JP6017170B2 - 堆積物除去方法及びガス処理装置 - Google Patents
堆積物除去方法及びガス処理装置 Download PDFInfo
- Publication number
- JP6017170B2 JP6017170B2 JP2012094439A JP2012094439A JP6017170B2 JP 6017170 B2 JP6017170 B2 JP 6017170B2 JP 2012094439 A JP2012094439 A JP 2012094439A JP 2012094439 A JP2012094439 A JP 2012094439A JP 6017170 B2 JP6017170 B2 JP 6017170B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- region
- substrate
- deposit
- partial pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000012545 processing Methods 0.000 title claims description 105
- 238000000034 method Methods 0.000 title claims description 73
- 239000007789 gas Substances 0.000 claims description 171
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 45
- 230000008569 process Effects 0.000 claims description 38
- 239000000758 substrate Substances 0.000 claims description 37
- 239000001301 oxygen Substances 0.000 claims description 24
- 229910052760 oxygen Inorganic materials 0.000 claims description 24
- 238000005530 etching Methods 0.000 claims description 23
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 22
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 17
- 238000009832 plasma treatment Methods 0.000 claims description 11
- 235000012239 silicon dioxide Nutrition 0.000 claims description 7
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 4
- 230000009471 action Effects 0.000 claims description 4
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 description 45
- 238000009792 diffusion process Methods 0.000 description 25
- 238000006243 chemical reaction Methods 0.000 description 11
- 229910004298 SiO 2 Inorganic materials 0.000 description 9
- 238000000635 electron micrograph Methods 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 8
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 5
- 229910001882 dioxygen Inorganic materials 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 150000002926 oxygen Chemical class 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000003197 catalytic effect Effects 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000005430 electron energy loss spectroscopy Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
- H01L21/02337—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a gas or vapour
- H01L21/0234—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a gas or vapour treatment by exposure to a plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/0206—Cleaning during device manufacture during, before or after processing of insulating layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Drying Of Semiconductors (AREA)
Description
(ステップ1)
圧力:6.65Pa(50mTorr)
高周波電力(周波数の高い高周波)/(周波数の低い高周波):400/1500W
エッチングガス:HBr/NF3/O2=400/75/5sccm
ステージ温度: 110℃
時間:5秒
(ステップ2)
圧力:6.65Pa(50mTorr)
高周波電力(周波数の高い高周波)/(周波数の低い高周波):400/1400W
エッチングガス:HBr/NF3/O2=350/32/19sccm
ステージ温度: 110℃
時間:20秒
圧力:133Pa(1Torr)
高周波電力:1000W
エッチングガス:O2=1980sccm
ステージ温度: 250℃
時間:120秒
圧力:(931Pa(7Torr)10秒⇔173Pa(1.3Torr)10秒)×6サイクル
HF/CH3OH=2800/44sccm
ステージ温度:10℃
中央部=107.2nm
中間部=75.4nm
エッヂから30mmの位置=74.1nm
エッヂから4mmの位置=75.4nm
となり、中央部とエッヂから4mmの位置との深さの差は、31.8nmとなった。
中央部=111.1nm
中間部=71.4nm
エッヂから30mmの位置=67.5nm
エッヂから4mmの位置=66.2nm
となり、中央部とエッヂから4mmの位置との深さの差は、44.9nmとなった。
Claims (8)
- 基板上にエッチングによって形成されたパターンの表面に堆積した堆積物を除去する堆積物除去方法であって、
前記基板を加熱しながら酸素プラズマに晒す酸素プラズマ処理工程と、
前記酸素プラズマ処理工程の後、前記基板を、処理チャンバー内でフッ化水素ガスとアルコールガスの混合ガスの雰囲気に晒し、かつ、前記混合ガスの全圧を第1の全圧とするか、あるいは、アルコールガスの分圧を第1の分圧とする第1の期間と、処理チャンバー内を排気し前記混合ガスの全圧を前記第1の全圧より低い第2の全圧とするか、あるいは、アルコールガスの分圧を前記第1の分圧より低い第2の分圧とする第2の期間とを、複数サイクル繰り返すサイクル処理工程と、
を具備し、
