JP6009020B2 - オプトエレクトロニクス半導体コンポーネント及びその製造方法 - Google Patents
オプトエレクトロニクス半導体コンポーネント及びその製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 20
- 230000005693 optoelectronics Effects 0.000 title claims description 19
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000011521 glass Substances 0.000 claims description 131
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 65
- 238000006243 chemical reaction Methods 0.000 claims description 45
- 239000011159 matrix material Substances 0.000 claims description 37
- 239000000919 ceramic Substances 0.000 claims description 31
- 238000000034 method Methods 0.000 claims description 22
- 239000002241 glass-ceramic Substances 0.000 claims description 18
- 239000011148 porous material Substances 0.000 claims description 17
- 239000000843 powder Substances 0.000 claims description 11
- 230000005855 radiation Effects 0.000 claims description 9
- 238000007650 screen-printing Methods 0.000 claims description 6
- 239000006060 molten glass Substances 0.000 claims description 5
- 239000005355 lead glass Substances 0.000 claims description 4
- 238000004017 vitrification Methods 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims description 3
- 238000005470 impregnation Methods 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 36
- 239000010408 film Substances 0.000 description 27
- 239000002245 particle Substances 0.000 description 13
- 239000000853 adhesive Substances 0.000 description 12
- 230000001070 adhesive effect Effects 0.000 description 12
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 8
- 229910004298 SiO 2 Inorganic materials 0.000 description 6
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 5
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 5
- 239000005385 borate glass Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 229920001296 polysiloxane Polymers 0.000 description 5
- 239000012790 adhesive layer Substances 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 239000005365 phosphate glass Substances 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 description 3
- 238000000149 argon plasma sintering Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000004062 sedimentation Methods 0.000 description 3
- 229910017083 AlN Inorganic materials 0.000 description 2
- 229910017109 AlON Inorganic materials 0.000 description 2
- 229910003564 SiAlON Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- -1 for example Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Chemical compound [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 229910019655 synthetic inorganic crystalline material Inorganic materials 0.000 description 2
- 229910020068 MgAl Inorganic materials 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 229910007472 ZnO—B2O3—SiO2 Inorganic materials 0.000 description 1
- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- ILRRQNADMUWWFW-UHFFFAOYSA-K aluminium phosphate Chemical compound O1[Al]2OP1(=O)O2 ILRRQNADMUWWFW-UHFFFAOYSA-K 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- KAMGYJQEWVDJBD-UHFFFAOYSA-N bismuth zinc borate Chemical compound B([O-])([O-])[O-].[Zn+2].[Bi+3] KAMGYJQEWVDJBD-UHFFFAOYSA-N 0.000 description 1
