optical effect Effects 0.000 title claims description 80
- 238000003672 processing method Methods 0.000 title claims description 10
- 239000011241 protective layer Substances 0.000 claims description 29
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- 238000007789 sealing Methods 0.000 claims description 4
- 239000003566 sealing material Substances 0.000 claims description 4
- 239000011810 insulating material Substances 0.000 claims description 2
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- 229910052594 sapphire Inorganic materials 0.000 description 9
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- 238000000605 extraction Methods 0.000 description 7
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 5
- 229910002601 GaN Inorganic materials 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/58—Optical field-shaping elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0095—Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/483—Containers
- H01L33/486—Containers adapted for surface mounting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/58—Optical field-shaping elements
- H01L33/60—Reflective elements
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- Engineering & Computer Science (AREA)
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- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Dicing (AREA)
- Led Devices (AREA)
Description
12 バイト切削ユニット
13 サファイア基板
15 エピタキシャル層(発光層)
17 分割予定ライン
18 バイトホイール
19 光デバイス
20 バイト切削刃
21,23 電極
25 保護層
27 溝
29 反射膜
31 表面保護テープ
32 研削ホイール
33 光デバイスチップ
35 微小凹凸
38 研削砥石
37 封止材
Claims (2)
- 交差する複数の分割予定ラインで区画された表面の各領域に電極を含む光デバイスが形成された光デバイスウエーハから光デバイスを加工する光デバイスの加工方法であって、
光デバイスウエーハの表面の少なくとも電極間に絶縁材からなる保護層を形成して電極間を絶縁する保護層形成ステップと、
該保護層形成ステップを実施した後、光デバイスウエーハの表面から該分割予定ラインに沿って仕上げ厚みに至る深さの溝を形成する溝形成ステップと、
該溝形成ステップを実施した後、光デバイスウエーハの表面側に反射膜を被覆して少なくとも該溝の側面に反射膜を形成する反射膜形成ステップと、
該反射膜形成ステップを実施した後、光デバイスウエーハの表面の該電極上に形成された該保護層を除去して該電極を露出させる電極露出ステップと、
該電極露出ステップを実施する前又は後に、光デバイスウエーハの裏面を研削して該仕上げ厚みへと薄化するとともに該溝を光デバイスウエーハの裏面に露出させて光デバイスウエーハを表面から裏面に至る側面全体に反射膜が形成された個々の光デバイスチップへと分割する研削ステップと、
を備え、
該保護層形成ステップでは、光デバイスウエーハの表面全体に該保護層を被覆し、
該電極露出ステップでは、バイト切削手段によって光デバイスウエーハの表面に被覆された該保護層を旋削することで該電極を露出させることを特徴とする光デバイスの加工方法。 - 前記研削ステップを実施した後、個々の光デバイスチップを基板上にフリップチップ実装する実装ステップと、
該基板上に実装された該光デバイスチップを封止材で封止する封止ステップと、
を更に備えた請求項1記載の光デバイスの加工方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012132747A JP6029338B2 (ja) | 2012-06-12 | 2012-06-12 | 光デバイスの加工方法 |
US13/909,813 US8802470B2 (en) | 2012-06-12 | 2013-06-04 | Optical device processing method |
Applications Claiming Priority (1)
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JP2012132747A JP6029338B2 (ja) | 2012-06-12 | 2012-06-12 | 光デバイスの加工方法 |
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JP2013258232A JP2013258232A (ja) | 2013-12-26 |
JP6029338B2 true JP6029338B2 (ja) | 2016-11-24 |
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JP2012132747A Active JP6029338B2 (ja) | 2012-06-12 | 2012-06-12 | 光デバイスの加工方法 |
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US (1) | US8802470B2 (ja) |
JP (1) | JP6029338B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8754159B2 (en) | 2009-07-22 | 2014-06-17 | Bridgestone Corporation | Tire |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6025410B2 (ja) * | 2012-06-12 | 2016-11-16 | 株式会社ディスコ | 光デバイスの加工方法 |