前記サイクル処理工程では、前記基板に対向する領域から前記混合ガスを前記基板に供給し、かつ、前記基板の中央部を含み前記基板の直径より小さな直径を有する円形の第1領域と、前記第1領域の外側の環状の第2領域とからの前記混合ガスの単位面積当たりの供給量を、前記第2領域より前記第1領域の方を多くする
ことを特徴とする堆積物除去方法。 - 請求項1記載の堆積物除去方法であって、
前記第1領域の直径が前記基板の直径の85%以下である
ことを特徴とする堆積物除去方法。 - 請求項1又は2記載の堆積物除去方法であって、
前記第1の分圧が、前記混合ガスの作用によって前記堆積物を除去可能な分圧である
ことを特徴とする堆積物除去方法。 - 請求項1〜3いずれか1項記載の堆積物除去方法であって、
前記第1の期間及び前記第2の期間が、5秒乃至20秒の期間である
ことを特徴とする堆積物除去方法。 - 請求項1〜4いずれか1項記載の堆積物除去方法であって、
前記堆積物が、シリコン酸化物を含む
ことを特徴とする堆積物除去方法。 - 請求項1〜5いずれか1項記載の堆積物除去方法であって、
前記パターンが、構造物として二酸化ケイ素を含む
ことを特徴とする堆積物除去方法。 - 請求項1〜6いずれか1項記載の堆積物除去方法であって、
前記アルコールガスが、メタノールガスである
ことを特徴とする堆積物除去方法。 - 基板を、処理チャンバー内でフッ化水素ガスとアルコールガスの混合ガスの雰囲気に晒し、かつ、前記混合ガスの全圧を第1の全圧とするか、あるいは、アルコールガスの分圧を第1の分圧とする第1の期間と、処理チャンバー内を排気し前記混合ガスの全圧を前記第1の全圧より低い第2の全圧とするか、あるいは、アルコールガスの分圧を前記第1の分圧より低い第2の分圧とする第2の期間とを、複数サイクル繰り返すサイクル処理工程を実施し、前記基板上にエッチングによって形成されたパターンの表面に堆積した堆積物を除去するガス処理装置であって、
前記基板に対向する領域から前記混合ガスを前記基板に供給し、かつ、前記基板の中央部を含み前記基板の直径より小さな直径を有する円形の第1領域と、前記第1領域の外側の環状の第2領域とからの前記混合ガスの単位面積当たりの供給量が、前記第2領域より前記第1領域の方が多くなるように供給することを特徴とするガス処理装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012094439A JP6017170B2 (ja) | 2012-04-18 | 2012-04-18 | 堆積物除去方法及びガス処理装置 |
KR1020147034719A KR102108111B1 (ko) | 2012-04-18 | 2013-04-12 | 퇴적물 제거 방법 및 가스 처리 장치 |
PCT/JP2013/002509 WO2013157235A1 (ja) | 2012-04-18 | 2013-04-12 | 堆積物除去方法及びガス処理装置 |
EP14185469.5A EP2819150B1 (en) | 2012-04-18 | 2013-04-12 | Deposit removing method |
CN201410614517.XA CN104505333B (zh) | 2012-04-18 | 2013-04-12 | 沉积物去除方法及气体处理装置 |
US14/488,575 US20150064925A1 (en) | 2012-04-18 | 2014-09-17 | Deposit removing method and gas processing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012094439A JP6017170B2 (ja) | 2012-04-18 | 2012-04-18 | 堆積物除去方法及びガス処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013222875A JP2013222875A (ja) | 2013-10-28 |
JP6017170B2 true JP6017170B2 (ja) | 2016-10-26 |
Family
ID=49383207
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012094439A Active JP6017170B2 (ja) | 2012-04-18 | 2012-04-18 | 堆積物除去方法及びガス処理装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20150064925A1 (ja) |
EP (1) | EP2819150B1 (ja) |
JP (1) | JP6017170B2 (ja) |
KR (1) | KR102108111B1 (ja) |
CN (1) | CN104505333B (ja) |
WO (1) | WO2013157235A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016025195A (ja) * | 2014-07-18 | 2016-02-08 | 東京エレクトロン株式会社 | エッチング方法 |
JP6499001B2 (ja) | 2015-04-20 | 2019-04-10 | 東京エレクトロン株式会社 | 多孔質膜をエッチングする方法 |
DE102016100625A1 (de) | 2016-01-15 | 2017-07-20 | Aixtron Se | Vorrichtung zum Bereitstellen eines Prozessgases in einer Beschichtungseinrichtung |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3328416B2 (ja) | 1994-03-18 | 2002-09-24 | 富士通株式会社 | 半導体装置の製造方法と製造装置 |
US5580421A (en) * | 1994-06-14 | 1996-12-03 | Fsi International | Apparatus for surface conditioning |
US5922219A (en) * | 1996-10-31 | 1999-07-13 | Fsi International, Inc. | UV/halogen treatment for dry oxide etching |
JPH11279778A (ja) * | 1998-03-30 | 1999-10-12 | Seiko Epson Corp | エッチング装置及び半導体装置の製造方法 |
JP2000357680A (ja) * | 1999-06-15 | 2000-12-26 | Nec Kyushu Ltd | シリコン系プラズマエッチングに於ける酸素プラズマ照射によるアウトガス防止方法 |
US6284666B1 (en) * | 2000-05-31 | 2001-09-04 | International Business Machines Corporation | Method of reducing RIE lag for deep trench silicon etching |
JP2002353205A (ja) * | 2000-08-28 | 2002-12-06 | Mitsubishi Electric Corp | 半導体装置の製造方法およびそれに用いられるウェハ処理装置並びに半導体装置 |
US6333272B1 (en) * | 2000-10-06 | 2001-12-25 | Lam Research Corporation | Gas distribution apparatus for semiconductor processing |