- YISOXLVRWFDIKD-UHFFFAOYSA-N bismuth;borate Chemical compound [Bi+3].[O-]B([O-])[O-] YISOXLVRWFDIKD-UHFFFAOYSA-N 0.000 description 1
- 239000012876 carrier material Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005352 clarification Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000002223 garnet Substances 0.000 description 1
- 239000000156 glass melt Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- ZPPSOOVFTBGHBI-UHFFFAOYSA-N lead(2+);oxido(oxo)borane Chemical compound [Pb+2].[O-]B=O.[O-]B=O ZPPSOOVFTBGHBI-UHFFFAOYSA-N 0.000 description 1
- 229910052605 nesosilicate Inorganic materials 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 150000004762 orthosilicates Chemical class 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 229910001923 silver oxide Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- BIKXLKXABVUSMH-UHFFFAOYSA-N trizinc;diborate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]B([O-])[O-].[O-]B([O-])[O-] BIKXLKXABVUSMH-UHFFFAOYSA-N 0.000 description 1
- 239000002918 waste heat Substances 0.000 description 1
- LRXTYHSAJDENHV-UHFFFAOYSA-H zinc phosphate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O LRXTYHSAJDENHV-UHFFFAOYSA-H 0.000 description 1
- 229910000165 zinc phosphate Inorganic materials 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/50—Wavelength conversion elements
- H01L33/505—Wavelength conversion elements characterised by the shape, e.g. plate or foil
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/64—Heat extraction or cooling elements
- H01L33/641—Heat extraction or cooling elements characterized by the materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/50—Wavelength conversion elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/50—Wavelength conversion elements
- H01L33/501—Wavelength conversion elements characterised by the materials, e.g. binder
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/64—Heat extraction or cooling elements
- H01L33/644—Heat extraction or cooling elements in intimate contact or integrated with parts of the device other than the semiconductor body
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Description
R2O−ZnO−Al2O3−B2O3−P2O5(R2O=アルカリ金属酸化物);
R2O−TeO2−P2O5(R2O=アルカリ金属酸化物及び/又は酸化銀)、同様にZnO及び/又はNb2O5と化合した形で、例えばAg2O−TeO2−P2O5 ZnO−Nb2O5;
ZnO−Bi2O3−B2O3、同様にSiO2及び/又はアルカリ金属酸化物及び/又はアルカリ土類金属酸化物及び/又はAl2O3と化合した形で、例えばZnO−Bi2O3−B2O3−SiO2又はZnO−Bi2O3−B2O3−BaO−SrO−SiO2;
ZnO−B2O3、同様にSiO2及び/又はアルカリ金属酸化物及び/又はアルカリ土類金属酸化物及び/又はAl2O3と化合した形で、例えばZnO−B2O3−SiO2;
Bi2O3−B2O3、同様にSiO2及び/又はアルカリ金属酸化物及び/又はアルカリ土類金属酸化物及び/又はAl2O3と化合した形で、例えばBi2O3−B2O3−SiO2。
1. 光源、ハウジング、電気的接続部を備えたオプトエレクトロニクス半導体コンポーネントであって、前記光源は、UV又は青色で一次放射線を発光するチップを有し、前記一次放射線のピーク波長は、特に300〜490nmの範囲内にあり、前記一次放射線は前方に取り付けられた変換エレメントによって部分的に又は完全に他の波長の放射線に変換されるオプトエレクトロニクス半導体コンポーネントにおいて、前記変換エレメントは半透明又は透明な支持体を有し、前記支持体はセラミック又はガラスセラミックから作成されていて、前記支持体にガラスマトリックスが適用されていて、前記ガラスマトリックス中に蛍光体が埋め込まれていることを特徴とする、オプトエレクトロニクス半導体コンポーネント。
Claims (13)
- オプトエレクトロニクス半導体コンポーネント用の変換エレメントの製造方法において、
第1の工程で、セラミック又はガラスセラミックから製造されている支持体を準備し、
次に第2の工程で、前記支持体にガラス層を積層し、前記ガラス層は500℃未満の軟化温度を有する無鉛ガラス又は低鉛ガラスからなり、かつ
蛍光体を、スクリーン印刷又は吹付法により前記ガラス層に適用し、次いで変換エレメントを、少なくとも前記ガラスの軟化温度まで加熱し、これにより前記蛍光体が前記ガラス内へ沈降し、かつ前記ガラスにより取り囲まれることを特徴とする、オプトエレクトロニクス半導体コンポーネント用の変換エレメントの製造方法。 - 第2の工程で適用されたガラスは、ガラス粉末又は溶融したガラスである、請求項1に記載の方法。
- ガラス質の粉末のスクリーン印刷と、引き続くガラス化によるか、又は溶融したガラスを前記支持体に直接貼り付けることによりガラス層を積層する、請求項1又は2に記載の方法。
- 前記支持体は細孔を有し、前記細孔中にガラスマトリックスが少なくとも部分的に導入されていることを特徴とする、請求項1から3までのいずれか1項に記載の方法。
- 第2の工程で、ガラスマトリックスを含浸により作成し、その際、前記支持体は、大きな細孔を有する程度に予め焼結されていて、その際、前記ガラスは、前記ガラスが毛管作用により前記支持体の前記細孔内へ引き込まれる程度に十分に流動性にされることを特徴とする、請求項1から4までのいずれか1項に記載の方法。
- 前記ガラスマトリックスは気泡が少ないか又は本質的に気泡を含まないことを特徴とする、請求項1から5までのいずれか1項に記載の方法。
- 前記支持体自体が部分的に又は完全に蛍光性であることを特徴とする、請求項1から6までのいずれか1項に記載の方法。
- 前記支持体の両側にガラスマトリックスが適用されていることを特徴とする、請求項1から7までのいずれか1項に記載の方法。
- 前記変換エレメントは、UV又は青色の一次放射線を変換する、請求項1から8までのいずれか1項に記載の方法。
- 前記一次放射線のピーク波長は、300〜490nmの範囲内にある、請求項9に記載の方法。
- 前記支持体は、1μm以上で100μm以下の厚さを有する、請求項9又は10に記載の方法。
- 前記ガラス層は、200μm以下の厚さを有する、請求項1から11までのいずれか1項に記載の方法。
- 前記ガラス層は、350℃以上で480℃以下の軟化温度を有する、請求項1から12までのいずれか1項に記載の方法。
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DE102010042217A DE102010042217A1 (de) | 2010-10-08 | 2010-10-08 | Optoelektronisches Halbleiterbauelement und Verfahren zu seiner Herstellung |
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US (1) | US20130207151A1 (ja) |
EP (1) | EP2625724B1 (ja) |
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KR (1) | KR101845840B1 (ja) |
CN (1) | CN103155187B (ja) |
DE (1) | DE102010042217A1 (ja) |
WO (1) | WO2012045772A1 (ja) |
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US8158247B2 (en) * | 2008-01-30 | 2012-04-17 | Los Alamos National Security, Llc | Porous light-emitting compositions |
DE102008021666A1 (de) * | 2008-04-30 | 2009-11-05 | Ledon Lighting Jennersdorf Gmbh | Lichtemittierende Vorrichtung und Verfahren zur Herstellung einer lichtemittierenden Vorrichtung |
DE102010009456A1 (de) | 2010-02-26 | 2011-09-01 | Osram Opto Semiconductors Gmbh | Strahlungsemittierendes Bauelement mit einem Halbleiterchip und einem Konversionselement und Verfahren zu dessen Herstellung |
-
2010
- 2010-10-08 DE DE102010042217A patent/DE102010042217A1/de not_active Withdrawn
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2011
- 2011-10-05 US US13/878,249 patent/US20130207151A1/en not_active Abandoned
- 2011-10-05 CN CN201180048562.8A patent/CN103155187B/zh active Active
- 2011-10-05 EP EP11766989.5A patent/EP2625724B1/de active Active
- 2011-10-05 WO PCT/EP2011/067381 patent/WO2012045772A1/de active Application Filing
- 2011-10-05 KR KR1020137011927A patent/KR101845840B1/ko active IP Right Grant
- 2011-10-05 JP JP2013532182A patent/JP2013539238A/ja active Pending
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2015
- 2015-03-10 JP JP2015047523A patent/JP6009020B2/ja active Active
Also Published As
Publication number | Publication date |
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KR20130114671A (ko) | 2013-10-17 |
EP2625724B1 (de) | 2016-11-30 |
KR101845840B1 (ko) | 2018-04-06 |
CN103155187B (zh) | 2016-12-07 |
JP2015109483A (ja) | 2015-06-11 |
CN103155187A (zh) | 2013-06-12 |
JP2013539238A (ja) | 2013-10-17 |
WO2012045772A1 (de) | 2012-04-12 |
EP2625724A1 (de) | 2013-08-14 |
DE102010042217A1 (de) | 2012-04-12 |
US20130207151A1 (en) | 2013-08-15 |
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