JP2014024214A5 - - Google Patents
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- Publication number
- JP2014024214A5 JP2014024214A5 JP2012164687A JP2012164687A JP2014024214A5 JP 2014024214 A5 JP2014024214 A5 JP 2014024214A5 JP 2012164687 A JP2012164687 A JP 2012164687A JP 2012164687 A JP2012164687 A JP 2012164687A JP 2014024214 A5 JP2014024214 A5 JP 2014024214A5
- Authority
- JP
- Japan
- Prior art keywords
- metal
- liquid
- flow path
- largest amount
- solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000007788 liquid Substances 0.000 claims 22
- 229910052751 metal Inorganic materials 0.000 claims 18
- 239000002184 metal Substances 0.000 claims 18
- 229910045601 alloy Inorganic materials 0.000 claims 10
- 239000000956 alloy Substances 0.000 claims 10
- 238000004519 manufacturing process Methods 0.000 claims 8
- 239000000243 solution Substances 0.000 claims 7
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims 4
- 229910010272 inorganic material Inorganic materials 0.000 claims 4
- 239000011147 inorganic material Substances 0.000 claims 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims 3
- 229910052737 gold Inorganic materials 0.000 claims 3
- 229910052741 iridium Inorganic materials 0.000 claims 3
- 229910052697 platinum Inorganic materials 0.000 claims 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 239000011259 mixed solution Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 229910017604 nitric acid Inorganic materials 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012164687A JP6008636B2 (ja) | 2012-07-25 | 2012-07-25 | 液体吐出ヘッドの製造方法 |
| US13/945,283 US9427953B2 (en) | 2012-07-25 | 2013-07-18 | Method of manufacturing liquid ejection head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012164687A JP6008636B2 (ja) | 2012-07-25 | 2012-07-25 | 液体吐出ヘッドの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014024214A JP2014024214A (ja) | 2014-02-06 |
| JP2014024214A5 true JP2014024214A5 (enExample) | 2015-09-03 |
| JP6008636B2 JP6008636B2 (ja) | 2016-10-19 |
Family
ID=49995144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012164687A Expired - Fee Related JP6008636B2 (ja) | 2012-07-25 | 2012-07-25 | 液体吐出ヘッドの製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US9427953B2 (enExample) |
| JP (1) | JP6008636B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016037625A (ja) * | 2014-08-06 | 2016-03-22 | キヤノン株式会社 | エッチング方法及び液体吐出ヘッド用基板の製造方法 |
| JP7654512B2 (ja) * | 2021-09-08 | 2025-04-01 | キヤノン株式会社 | 液体吐出装置及び制御方法 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05293971A (ja) * | 1992-04-21 | 1993-11-09 | Canon Inc | インクジェット記録装置 |
| US6331259B1 (en) | 1997-12-05 | 2001-12-18 | Canon Kabushiki Kaisha | Method for manufacturing ink jet recording heads |
| US6472125B1 (en) | 1999-11-30 | 2002-10-29 | Canon Kabushiki Kaisha | Method for manufacturing ink jet recording head and ink jet recording head manufactured by such method of manufacture |
| JP2001287373A (ja) * | 1999-11-30 | 2001-10-16 | Canon Inc | インクジェット記録ヘッドの製造方法、および該製造方法により製造されたインクジェット記録ヘッド |
| ITTO20021099A1 (it) * | 2002-12-19 | 2004-06-20 | Olivetti I Jet Spa | Processo di rivestimento protettivo di microcircuiti idraulici rispetto a liquidi aggressivi. particolarmente per una testina di stampa a getto d'inchiostro. |
| ITTO20021100A1 (it) | 2002-12-19 | 2004-06-20 | Olivetti Jet Spa | Testina di stampa a getto d'inchiostro perfezionata e relativo processo di fabbricazione |
| JP2005097715A (ja) * | 2003-08-19 | 2005-04-14 | Mitsubishi Chemicals Corp | チタン含有層用エッチング液及びチタン含有層のエッチング方法 |
| US7634855B2 (en) | 2004-08-06 | 2009-12-22 | Canon Kabushiki Kaisha | Method for producing ink jet recording head |
| JP2006069206A (ja) * | 2004-08-06 | 2006-03-16 | Canon Inc | 液体吐出ヘッドの製造方法 |
| JP2006248093A (ja) * | 2005-03-11 | 2006-09-21 | Seiko Epson Corp | パターニング方法及び液体噴射ヘッドの製造方法 |
| US7560789B2 (en) * | 2005-05-27 | 2009-07-14 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| US20070153062A1 (en) * | 2005-12-30 | 2007-07-05 | Shie Jin S | Monolithic fabrication method and structure of array nozzles on thermal inkjet print head |
| US8058182B2 (en) * | 2009-07-01 | 2011-11-15 | Xerox Corporation | Surface micromachining process of MEMS ink jet drop ejectors on glass substrates |
| US20110123932A1 (en) * | 2009-11-20 | 2011-05-26 | Yimin Guan | Method for forming a fluid ejection device |
| JP5106601B2 (ja) * | 2010-08-26 | 2012-12-26 | キヤノン株式会社 | 液体吐出ヘッド用基板の製造方法、液体吐出ヘッドの製造方法、及び液体吐出ヘッド用基板の検査方法 |
| CN104025294A (zh) * | 2011-10-07 | 2014-09-03 | 英特尔公司 | 金属互连当中dram电容器的形成 |
-
2012
- 2012-07-25 JP JP2012164687A patent/JP6008636B2/ja not_active Expired - Fee Related
-
2013
- 2013-07-18 US US13/945,283 patent/US9427953B2/en not_active Expired - Fee Related
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