JP6008636B2 - 液体吐出ヘッドの製造方法 - Google Patents

液体吐出ヘッドの製造方法 Download PDF

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Publication number
JP6008636B2
JP6008636B2 JP2012164687A JP2012164687A JP6008636B2 JP 6008636 B2 JP6008636 B2 JP 6008636B2 JP 2012164687 A JP2012164687 A JP 2012164687A JP 2012164687 A JP2012164687 A JP 2012164687A JP 6008636 B2 JP6008636 B2 JP 6008636B2
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JP
Japan
Prior art keywords
metal
flow path
liquid
layer
solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2012164687A
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English (en)
Japanese (ja)
Other versions
JP2014024214A (ja
JP2014024214A5 (enExample
Inventor
和昭 柴田
和昭 柴田
誠 櫻井
誠 櫻井
譲 石田
譲 石田
貞好 佐久間
貞好 佐久間
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2012164687A priority Critical patent/JP6008636B2/ja
Priority to US13/945,283 priority patent/US9427953B2/en
Publication of JP2014024214A publication Critical patent/JP2014024214A/ja
Publication of JP2014024214A5 publication Critical patent/JP2014024214A5/ja
Application granted granted Critical
Publication of JP6008636B2 publication Critical patent/JP6008636B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2012164687A 2012-07-25 2012-07-25 液体吐出ヘッドの製造方法 Expired - Fee Related JP6008636B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012164687A JP6008636B2 (ja) 2012-07-25 2012-07-25 液体吐出ヘッドの製造方法
US13/945,283 US9427953B2 (en) 2012-07-25 2013-07-18 Method of manufacturing liquid ejection head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012164687A JP6008636B2 (ja) 2012-07-25 2012-07-25 液体吐出ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2014024214A JP2014024214A (ja) 2014-02-06
JP2014024214A5 JP2014024214A5 (enExample) 2015-09-03
JP6008636B2 true JP6008636B2 (ja) 2016-10-19

Family

ID=49995144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012164687A Expired - Fee Related JP6008636B2 (ja) 2012-07-25 2012-07-25 液体吐出ヘッドの製造方法

Country Status (2)

Country Link
US (1) US9427953B2 (enExample)
JP (1) JP6008636B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016037625A (ja) * 2014-08-06 2016-03-22 キヤノン株式会社 エッチング方法及び液体吐出ヘッド用基板の製造方法
JP7654512B2 (ja) * 2021-09-08 2025-04-01 キヤノン株式会社 液体吐出装置及び制御方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05293971A (ja) * 1992-04-21 1993-11-09 Canon Inc インクジェット記録装置
US6331259B1 (en) 1997-12-05 2001-12-18 Canon Kabushiki Kaisha Method for manufacturing ink jet recording heads
JP2001287373A (ja) * 1999-11-30 2001-10-16 Canon Inc インクジェット記録ヘッドの製造方法、および該製造方法により製造されたインクジェット記録ヘッド
US6472125B1 (en) 1999-11-30 2002-10-29 Canon Kabushiki Kaisha Method for manufacturing ink jet recording head and ink jet recording head manufactured by such method of manufacture
ITTO20021100A1 (it) 2002-12-19 2004-06-20 Olivetti Jet Spa Testina di stampa a getto d'inchiostro perfezionata e relativo processo di fabbricazione
ITTO20021099A1 (it) * 2002-12-19 2004-06-20 Olivetti I Jet Spa Processo di rivestimento protettivo di microcircuiti idraulici rispetto a liquidi aggressivi. particolarmente per una testina di stampa a getto d'inchiostro.
JP2005097715A (ja) * 2003-08-19 2005-04-14 Mitsubishi Chemicals Corp チタン含有層用エッチング液及びチタン含有層のエッチング方法
JP2006069206A (ja) * 2004-08-06 2006-03-16 Canon Inc 液体吐出ヘッドの製造方法
US7634855B2 (en) 2004-08-06 2009-12-22 Canon Kabushiki Kaisha Method for producing ink jet recording head
JP2006248093A (ja) * 2005-03-11 2006-09-21 Seiko Epson Corp パターニング方法及び液体噴射ヘッドの製造方法
US7560789B2 (en) * 2005-05-27 2009-07-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US20070153062A1 (en) * 2005-12-30 2007-07-05 Shie Jin S Monolithic fabrication method and structure of array nozzles on thermal inkjet print head
US8058182B2 (en) * 2009-07-01 2011-11-15 Xerox Corporation Surface micromachining process of MEMS ink jet drop ejectors on glass substrates
US20110123932A1 (en) * 2009-11-20 2011-05-26 Yimin Guan Method for forming a fluid ejection device
JP5106601B2 (ja) * 2010-08-26 2012-12-26 キヤノン株式会社 液体吐出ヘッド用基板の製造方法、液体吐出ヘッドの製造方法、及び液体吐出ヘッド用基板の検査方法
DE112011105710T5 (de) * 2011-10-07 2014-06-26 Intel Corporation Bildung eines Dram-Kondensators unter einem Metall-Interconnect

Also Published As

Publication number Publication date
US20140030427A1 (en) 2014-01-30
JP2014024214A (ja) 2014-02-06
US9427953B2 (en) 2016-08-30

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