US6846746B2 (en) * | 2002-05-01 | 2005-01-25 | Applied Materials, Inc. | Method of smoothing a trench sidewall after a deep trench silicon etch process |
TW587139B (en) * | 2002-10-18 | 2004-05-11 | Winbond Electronics Corp | Gas distribution system and method for the plasma gas in the chamber |
US6936193B2 (en) * | 2003-04-14 | 2005-08-30 | Research Frontiers Incorporated | Suspended particle device light valve film |
KR100526928B1 (ko) * | 2003-07-16 | 2005-11-09 | 삼성전자주식회사 | 식각장치 |
JP2006156122A (ja) * | 2004-11-29 | 2006-06-15 | Sekisui Chem Co Ltd | プラズマ処理装置 |
WO2008088300A2 (en) * | 2005-03-08 | 2008-07-24 | Primaxx, Inc. | Selective etching of oxides from substrates |
GB0615343D0 (en) * | 2006-08-02 | 2006-09-13 | Point 35 Microstructures Ltd | Improved etch process |
JP4661753B2 (ja) * | 2006-09-29 | 2011-03-30 | 東京エレクトロン株式会社 | 基板処理方法、洗浄方法及び記憶媒体 |
JP4849614B2 (ja) * | 2006-11-01 | 2012-01-11 | 東京エレクトロン株式会社 | 基板処理方法及び基板処理システム |
CN100527361C (zh) * | 2006-12-06 | 2009-08-12 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 气体分布装置 |
JP2008186865A (ja) * | 2007-01-26 | 2008-08-14 | Tokyo Electron Ltd | 基板処理装置 |
US7988813B2 (en) * | 2007-03-12 | 2011-08-02 | Tokyo Electron Limited | Dynamic control of process chemistry for improved within-substrate process uniformity |
US20100025370A1 (en) * | 2008-08-04 | 2010-02-04 | Applied Materials, Inc. | Reactive gas distributor, reactive gas treatment system, and reactive gas treatment method |
JP5823160B2 (ja) * | 2011-05-11 | 2015-11-25 | 東京エレクトロン株式会社 | 堆積物除去方法 |
JP5859262B2 (ja) * | 2011-09-29 | 2016-02-10 | 東京エレクトロン株式会社 | 堆積物除去方法 |
-
2012
- 2012-04-18 JP JP2012094439A patent/JP6017170B2/ja active Active
-
2013
- 2013-04-12 KR KR1020147034719A patent/KR102108111B1/ko active IP Right Grant
- 2013-04-12 EP EP14185469.5A patent/EP2819150B1/en active Active
- 2013-04-12 WO PCT/JP2013/002509 patent/WO2013157235A1/ja unknown
- 2013-04-12 CN CN201410614517.XA patent/CN104505333B/zh active Active
-
2014
- 2014-09-17 US US14/488,575 patent/US20150064925A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO2013157235A1 (ja) | 2013-10-24 |
KR20150010779A (ko) | 2015-01-28 |
EP2819150A3 (en) | 2015-03-18 |
EP2819150A2 (en) | 2014-12-31 |
CN104505333A (zh) | 2015-04-08 |
CN104505333B (zh) | 2017-05-10 |
KR102108111B1 (ko) | 2020-05-08 |
EP2819150B1 (en) | 2017-09-27 |
US20150064925A1 (en) | 2015-03-05 |
JP2013222875A (ja) | 2013-10-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5823160B2 (ja) | 堆積物除去方法 | |
JP6373150B2 (ja) | 基板処理システム及び基板処理方法 | |
KR101930577B1 (ko) | 퇴적물 제거 방법 | |
US20120211462A1 (en) | Remotely-excited fluorine and water vapor etch | |
US11183393B2 (en) | Atomic layer etching using acid halide | |
US9797067B2 (en) | Selective epitaxial growth method and film forming apparatus | |
JP7208318B2 (ja) | 処理装置 | |
JP7401593B2 (ja) | 空隙を形成するためのシステム及び方法 | |
WO2011162136A1 (en) | Film formation method, semiconductor-device fabrication method, insulating film and semiconductor device | |
JP6017170B2 (ja) | 堆積物除去方法及びガス処理装置 | |
US20040222190A1 (en) | Plasma processing method | |
JP7513775B2 (ja) | 基板処理システム | |
KR20080017555A (ko) | 고밀도 플라즈마 화학 기상 증착 장치의 세정 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20150204 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20160510 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160708 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20160906 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20160928 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6017170 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |