JP5995198B2 - 非接触吸着装置 - Google Patents

非接触吸着装置 Download PDF

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Publication number
JP5995198B2
JP5995198B2 JP2011224069A JP2011224069A JP5995198B2 JP 5995198 B2 JP5995198 B2 JP 5995198B2 JP 2011224069 A JP2011224069 A JP 2011224069A JP 2011224069 A JP2011224069 A JP 2011224069A JP 5995198 B2 JP5995198 B2 JP 5995198B2
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Japan
Prior art keywords
opening
suction
workpiece
intermediate member
adsorption
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Expired - Fee Related
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JP2011224069A
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English (en)
Japanese (ja)
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JP2012106331A5 (enExample
JP2012106331A (ja
Inventor
阿部　裕幸
裕幸 阿部
義弘 菊島
義弘 菊島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
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National Institute of Advanced Industrial Science and Technology AIST
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Priority to JP2011224069A priority Critical patent/JP5995198B2/ja
Publication of JP2012106331A publication Critical patent/JP2012106331A/ja
Publication of JP2012106331A5 publication Critical patent/JP2012106331A5/ja
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Publication of JP5995198B2 publication Critical patent/JP5995198B2/ja
Expired - Fee Related legal-status Critical Current
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  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2011224069A 2010-10-29 2011-10-11 非接触吸着装置 Expired - Fee Related JP5995198B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011224069A JP5995198B2 (ja) 2010-10-29 2011-10-11 非接触吸着装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010243754 2010-10-29
JP2010243754 2010-10-29
JP2011224069A JP5995198B2 (ja) 2010-10-29 2011-10-11 非接触吸着装置

Publications (3)

Publication Number Publication Date
JP2012106331A JP2012106331A (ja) 2012-06-07
JP2012106331A5 JP2012106331A5 (enExample) 2014-09-04
JP5995198B2 true JP5995198B2 (ja) 2016-09-21

Family

ID=46492533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011224069A Expired - Fee Related JP5995198B2 (ja) 2010-10-29 2011-10-11 非接触吸着装置

Country Status (1)

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JP (1) JP5995198B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101600382B1 (ko) * 2014-05-12 2016-03-08 제트에스-핸들링 게엠베하 비접촉식 기판 그립핑 장치
CN109677499B (zh) * 2019-02-14 2024-01-16 河北工业大学 一种间隙式负压吸附爬壁机器人
KR102032957B1 (ko) * 2019-03-21 2019-10-16 조석훈 코안다 효과를 이용한 고정지그

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS631647A (ja) * 1986-06-23 1988-01-06 Taiyo Tekko Kk 無接触吸着装置
JPS6450239U (enExample) * 1987-09-24 1989-03-28
JPH09181026A (ja) * 1995-12-25 1997-07-11 Toshiba Corp 半導体装置の製造装置
JP5046009B2 (ja) * 2007-05-15 2012-10-10 圭三 大谷 ノンコンタクト搬送パッド
KR100928674B1 (ko) * 2009-04-07 2009-11-27 삼성코닝정밀유리 주식회사 비접촉 석션 그립핑 장치 및 이를 갖는 비접촉 석션 그립핑 프레임

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Publication number Publication date
JP2012106331A (ja) 2012-06-07

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