JP2012106331A5 - - Google Patents

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Publication number
JP2012106331A5
JP2012106331A5 JP2011224069A JP2011224069A JP2012106331A5 JP 2012106331 A5 JP2012106331 A5 JP 2012106331A5 JP 2011224069 A JP2011224069 A JP 2011224069A JP 2011224069 A JP2011224069 A JP 2011224069A JP 2012106331 A5 JP2012106331 A5 JP 2012106331A5
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JP
Japan
Prior art keywords
opening
intermediate member
outer peripheral
peripheral edge
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011224069A
Other languages
English (en)
Japanese (ja)
Other versions
JP5995198B2 (ja
JP2012106331A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011224069A priority Critical patent/JP5995198B2/ja
Priority claimed from JP2011224069A external-priority patent/JP5995198B2/ja
Publication of JP2012106331A publication Critical patent/JP2012106331A/ja
Publication of JP2012106331A5 publication Critical patent/JP2012106331A5/ja
Application granted granted Critical
Publication of JP5995198B2 publication Critical patent/JP5995198B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011224069A 2010-10-29 2011-10-11 非接触吸着装置 Expired - Fee Related JP5995198B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011224069A JP5995198B2 (ja) 2010-10-29 2011-10-11 非接触吸着装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010243754 2010-10-29
JP2010243754 2010-10-29
JP2011224069A JP5995198B2 (ja) 2010-10-29 2011-10-11 非接触吸着装置

Publications (3)

Publication Number Publication Date
JP2012106331A JP2012106331A (ja) 2012-06-07
JP2012106331A5 true JP2012106331A5 (enExample) 2014-09-04
JP5995198B2 JP5995198B2 (ja) 2016-09-21

Family

ID=46492533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011224069A Expired - Fee Related JP5995198B2 (ja) 2010-10-29 2011-10-11 非接触吸着装置

Country Status (1)

Country Link
JP (1) JP5995198B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101600382B1 (ko) * 2014-05-12 2016-03-08 제트에스-핸들링 게엠베하 비접촉식 기판 그립핑 장치
CN109677499B (zh) * 2019-02-14 2024-01-16 河北工业大学 一种间隙式负压吸附爬壁机器人
KR102032957B1 (ko) * 2019-03-21 2019-10-16 조석훈 코안다 효과를 이용한 고정지그

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS631647A (ja) * 1986-06-23 1988-01-06 Taiyo Tekko Kk 無接触吸着装置
JPS6450239U (enExample) * 1987-09-24 1989-03-28
JPH09181026A (ja) * 1995-12-25 1997-07-11 Toshiba Corp 半導体装置の製造装置
JP5046009B2 (ja) * 2007-05-15 2012-10-10 圭三 大谷 ノンコンタクト搬送パッド
KR100928674B1 (ko) * 2009-04-07 2009-11-27 삼성코닝정밀유리 주식회사 비접촉 석션 그립핑 장치 및 이를 갖는 비접촉 석션 그립핑 프레임

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