JP2016115800A (ja) | 2014-12-15 | 2016-06-23 | 株式会社ディスコ | ウエーハの加工方法 |
DE102015107588B4 (de) | 2015-05-13 | 2023-08-03 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Verfahren zur Herstellung optoelektronischer Bauelemente und oberflächenmontierbares optoelektronisches Bauelement |
JP2017005158A (ja) * | 2015-06-12 | 2017-01-05 | 株式会社ディスコ | ウエーハの裏面研削方法 |
US20170256432A1 (en) * | 2016-03-03 | 2017-09-07 | Nexperia B.V. | Overmolded chip scale package |
JP6887722B2 (ja) * | 2016-10-25 | 2021-06-16 | 株式会社ディスコ | ウェーハの加工方法及び切削装置 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2922977B2 (ja) | 1990-04-27 | 1999-07-26 | 豊田合成株式会社 | 発光ダイオード |
JP2002076023A (ja) | 2000-09-01 | 2002-03-15 | Nec Corp | 半導体装置 |
DE10148227B4 (de) | 2001-09-28 | 2015-03-05 | Osram Opto Semiconductors Gmbh | Strahlungsemittierender Halbleiterchip, Verfahren zu dessen Herstellung und strahlungsemittierendes Bauelement |
US7340181B1 (en) | 2002-05-13 | 2008-03-04 | National Semiconductor Corporation | Electrical die contact structure and fabrication method |
JP2004055816A (ja) * | 2002-07-19 | 2004-02-19 | Sanyo Electric Co Ltd | 窒化物化合物半導体発光素子及びその製造方法 |
US7157297B2 (en) | 2004-05-10 | 2007-01-02 | Sharp Kabushiki Kaisha | Method for fabrication of semiconductor device |
US7432119B2 (en) * | 2005-01-11 | 2008-10-07 | Semileds Corporation | Light emitting diode with conducting metal substrate |
JP5126875B2 (ja) * | 2006-08-11 | 2013-01-23 | シャープ株式会社 | 窒化物半導体発光素子の製造方法 |
JP4655029B2 (ja) * | 2006-11-20 | 2011-03-23 | パナソニック株式会社 | 発光装置および半導体発光素子の製造方法 |
JP5179068B2 (ja) | 2007-02-14 | 2013-04-10 | 昭和電工株式会社 | 化合物半導体素子の製造方法 |
US7985971B2 (en) | 2007-02-16 | 2011-07-26 | Hong Kong Applied Science And Technology Research Institute Co. Ltd. | Method of producing thin semiconductor structures |
GB0722054D0 (en) * | 2007-11-09 | 2007-12-19 | Photonstar Led Ltd | LED with enhanced light extraction |
JP2009283912A (ja) | 2008-04-25 | 2009-12-03 | Sanyo Electric Co Ltd | 窒化物系半導体素子およびその製造方法 |
DE102009058796A1 (de) | 2009-12-18 | 2011-06-22 | OSRAM Opto Semiconductors GmbH, 93055 | Optoelektronisches Bauelement und Verfahren zur Herstellung eines optoelektronischen Bauelements |
JP5202559B2 (ja) * | 2010-03-09 | 2013-06-05 | 株式会社東芝 | 半導体発光装置及びその製造方法 |
KR101014155B1 (ko) | 2010-03-10 | 2011-02-10 | 엘지이노텍 주식회사 | 발광 소자, 발광 소자 제조방법 및 발광 소자 패키지 |
TWI422064B (zh) | 2010-05-21 | 2014-01-01 | Lextar Electronics Corp | 發光二極體晶片及其製作方法 |
JP5633477B2 (ja) * | 2010-08-27 | 2014-12-03 | 豊田合成株式会社 | 発光素子 |
US8497146B2 (en) * | 2011-08-25 | 2013-07-30 | Micron Technology, Inc. | Vertical solid-state transducers having backside terminals and associated systems and methods |
JP6025410B2 (ja) * | 2012-06-12 | 2016-11-16 | 株式会社ディスコ | 光デバイスの加工方法 |
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2012
- 2012-06-12 JP JP2012132747A patent/JP6029338B2/ja active Active
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US8754159B2 (en) | 2009-07-22 | 2014-06-17 | Bridgestone Corporation | Tire |
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JP2013258232A (ja) | 2013-12-26 |
US8802470B2 (en) | 2014-08-12 |
US20130330857A1 (en) | 2013-12-12 |
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